USE OF HIGH ENERGY HEAVY ION BEAM FOR DIRECT SPUTTERING

Slide part and surface processing methods of the same

Method for modifying an etch rate of a material layer using energetic charged particles

Localized plasma processing

Plasma etching method and plasma etching apparatus

Plasma etch for chromium alloys

LOWER CHAMBER HEATERS FOR IMPROVED ETCH PROCESSES

Stamping tool and treatment method for stamping tool surface

FIB Process for Selective and Clean Etching of Copper

FIB Process for Selective and Clean Etching of Copper

Multi-film stack etching with polymer passivation of an overlying etched layer

ETCH METHOD IN THE MANUFACTURE OF AN INTEGRATED CIRCUIT

Method of manufacturing magnetic recording medium

METHOD OF ETCHING A MULTI-LAYER

Method for eliminating metallic lithium

DRY ETCHING METHOD, MAGNETO-RESISTIVE ELEMENT, AND METHOD AND APPARATUS FOR MANUFACTURING THE SAME

PROCESS AND APPARATUS FOR FABRICATING MAGNETIC DEVICE

PROCESS AND APPARATUS FOR FABRICATING MAGNETIC DEVICE

FABRICATION OF METALLIC STAMPS FOR REPLICATION TECHNOLOGY

Blade member, and edge working apparatus for the blade member

Methods and systems for removing a material from a sample

Method and apparatus for manufacturing magnetic recording media

DEVICE FOR PROCESSING WELDING WIRE

Photomask blank and photomask making method

Power storage device

Formation method of water repellent layer and injector having water repellent layer

Method of manufacturing magnetic recording medium

ETCHING METHOD AND ETCHING APPARATUS

Method of Smoothing Solid Surface with Gas Cluster Ion Beam and Solid Surface Smoothing Apparatus

Beam-induced etching

Substrate processing methods for reflectors

Process for etching a metal layer suitable for use in photomask fabrication

Electromagnet array in a sputter reactor

Critical dimension reduction and roughness control

Monocyclic high aspect ratio titanium inductively coupled plasma deep etching processes and products so produced

Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus

Solid surface smoothing apparatus

MULTI-STEP ETCH PROCESS FOR GRANULAR MEDIA

Plasma processing apparatus and methods for removing extraneous material from selected areas on a substrate

Etching method, method for producing dielectric film of low dielectric constant, method for producing porous member, etching system and thin film forming equipment

COPPER LAYER PROCESSING

Method and installation for the vacuum colouring of a metal strip by means of magnetron sputtering

Flex-rigid printed wiring board and manufacturing method thereof

BARRIER METAL FILM PRODUCTION APPARATUS, BARRIER METAL FILM PRODUCTION METHOD, METAL FILM PRODUCTION METHOD, AND METAL FILM PRODUCTION APPARATUS

METHOD OF FABRICATING MAGNETIC DEVICE

Metal material and its manufacturing method, thin-film device and its manufacturing method, element-side substrate and its manufacturing method, and liquid crystal display and its manufacturing method

Removing reflective layers from EUV mirrors

Selective etching and formation of xenon difluoride

METHOD AND SYSTEM FOR PATTERNING OF MAGNETIC THIN FLIMS USING GASEOUS TRANSFORMATION

Low-temperature wafer bonding of semiconductors to metals

Nanopin manufacturing method and nanometer sized tip array by utilizing the method

METHOD AND APPARATUS FOR PRODUCING A FEATURE HAVING A SURFACE ROUGHNESS IN A SUBSTRATE

SURFACE TREATMENT METHOD

DRY-ETCHING METHOD AND APPARATUS

Photon induced cleaning of a reaction chamber

Interconnect structure and method of making same

Systems for detecting unconfined-plasma events

PRODUCTION METHOD FOR SEMICONDUCTOR DEVICE

Method of manufacturing metal wiring and method of manufacturing semiconductor device

METHOD AND INSTALLATION FOR THE VACUUM COLOURING OF A METAL STRIP BY MEANS OF MAGNETRON SPUTTERING

Method of fabricating filtered printhead ejection nozzle

FIB milling of copper over organic dielectrics

Method for dry etching AlOfilm

Reactive Ion Etching Process for Etching Metals

Etching Process

BONDING WIRE CLEANING UNIT AND METHOD OF WIRE BONDING USING THE SAME

Endpoint detection for photomask etching

Dry etching method, fine structure formation method, mold and mold fabrication method

Vacuum prcessing apparatus and vacuum processing method of sample

Method and apparatus for flattening solid surface

Method for the formation of surfaces on the inside of medical devices

Wiring and manufacturing method thereof, semiconductor device comprising said wiring, and dry etching method

METHOD FOR PHOTOMASK FABRICATION UTILIZING A CARBON HARD MASK

Masking material for dry etching

Endpoint detection for photomask etching

Plasma processing apparatus and method for controlling the same

Inkjet printhead nozzle with a patterned surface

Plasma processing apparatus and plasma processing method

Pulsed-plasma system with pulsed sample bias for etching semiconductor substrates

Plasma processing method and plasma processing apparatus

GAS DISTRIBUTION UNIFORMITY IMPROVEMENT BY BAFFLE PLATE WITH MULTI-SIZE HOLES FOR LARGE SIZE PECVD SYSTEMS

ENDPOINT DETECTION FOR PHOTOMASK ETCHING

Confinement ring drive

Gas for plasma reaction, process for producing the same, and use thereof

Etching method and etching apparatus

Method for photomask fabrication utilizing a carbon hard mask

Etching of nano-imprint templates using an etch reactor

Electrode Array Device Having An Adsorbed Porous Reaction Layer

Nanometer-scale sharpening of conductor tips

Method and apparatus for photomask plasma etching

Film formation apparatus and film formation method and cleaning method

PHOTOMASK FABRICATION UTILIZING A CARBON HARD MASK

Method to minimize CD etch bias

Photomask blank, photomask and method for producing those

Photomask blank and photomask making method

Plasma processing apparatus and method for controlling the same

Etch methods to form anisotropic features for high aspect ratio applications

Dry etching method, fine structure formation method, mold and mold fabrication method

Dry etching method, fine structure formation method, mold and mold fabrication method

Process for etching photomasks

Formation of nanoscale surfaces for the atttachment of biological materials

Plasma processing apparatus and plasma processing method

Method of manufacturing an electrical component

Vacuum processing apparatus and vacuum processing method of sample

Planarization with reduced dishing

Method of forming a metal line and method of manufacturing display substrate having the same

Etch selectivity enhancement in electron beam activated chemical etch

Structural modification using electron beam activated chemical etch

Method for setting plasma chamber having an adaptive plasma source, plasma etching method using the same and manufacturing method for adaptive plasma source

Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus

Masking material for dry etching

Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus

Metal MEMS devices and methods of making same

Radio frequency grounding rod

Radio frequency grounding apparatus

Process for etching a metal layer suitable for use in photomask fabrication

Method and device for removing layers in some areas of glass plates

Method of forming patterns and method of manufacturing magnetic recording media

Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus

Method of fabricating inkjet nozzle chambers having filter structures

Method of fabricating inkjet nozzles having associated ink priming features

Method of fabricating inkjet nozzle chambers having sidewall entrance

Plasma ethching apparatus and plasma etching process

Method for plasma etching a chromium layer through a carbon hard mask suitable for photomask fabrication

Methods for protecting metal surfaces

Vacuum plasma processor having a chamber with electrodes and a coil for plasma excitation and method of operating same

METHOD FOR PREVENTING CHARGE-UP IN PLASMA PROCESS AND SEMICONDUCTOR WAFER MANUFACTURED USING SAME

Three-dimensional metal microfabrication process and devices produced thereby

Surface treating method and surface-treating apparatus

Gas for removing deposit and removal method using same

Method for advanced time-multiplexed etching

Cluster tool and method for process integration in manufacturing of a photomask

Cluster tool and method for process integration in manufacturing of a photomask

Method for manufacturing semiconductor device

Method of plasma etching transition metals and their compounds

Plasma etching apparatus and plasma etching method

Method and apparatus for manufacturing magnetic recording media

Method for fabricating semiconductor device

Rolled product, method and device for the production thereof, and use of the same

Electrode assembly and plasma processing apparatus

Method for smoothing a solid surface

Method for manufacturing a magnetic sensor having an ultra-narrow track width

Vacuum reaction chamber with x-lamp heater

Method and apparatus for cleaning and surface conditioning objects using plasma

Critical dimension reduction and roughness control

Method to address carbon incorporation in an interpoly oxide

Plasma processing apparatus

Semiconductor device fabrication method

Vacuum processing apparatus and vacuum processing method of sample

Beam-induced etching

Gas distribution uniformity improvement by baffle plate with multi-size holes for large size PECVD systems

Selective isotropic etch for titanium-based materials

FIB MILLING OF COPPER OVER ORGANIC DIELECTRICS

Bonding wire cleaning unit and method of wire bonding using same

Capacitive coupling plasma processing apparatus and method for using the same

Method and apparatus for cleaning and surface conditioning objects using plasma

Plasma processing method and apparatus

Plasma processing method and apparatus, and method for measuring a density of fluorine in plasma

Gas supply member and plasma processing apparatus

Reflectors, substrate processing apparatuses and methods for the same

Chuck pedestal shield

Control of process gases in specimen surface treatment system

Photo resist stripping and de-charge method for metal post etching to prevent metal corrosion

Specimen surface treatment system

Specimen surface treatment system

Purge process conducted in the presence of a purge plasma

Plasma processing method and apparatus

Mask material for reactive ion etching, mask and dry etching method

Method for plasma etching a chromium layer suitable for photomask fabrication

Methods and apparatus for etching metal layers on substrates

Method for making a contact magnetic transfer template

Confinement ring drive

Pattern reversal process for self aligned imprint lithography and device

Method and apparatus for forming surface shape, method and apparatus for forming flying surface shape of magnetic head

Low temperature, atmospheric pressure plasma generation and applications

Focus rings, apparatus in chamber, contact hole and method of forming contact hole

Process for manufacturing a reference leak

Window protector for sputter etching of metal layers

Method for controlling corrosion of a substrate

Magnetic head and method of making the same using an etch-stop layer for removing portions of the capping layer

Method for fabricating semiconductor device using ArF photolithography capable of protecting tapered profile of hard mask

Method for manufacturing magnetic recording medium

Planarization with reduced dishing

Plasma etching method

Atmospheric pressure plasma system

Plasma processing apparatus and methods for removing extraneous material from selected areas on a substrate

Plasma processing apparatus and method for controlling the same

Method for removing at least one partial area of a component made of metal or a metallic compound

Method for etching chromium thin film and method for producing photomask

Electrode array device having an adsorbed porous reaction layer

Post-etch treatment to remove residues

Selective etching processes of SiO, Ti and InOthin films for FeRAM device applications

Gas-introducing system and plasma CVD apparatus

Plasma etching method

Method to address carbon incorporation in an interpoly oxide

Method of etching metals with high selectivity to hafnium-based dielectric materials

Thin film forming method and system

Plasma treatment method

Method for making chrome photo mask

Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus

Multi-step process for etching photomasks

Localized plasma processing

Electrically floating diagnostic plasma probe with ion property sensors

Mirror process using tungsten passivation layer for preventing metal-spiking induced mirror bridging and improving mirror curvature

Transition radiation apparatus and method therefor

Method for the recovery of ash rate following metal etching

Imprint stamp

Process for low temperature, dry etching, and dry planarization of copper

Method and apparatus for stable plasma processing

Method of dry etching, method of manufacturing magnetic recording medium, and magnetic recording medium

Dry-etching method and apparatus

Diagnostic plasma measurement device having patterned sensors and features

Two-axis device and manufacturing method therefor

Plasma processing apparatus and method, and plasma control unit

Seasoning method for etch chamber

Wiring and manufacturing method thereof, semiconductor device comprising said wiring, and dry etching method

Multi-step process for forming a metal barrier in a sputter reactor

Magnetic memory device and method of manufacturing the same

Selective dry etching of tantalum and tantalum nitride

Device for processing welding wire

Metal wiring and method of manufacturing the same, and metal wiring substrate and method of manufacturing the same

Anisotropic dry etching of Cu-containing layers

Plasma etching of Ni-containing materials

Plasma etching apparatus and plasma etching process

Method of forming a catalytic surface comprising at least one of Pt, Pd, Co and Au in at least one of elemental and alloy forms

Method of cleaning reaction chamber using substrate having catalyst layer thereon

Method for etching upper metal of capacitator

Plasma processing apparatus and plasma processing method

Master for concavo-convex pattern transfer and method for manufacturing stamp for manufacturing information recording medium

Surface treatment process for enhancing a release rate of metal ions from a sacrificial electrode and a related sacrificial electrode

Film formation apparatus and film formation method and cleaning method

Process for the locally restricted etching of a chromium layer

Method of manufacturing semiconductor device

Gas for plasma reaction, process for producing the same, and use

Method and system for patterning of magnetic thin films using gaseous transformation to transform a magnetic portion to a non-magnetic portion

FIB milling of copper over organic dielectrics

Selective isotropic etch for titanium-based materials

Wiring and manufacturing method thereof, semiconductor device comprising said wiring, and dry etching method

Process for defining a chalcogenide material layer, in particular in a process for manufacturing phase change memory cells

Magnetic memory device and method of manufacturing the same

Dry etching method for magnetic material

Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof

Multi-step process for etching photomasks

Thin film resistor etch

Method and apparatus for smoothing surfaces on an atomic scale

Protective leaching mask assemblies and methods of use

Method of fabricating single Rh layer optical field enhancer with pre-focusing structures

Method and apparatus for removing paint on metallic components

Process for repairing a worn carburized steel surface of a sprag clutch

Etching technique for microfabrication substrates

Protective leaching mask assemblies and methods of use