142949 ⎘
Pumps having pertinent characteristics not provided for in, or of interest apart from, groups - for special use to obtain high vacuum Means for nullifying unswept space
GAS JET DEFLECTION IN PRESSURIZED SYSTEMS
#2Gas jet deflection in pressurized systems
#3Gas jet deflection in pressurized systems
#4CLEANING APPARATUS FOR VACUUM EXHAUST SYSTEM
#5Gas jet deflection in pressurized systems
#6Cryopump with enhanced frontal array
#7Vacuum pump apparatus, and pump main body unit, control unit, and spacer each for use in vacuum pump apparatus
#8Vacuum pump, and waterproof structure and control apparatus applied to vacuum pump
#9Integrated connector between first and second vacuum pumps creating a vapor phase region environment
#10Cryopump and gate valve
#11Dry pump and exhaust gas treatment method
#12Vacuum evacuation system
#13Membrane vacuum pump
#14Negative pressure pump and cylinder head cover
#15Vacuum pump protection net, method for manufacturing the same, and vacuum pump
#16Vacuum apparatus
#17Splinter shield for vacuum pump, and vacuum pump with the splinter shield
#18Double vacuum pump apparatus, gas purification system provided with double vacuum pump apparatus, and exhaust gas vibration suppressing device in double vacuum pump apparatus