143010 ⎘
Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups -; Adaptations or arrangements of distribution members the members being low-resistance valves allowing free streaming
VIRTUAL VALVE IN A MEMS-BASED COOLING SYSTEM
#2Virtual valve in a MEMS-based cooling system
#3Fluid control device
#4Piezoelectric micro-blower
#5Suction throttle valve of a compressor