143779 ⎘
Application Use in a chemical vapor deposition [CVD] process or in a similar process
Vacuum pumping
#2Vacuum pumping system having a plurality of positive displacement vacuum pumps and method for operating the same
#3Pumping unit and use
#4Vacuum exhaust system and channel-switching valve used in this vacuum exhaust system
#5IMPROVEMENTS IN OR RELATING TO VACUUM PUMPING ARRANGEMENT
#6Pumping method in a system of vacuum pumps and system of vacuum pumps
#7Method and device for pumping of a process chamber
#8Method and pump arrangement for evacuating a chamber
#9Deposit detection device for exhaust pump and exhaust pump
#10Vacuum pump with abatement function
#11Vacuum pumping system
#12Pump enveloped with thermally conductive material
#13Reclaim function for semiconductor processing system
#14Scroll compressor
#15ENERGY REDUCTION MODULE USING A DEPRESSURIZING VACUUM APPARATUS FOR VACUUM PUMP
#16VACUUM PUMP
#17Method of Pumping Gas
#18Vacuum Pump
#19Reclaim function for semiconductor processing systems
#20Vacuum Apparatus
#21Composite dry vacuum pump having roots and screw rotor
#22Vaccum pump having shaft seal to prevent corrosion and to ensure smooth operation
#23Systems and methods for reclaiming process fluids in a processing environment
#24Fast enclosure pumping with power saving
#25Rapidly pumping out an enclosure while limiting energy consumption
#26Composite dry vacuum pump having roots rotor and screw rotor
#27Apparatus for controlling the pressure in a process chamber and method of operating same
#28Manufacturing apparatus and method for predicting life of rotary machine used in the same
#29Extending life cycles of vacuum pumps used in manufacturing processes