F16C2300/62 - CPC Classification Index

#1

20230323913

2023-10-12

JOINT FOR A DEVICE MOVEABLE IN VACUUM, MECHANISM FOR MOVING A DEVICE IN VACUUM AND DEVICE

#2

20210372469

2021-12-02

Device and vacuum chamber

#3

20190308815

2019-10-10

Vacuum nose roll

#4

20190085968

2019-03-21

Lubrication system and a method for lubricating a transmission system component

#5

20180306246

2018-10-25

Magnetic fluid seal

#6

20170306940

2017-10-26

Device for improving the vacuum in the housing of a machine

#7

20170108405

2017-04-20

Bearing testing apparatus and method

#8

20160312826

2016-10-27

PROTECTIVE BEARING, BEARING UNIT, AND VACUUM PUMP

#9

20160238076

2016-08-18

Solid lubricant and solid-lubrication rolling bearing

#10

20150037514

2015-02-05

Method and a device for depositing a film of material or otherwise processing or inspecting, a substrate as it passes through a vacuum environment guided by a plurality of opposing and balanced air bearing lands and sealed by differentially pumped grooves and sealing lands in a non-contact manner

#11

20110255999

2011-10-20

USE OF A ROLLING-ELEMENT BEARING FOR BEARING ROTATING COMPONENTS IN VACUUM DEVICES AND VACUUM DEVICE

#12

20110204255

2011-08-25

Stage device

#13

20110096308

2011-04-28

APPARATUS COMPRISING A ROTATING CONTAMINANT TRAP

#14

20110079963

2011-04-07

Vacuum apparatus of rotary motion entry

#15

20100282271

2010-11-11

Method and apparatus for in-line processing and immediately sequential or simultaneous processing of flat and flexible substrates through viscous shear in thin cross section gaps for the manufacture of micro-electronic circuits or displays

#16

20100259733

2010-10-14

Apparatus comprising a rotating contaminant trap

#17

20100092113

2010-04-15

STATIC PRESSURE SLIDER AND TRANSFERRING DEVICE AND PROCESSING DEVICE PROVIDED WITH THE SAME

#18

20090297075

2009-12-03

Hydrostatic Slider

#19

20080074635

2008-03-27

Supporting apparatus, exposure apparatus, and device manufacturing method

#20

20070110347

2007-05-17

Static-pressure gas bearing mechanism

#21

20070107739

2007-05-17

Straight conveying device for vacuum

#22

20070034228

2007-02-15

Method and apparatus for in-line processing and immediately sequential or simultaneous processing of flat and flexible substrates through viscous shear in thin cross section gaps for the manufacture of micro-electronic circuits or displays

#23

20070031600

2007-02-08

Method and a device for depositing a film of material or otherwise processing or inspecting, a substrate as it passes through a vacuum environment guided by a plurality of opposing and balanced air bearing lands and sealed by differentially pumped groves and sealing lands in a non-contact manner

#24

20060187437

2006-08-24

Alignment apparatus and exposure apparatus

#25

20060124864

2006-06-15

Air bearing compatible with operation in a vacuum

#26

20060093244

2006-05-04

Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for hydrostatic gas bearing device

#27

20060061042

2006-03-23

Positioning apparatus

#28

20060060259

2006-03-23

Moving vacuum chamber stage with air bearing and differentially pumped grooves

#29

20050166695

2005-08-04

Liner motion device, rolling device and separator for rolling device

#30

20050129339

2005-06-16

Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method

#31

20050018165

2005-01-27

Stage system, exposure apparatus, and device manufacturing method

#32

20050011581

2005-01-20

Chamber, exposure apparatus, and device manufacturing method

#33

20050002012

2005-01-06

Stage apparatus, static pressure bearing apparatus, positioning method, exposure apparatus and method for manufacturing device