148044 ⎘
Electrical apparatus Handling tools for semiconductor devices
Active aerostatic bearing
#2Gas floated workpiece supporting apparatus and noncontact workpiece support method
#3360 static/hinge structure with deformable parts
#4Gas floated workpiece supporting apparatus and noncontact workpiece support method
#5Rotation mechanism, machine tool, and semiconductor manufacturing device
#6Rolling bearing
#7Gas bearing assembly for an EUV light source
#8Rolling bearing
#9HIGH-TEMPERATURE AXLE BEARING MADE OF NI3(SI, TI)-BASED INTERMETALLIC COMPOUND ALLOY AND METHOD FOR PRODUCING THE SAME
#10INTEGRATED BEARING ASSEMBLY
#11Hydrostatic bearing and stage apparatus
#12Liner motion device, rolling device and separator for rolling device