147350 ⎘
Bearings for parts moving only linearly; Sliding-contact bearings Hydrostatic or aerostatic
GAS PRESSURE DRIVING DEVICE, POSITIONING DEVICE, PROCESSING DEVICE, AND DEVICE MANUFACTURING METHOD
#2FRICTION DAMPER
#3GAS RESTRICTION STRUCTURE CONSTITUTING AEROSTATIC BEARING, AND AEROSTATIC BEARING
#4ASYMMETRIC GAS BEARING BUSHING FOR THERMO-PUMP
#5AIR-FLOATING GUIDE RAIL
#6Air-floating guide rail
#7Ultra-low profile aerostatic bearing and the method of manufacturing the same
#8ACTUATOR, STAGE DEVICE, EXPOSURE DEVICE, INSPECTION DEVICE
#9Electrostatic dissipative externally pressurized porous bearings
#10HIGH PRECISION MACHINE TOOL HAVING LINEAR DRIVE-AND GUIDE BEARING
#11HYDROSTATIC BEARING FOR PRECISION LINEAR MOTION GUIDANCE
#12ELEVATOR SYSTEM WITH AIR-BEARING LINEAR MOTOR
#13Hydraulic bearings and related devices, assemblies, and methods
#14SYSTEM AND METHOD OF MEASURING WARPAGE OF A WORKPIECE ON A NONCONTACT SUPPORT PLATFORM
#15Linear compressor
#16Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method
#17ENCLOSED CONVEYOR
#18PLANAR ROTARY AIR BEARING STAGE
#19Outboard hydrostatic bearing assembly for can bodymaker
#20Floating unit
#21System and method of measuring warpage of a workpiece on a noncontact support platform
#22Air suspension support and motion guiding device having unequal-depth throttling chambers
#23Object stage bearing for lithographic apparatus
#24Active aerostatic bearing
#25Aerostatic bearing
#26Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method
#27Throttle unit and a static pressure bearing device equipped with the throttle unit, and a method of manufacturing a grooved block
#28Fluid bearing assembly
#29Planar rotary air bearing stage
#30Rheometer with a rotary rheometer and a linear DM (T)A analysis unit
#31Air bearing and rotor system
#32Planarity alignment of stencils and workpieces
#33Outboard hydrostatic bearing assembly for can bodymaker
#34Gate-type moving device and three-dimensional measuring machine
#35Device for supporting and/or driving machines, instruments and/or structures in general, particularly for supporting and/or driving a telescope
#36Lubrication mechanism design for aircraft landing gear bearings
#37Pneumatic bearing assembly for a linear guide rail
#38Vibration test fixture
#39Machine tool and control method of machine tool
#40Fluid bearing systems and methods
#41Bellows support structure and slide table device
#42Adjustable magnetic buoyancy gravity compensator
#43Kind of self-adjusting static pressured plane guide rail
#44Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method
#45THROTTLE UNIT AND A STATIC PRESSURE BEARING DEVICE EQUIPPED WITH THE THROTTLE UNIT, AND A METHOD OF MANUFACTURING A GROOVED BLOCK
#46Air bearing
#47Coordinate measuring machine with carbon fiber air bearings
#48HYDROSTATIC BEARING MONITORING SYSTEM AND METHOD
#49FEEDING MODULE
#50Aerostatic bearing
#51Aerostatic bearing
#52VARIABLE-THROTTLE HYDROSTATIC BEARING
#53Table device and conveyance device
#54Table device and conveyance device
#55Outboard hydrostatic bearing assembly for can bodymaker
#56Hydrostatic pressure guide mechanism and machine tool
#57Guide mechanism of machine tool and machine tool
#58Rig skidding system
#59Hydrostatic profiled rail guide
#60Aerostatic bearing
#61Coordinate measuring machine with carbon fiber air bearings
#62HYDROSTATIC BEARING
#63Aerostatic air bearing, assembling method thereof, and aerostatic lead screw actuator using the same
#64Gas pressure bearing element
#65Flow restrictor and gas compressor
#66Mechanism for maintaining a clearance gap
#67Hydrostatic fluid guide device
#68Hydrostatic guide device and machine tool using the hydrostatic guide device
#69Hydrostatic rail guide
#70Actively compensated stage having 5-DOF motion error compensation and motion error compensating method thereof
#71Split type aerostatic bearing
#72Fluid-leveled bearing plate
#73VARIABLE FLOW-RATE HYDROSTATIC BEARING
#74Precision transfer equipment
#75Active compensating hydrostatic bearing and hydrostatic bearing module using the same
#76Parallel slider device with a pneumatic linear guide, control method therefor and measuring device using same
#77Static-pressure bearing apparatus and stage comprising static-pressure bearing apparatus
#78Seal for a hydrostatic linear guide
#79PRE-STRESSED AIR BEARING
#80Apparatus and method for atomic layer deposition
#81Device with a displaceable carriage and a linear guide
#82Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method
#83Driving apparatus and exposure apparatus and device fabrication method
#84Air-bearing slide platform having positioning module
#85Device of Producing Wafer Lens and Method of Producing Wafer Lens
#86Stage device
#87Clean room-suitable linear guide
#88Linear slide table
#89Self-compensating hydrostatic planar bearing device and method thereof
#90BEARING DEVICE, STAGE DEVICE, AND EXPOSURE APPARATUS
#91Aerostatic bearing and method for production thereof
#92Linear Compressor With Sintered Bearing Bush
#93Fluid bearing structure and method of forming bearing concaves in fluid bearing structure
#94Hydrostatic profile rail guide
#95Air guide
#96GAS THRUST BEARING AND ASSOCIATED PRODUCTION METHOD
#97STATIC PRESSURE SLIDER AND TRANSFERRING DEVICE AND PROCESSING DEVICE PROVIDED WITH THE SAME
#98Static bearing conveying apparatus having magnetically preloading and motional error correcting functions
#99Hydrostatic mounting
#100Hydrostatic mounting
#101HYDROSTATIC PROFILE RAIL GUIDE
#102GAS THRUST BEARING AND BEARING BUSH THEREFOR
#103LINEAR COMPRESSOR AND GAS THRUST BEARING THEREFOR
#104Gas Bearing
#105AEROSTATIC DEVICE DAMPER
#106Hydrostatic Slider
#107Hydrostatic profile rail guide
#108Flexure guide bearing for short stroke stage
#109Measuring device
#110Driving apparatus and exposure apparatus, and device fabrication method
#111FLUID BEARING STRUCTURE AND ASSEMBLY METHOD FOR FLUID BEARING STRUCTURE
#112Movable body apparatus, exposure apparatus and optical system unit, and device manufacturing method
#113Hydrostatic bearing and stage apparatus
#114Gasket for a hydrostatic linear guide
#115Hydrostatic guide system
#116Gas bearing system
#117Stabilizing a substrate using a vacuum preload air bearing chuck
#118Hydrostatic bearing
#119Air bearing assembly for guiding motion of optical components of a laser processing system
#120Gas Bearing Spindles
#121Bearing Device, Stage Device, and Exposure Apparatus
#122Support Apparatus, Stage Apparatus, Exposure Apparatus, And Device Manufacturing Method
#123Compact surface self-compensated hydrostatic bearings
#124Gas bearing, and lithographic apparatus provided with such a bearing
#125Slide guiding device
#126Non-contact support platforms for distance adjustment
#127Method of assembling air bearing, air bearing and linear drive unit equipped with the same
#128Clamping unit with a platen hydrostatically supported on a frame element
#129Static-pressure gas bearing mechanism
#130Novel foil bearing
#131Fluid bearing
#132Vacuum pre-loaded pneumatic bearing with onboard vacuum generator
#133Sliding guide apparatus
#134Hydrostatic bearing for linear motion guidance
#135Hydrostatic bearing for linear motion guidance
#136Device comprising a floating bearing system and guide track consisting of tiles
#137Non-contact porous air bearing and glass flattening device
#138Alignment apparatus and exposure apparatus
#139Dust-proof linear bearing structure
#140Gas bearing system
#141Lithographic apparatus and actuator
#142Lithographic apparatus, reticle masking device for a lithographic apparatus, gas bearing and apparatus comprising such gas bearing
#143Air bearing compatible with operation in a vacuum
#144Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for hydrostatic gas bearing device
#145Gas bearing system
#146Positioning apparatus
#147Moving vacuum chamber stage with air bearing and differentially pumped grooves
#148Fluid dynamic bearing structure and method of adjusting bearing gap
#149High-Performance non-contact support platforms
#150Bearing assembly, stage device using same, and exposure apparatus using same
#151Air bearing structure and linear driving device using said air bearing structure
#152Transporting apparatus
#153Pneumatic cylinder
#154Hydrostatic pressure linear guide device
#155Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method
#156Hydrodynamic bearing apparatus and stage apparatus using the same
#157Low friction bearing support and leveling assembly and method
#158Stage system, exposure apparatus, and device manufacturing method
#159System and methods for imaging employing a levitating conveyor
#160Sliding guide apparatus
#161Chamber, exposure apparatus, and device manufacturing method
#162Hydrostatic bearing, alignment apparatus, exposure apparatus, and device manufacturing method
#163Stage apparatus, static pressure bearing apparatus, positioning method, exposure apparatus and method for manufacturing device
#164Six-degree-of-freedom air-floating moving apparatus
#165Large-stroke air flotation type nano-positioning platform
#166Combinable multi-axis structure and linear motion platform having the structure
#167Hydrostatic linear guideway
#168Machine tool
#169Hydrostatic bearing assembly
#170Membrane restrictor and hydrostatic bearing module