147426 ⎘
Bearings not otherwise provided for using magnetic or electric supporting means; Magnetic bearings; Passive magnetic bearings with permanent magnets on both parts repelling each other for parts moving linearly
Substrate transport vacuum platform
#2Weight-force compensation device
#3Substrate transport vacuum platform
#4Substrate transport vacuum platform
#5Magnet-type rodless cylinder
#6Substrate transport vacuum platform
#7Guide having passive gravity compensation and a vertically movably mounted platform
#8Substrate processing apparatus
#9Magnetic levitation sliding structure
#10Magnetic bearing assembly using repulsive magnetic forces
#11Magnetic bearing assembly using repulsive magnetic forces
#12Magnetic floating device