147444 ⎘
Bearings not otherwise provided for using magnetic or electric supporting means; Magnetic bearings; Active magnetic bearings for linear movement
MAGNETICALLY PRELOADED STAGE ASSEMBLY FOR ELECTRONIC COMPONENTS
#2MAGNETIC BEARING FOR SUPPORTING AN RC PISTON
#3MAGNETIC BEARING DEVICE
#4A CAPACITIVE SENSOR DEVICE AND A MAGNETIC BEARING ASSEMBLY WITH SUCH CAPACITIVE SENSOR DEVICE
#5Magnetic bearing device and positioning system
#6HIGH PRECISION MACHINE TOOL HAVING LINEAR DRIVE-AND GUIDE BEARING
#7Linear guideway assembly for contactless linear displacement of a rigid body relative to another rigid body along a linear displacement path
#8Substrate transport vacuum platform
#9Contactless vertical transfer device using linear motor
#10Device and vacuum chamber
#11Magnetic bearing assembly as well as a linear guideway assembly implementing one or more such magnetic bearing assemblies
#12Apparatus for at least one of holding, positioning and moving an object and method of operating an apparatus for at least one of holding, positioning and moving an object
#13Metamaterial null flux magnetic bearing system
#14Substrate transport vacuum platform
#15Substrate transport vacuum platform
#16Metamaterial null flux magnet bearing system
#17Linear actuator
#18Drive for an XY-table and XY-table
#19Thrust magnetic bearing for bias compensation
#20Substrate transport vacuum platform
#21Piston engine having magnetic piston bearing
#22Method of assembling a shaft for a magnetic motor
#23Substrate processing apparatus and method
#24Bearing surface layer for magnetic motor
#25Apparatus for processing an object with high position accurancy
#26Linear motor and electronic component feeding apparatus
#27Bearing surface layer for magnetic motor