147460 ⎘
Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being retained in a gap, e.g. squeeze film bearings by means of vibrations
Gas bearing system
#2Measuring drive having ultrasound-mounted shaft, measuring device, method and use
#3Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method
#4Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method
#5Ultrasonic near field hot glass transportation and forming
#6Support table for a lithographic apparatus, method of loading a substrate, lithographic apparatus and device manufacturing method
#7Device for non-contact transporting and holding of objects or material
#8ELECTRIC MOTOR WITH ULTRASONIC NON-CONTACT BEARING
#9Ultrasonic float-up device