147657 ⎘
Parts of bearings; Special methods for making bearings or parts thereof; Sealings of sliding-contact bearings by means of a fluid flowing to or from the sealing gap, e.g. vacuum seals with differential exhaust
AIR BEARING FOR USE AS SEAL
#2DUSTPROOF SEAL STRUCTURE
#3BEARING ARRANGEMENT FOR A SHAFT IN A TURBOCOMPRESSOR
#4Electrostatic dissipative externally pressurized porous bearings
#5Externally pressurized oil-free freon bearing
#6Air bearing for use as seal
#7Centrifugal compressor with seal bearing
#8Journal Device and rotary machine
#9Apparatus and method for controlling a pressure differential across a seal of a bearing chamber
#10Centrifugal compressor
#11VACUUM DOUBLE STRUCTURE AND HEAT TREAT FURNACE
#12Sliding parts
#13Method and a device for depositing a film of material or otherwise processing or inspecting, a substrate as it passes through a vacuum environment guided by a plurality of opposing and balanced air bearing lands and sealed by differentially pumped grooves and sealing lands in a non-contact manner
#14Gas bearing assembly for an EUV light source
#15Air bearing for use as seal
#16Air bearing for use as seal
#17Air bearing for use as a seal
#18Method and apparatus for in-line processing and immediately sequential or simultaneous processing of flat and flexible substrates through viscous shear in thin cross section gaps for the manufacture of micro-electronic circuits or displays
#19STATIC PRESSURE SLIDER AND TRANSFERRING DEVICE AND PROCESSING DEVICE PROVIDED WITH THE SAME
#20Hydrostatic Slider
#21Hydrostatic bearing and stage apparatus
#22Method and apparatus for in-line processing and immediately sequential or simultaneous processing of flat and flexible substrates through viscous shear in thin cross section gaps for the manufacture of micro-electronic circuits or displays
#23Method and a device for depositing a film of material or otherwise processing or inspecting, a substrate as it passes through a vacuum environment guided by a plurality of opposing and balanced air bearing lands and sealed by differentially pumped groves and sealing lands in a non-contact manner
#24Alignment apparatus and exposure apparatus
#25Dust-proof linear bearing structure
#26Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for hydrostatic gas bearing device
#27Positioning apparatus
#28Moving vacuum chamber stage with air bearing and differentially pumped grooves
#29Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method
#30Chamber, exposure apparatus, and device manufacturing method
#31Stage apparatus, static pressure bearing apparatus, positioning method, exposure apparatus and method for manufacturing device
#32Membrane restrictor and hydrostatic bearing module