ClassID:

147657

F16C33/748 - CPC Classification

Classification description:

Parts of bearings; Special methods for making bearings or parts thereof; Sealings of sliding-contact bearings by means of a fluid flowing to or from the sealing gap, e.g. vacuum seals with differential exhaust

Recent Application in this class:
#1
20250020163
2025-01-16

AIR BEARING FOR USE AS SEAL

#2
20240063680
2024-02-22

DUSTPROOF SEAL STRUCTURE

#3
20230113619
2023-04-13

BEARING ARRANGEMENT FOR A SHAFT IN A TURBOCOMPRESSOR

#4
20230069184
2023-03-02

Electrostatic dissipative externally pressurized porous bearings

#5
20210254663
2021-08-19

Externally pressurized oil-free freon bearing

#6
20200347881
2020-11-05

Air bearing for use as seal

#7
20190128273
2019-05-02

Centrifugal compressor with seal bearing

#8
20190032718
2019-01-31

Journal Device and rotary machine

#9
20180252163
2018-09-06

Apparatus and method for controlling a pressure differential across a seal of a bearing chamber

#10
20180209435
2018-07-26

Centrifugal compressor

#11
20180135757
2018-05-17

VACUUM DOUBLE STRUCTURE AND HEAT TREAT FURNACE

#12
20150377297
2015-12-31

Sliding parts

#13
20150037514
2015-02-05

Method and a device for depositing a film of material or otherwise processing or inspecting, a substrate as it passes through a vacuum environment guided by a plurality of opposing and balanced air bearing lands and sealed by differentially pumped grooves and sealing lands in a non-contact manner

#14
20140376842
2014-12-25

Gas bearing assembly for an EUV light source

#15
20140294329
2014-10-02

Air bearing for use as seal

#16
20140286599
2014-09-25

Air bearing for use as seal

#17
20130188895
2013-07-25

Air bearing for use as a seal

#18
20100282271
2010-11-11

Method and apparatus for in-line processing and immediately sequential or simultaneous processing of flat and flexible substrates through viscous shear in thin cross section gaps for the manufacture of micro-electronic circuits or displays

#19
20100092113
2010-04-15

STATIC PRESSURE SLIDER AND TRANSFERRING DEVICE AND PROCESSING DEVICE PROVIDED WITH THE SAME

#20
20090297075
2009-12-03

Hydrostatic Slider

#21
20090016651
2009-01-15

Hydrostatic bearing and stage apparatus

#22
20070034228
2007-02-15

Method and apparatus for in-line processing and immediately sequential or simultaneous processing of flat and flexible substrates through viscous shear in thin cross section gaps for the manufacture of micro-electronic circuits or displays

#23
20070031600
2007-02-08

Method and a device for depositing a film of material or otherwise processing or inspecting, a substrate as it passes through a vacuum environment guided by a plurality of opposing and balanced air bearing lands and sealed by differentially pumped groves and sealing lands in a non-contact manner

#24
20060187437
2006-08-24

Alignment apparatus and exposure apparatus

#25
20060182373
2006-08-17

Dust-proof linear bearing structure

#26
20060093244
2006-05-04

Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for hydrostatic gas bearing device

#27
20060061042
2006-03-23

Positioning apparatus

#28
20060060259
2006-03-23

Moving vacuum chamber stage with air bearing and differentially pumped grooves

#29
20050129339
2005-06-16

Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method

#30
20050011581
2005-01-20

Chamber, exposure apparatus, and device manufacturing method

#31
20050002012
2005-01-06

Stage apparatus, static pressure bearing apparatus, positioning method, exposure apparatus and method for manufacturing device

#32
15682563
2018-08-21

Membrane restrictor and hydrostatic bearing module