PIEZOELECTRIC ACTUATOR CONTROLLED SMART FLOW REGULATOR FOR AIRCRAFT OXYGEN SYSTEMS

Piezo-Actuated Valve and Dispense Cassette

Aeromechanical Damping Measurement System for a Gas Turbine Engine

Methods and Apparatus for Reporting Inlet Pressure in Mass Flow Controllers

FLOW RATE CONTROL VALVE

FLUID FLOW VALVE AND METHODS OF OPERATING THEREOF

PIEZOELECTRIC VALVE

FLUID CONTROL VALVE AND FLUID CONTROL DEVICE

PEIZOELECTRIC VALVE ASSEMBLY

FLUID CONTROL VALVE, FLUID CONTROL DEVICE, AND MATERIAL SUPPLY SYSTEM

METHOD FOR DETERMINING AN OPENING POINT POSITION VALUE AND VALVE DEVICE

SYSTEM AND METHOD FOR ATTACHING A POPPET TO AN ELECTROMECHANICAL ACTUATOR APPARATUS

Method and apparatus for mass flow control

Piezo-Actuated Valve and Dispense Cassette

ELECTRIC VALVE

PIEZOELECTRIC VALVE

Piezoelectric valve

SERVOVALVE

Flow rate control device and flow rate control method

Systems and methods for sealing micro-valves for use in jetting assemblies

Active flow control system

FLUID CONTROL DEVICE

Low hysteresis piezo-electric pump

METHOD OF CLOSED-LOOP CONTROLLING A PIEZOELECTRIC VALVE DEVICE, CONTROLLER DEVICE AND FLUIDIC SYSTEM

Stability control augmentation system and method

System and method for attaching a poppet to an electromechanical actuator apparatus

FLOW RATE CONTROL DEVICE, AND FLOW RATE CONTROL METHOD

Fluid control system

Piezoelectric actuator, piezoelectric valve, and method of manufacturing piezoelectric actuator

Piezoelectric valve and method of manufacturing the piezoelectric valve

DRIVE SYSTEM

VALVE DEVICE, FLOW CONTROL METHOD, FLUID CONTROL DEVICE, SEMICONDUCTOR MANUFACTURING METHOD, AND SEMICONDUCTOR MANUFACTURING APPARATUS

Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus

Valve control device, drive control device, and fluid control device

Diaphragm valve and flow rate control device

Flow rate control method and flow rate control device

Piezoelectric driven valve, pressure-type flow rate control device, and vaporization supply device

Microfluidic device for controlling pneumatic microvalves

Actuator, valve device, and fluid control apparatus

Flow rate control method and flow rate control device

Flow rate control device and flow rate control method

Process control device

Fluid micro-injection device and execution system thereof

Fluid micro-injection device and flow channel assembly thereof

Piezo valve, fluid control device and piezo valve diagnosis method

Diaphragm valve and mass flow controller using the same

Metering valve

Preloaded piezo actuator and gas valve employing the actuator

Valve device

System and method for attaching a poppet to an electromechanical actuator apparatus

Valve device, its control device, control methods using the same, fluid control device and semiconductor manufacturing apparatus

Self-diagnosis method for flow rate control device

Process and device for ventilating a patient

Displacement magnifying mechanism, polishing device, actuator, dispenser, and air valve

Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus

ACTUATOR

Micro-valves for use in jetting assemblies

Systems and methods for sealing micro-valves for use in jetting assemblies

Print head having a temperature-control device

Fluid control device, method for controlling fluid control device, and fluid control system

Fluid system

Piezoelectric valve, method for driving piezoelectric valve, and optical particulate separator equipped with air-jet means using piezoelectric valve

Fuel injection device

Servovalve

Reciprocating piston machine comprising a length adjustable connecting rod and an inductively actuatable control valve

Fluid control device, recording medium recorded with control program, and control method

ELECTRONIC CIGARETTE

Blowing apparatus including piezoelectric valve and optical granular material sorting machine using the blowing apparatus

Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device

Reciprocating piston engine, in particular internal combustion engine

Device for pneumatically adjusting a seat in a means of transport

Phase-chopping control of piezoelectric actuators

Fluid control device having a piezoelectric actuator

WEED-CONTROL DEVICE

Flow path forming structure, flow rate measuring device and flow rate control device

Servovalve

Closure device

Valve

Valve system

Fluid control device

Fluid pulse device and method of exciting gas turbine engine turomachinery components

Piezo actuated high speed air valve used for blade and component excitation

Valve assembly with electronic control

Gas supply system, substrate processing system and gas supply method

Linear valve drive and valve

Method of setting a handover position and laboratory automation system

Piezoelectric adjustment apparatus

Servo valve with asymmetrical redundant piezoelectric actuator

MEMS valve actuator system and method

Piezoelectric element-driven valve and flow rate control device including piezoelectric element-driven valve

Method of inspecting gas supply system

Method and apparatus for gas flow control

Actuator control

Valve

PINCH VALVE

System Independent Refrigerant Control System

Multi-function valve

Piezoelectric linear actuator, piezoelectrically driven valve, and flow rate control device

Piezoelectrically-controlled fuel delivery system

Valve attachment structure and fluid apparatus to which valve is attached

Pressure-type flow control device and method for preventing overshooting at start of flow control performed by said device

Pressure-type flow controller

Flow meter and flow control device provided therewith

OPENING AND CLOSING DEVICE AND RESPIRATORY ASSISTANCE DEVICE

Pressure control valve and supercritical fluid chromatograph

Hydraulic servovalves

VALVE

Linear digital proportional piezoelectric valve

Flow control valve for flow controller

Piezoelectric Touch-Controlled Faucet

Metering valve and metering method

Bending frame for extending travel of an actuator for a mechanically actuated component

Supercritical fluid processing device

Valve position detection

Fluid valve

Acoustically actuated flow valve assembly including a plurality of reed valves

Reversible cavitary tension membrane

Proportional valve controlled with a piezoelectric linear actuator

Piezoelectric valve, and optical particulate matter sorter provided with air-blowing means that uses piezoelectric valve

Electrically actuated valve having two ways and three positions

Valve assembly for switching and/or regulating a medium flow of an aerospace engine and aerospace engine

Method and apparatus for gas flow control

Method and apparatus for gas flow control

Piezoelectric valve, and optical granulated substance sorter equipped with air-blowing means that uses this piezoelectric valve

Piezoelectric valve based on linear actuator

PIEZO-ACTUATED PILOT VALVE

Device for regulating the pressure and/or mass flow for a space propulsion system

Flow rate control valve and blood pressure information measurement device including the same

Electrically actuated valve with a sealing ball

PIEZOELECTRIC VALVE AND PUMP ACTUATOR

Optical granular material-sorting apparatus utilizing piezoelectric valve

PIEZOELECTRIC BLOWER PILOTED VALVE

Micro-electro-mechanical device with a piezoelectric actuator

Release device

Piezoelectric proportional control valve

Piezoelectric valve and optical granular material-sorting apparatus utilizing such piezoelectric valve

Valve

Drive mechanism for the movement of an object along an axis of motion and micro-valve

METHOD AND APPARATUS FOR GAS FLOW CONTROL

Piezoelectric element driven metal diaphragm control valve

Electrically actuated valve with a ball sealing element

Polymer actuator, and valve and shaft-sealing structure each using the same

Valve having valve element displaced by at least one of a movement of a diaphragm and a movement of an actuator, and fuel cell using the valve

Normally open type piezoelectric element driven metal diaphragm control valve

Directly actuated valve with a strain-type actuator and a method of operating same

Active material enabled pressure release valves and methods of use

Active material enabled pressure release valves and methods of use

Micro-electro-mechanical device with a piezoelectric actuator

LARGE STROKE PIEZO ACTUATOR

Remote Gas Line Shut Off Valve

Remote gas line shut-off valve

Piezoelectric pressure control valve

Fail-safe circuit for gas valves

Piezoelectric valve

Method and apparatus for monitoring and evaluating operation of a piezoelectric actuator

Gas bag module

Air valve, electronic blood pressure monitor, and air massager

Reactive load resonant drive circuit

Mems pilot valve

Valve having valve element displaced by at least one of a movement of a diaphragm and a movement of an actuator, and fuel cell using the valve

Piezoelectric actuator unit

Fluid control valve

Normally-closed flow rate control valve

MEMS valve actuator system