152663 ⎘
Subject matter not provided for in other groups of this subclass; Microvalves; Operating means specially adapted for microvalves using chemical activation actuated by a pyrotechnical charge
Pyrotechnic microsystem and method for fabricating a microsystem
#2Pyrotechnically actuated microvalve
#3Electrically opened micro fluid valve
#4Double-effect pyrotechnic microactuator for microsystem and microsystem using same