ClassID:

154538

F17C2270/0518 - CPC Classification

Classification description:

Applications for industrial use Semiconductors

Recent Application in this class:
#1
20260146715
2026-05-28

GAS CYLINDER AUTOMATION SYSTEM

#2
20250277564
2025-09-04

MATERIAL SUPPLY SYSTEM

#3
20250207734
2025-06-26

GAS CYLINDER REPLACEMENT SYSTEM

#4
20250144823
2025-05-08

TRANSFER ROBOT FOR TRANSFERRING GAS CONTAINER, GAS SUPPLY CABINET, AND GAS SUPPLY SYSTEM INCLUDING THE SAME

#5
20250144822
2025-05-08

TRANSFER ROBOT FOR TRANSFERRING GAS CONTAINER, GAS SUPPLY CABINET, AND GAS SUPPLY SYSTEM INCLUDING THE SAME

#6
20250144821
2025-05-08

TRANSFER ROBOT FOR TRANSFERRING GAS CONTAINER, GAS SUPPLY CABINET, AND GAS SUPPLY SYSTEM INCLUDING THE SAME

#7
20250144820
2025-05-08

TRANSFER ROBOT FOR TRANSFERRING GAS CONTAINER, GAS SUPPLY CABINET, AND GAS SUPPLY SYSTEM INCLUDING THE SAME

#8
20240191842
2024-06-13

Gas filling docking tray and gas filling device

#9
20240183498
2024-06-06

PROCESSING APPARATUS AND GAS SUPPLY METHOD

#10
20240068619
2024-02-29

Constant headspace ampoule

#11
20240011605
2024-01-11

CYLINDRICAL SUB-ATMOSPHERIC PRESSURE REGULATING DEVICE FOR INSERTION INTO A GAS CYLINDER

#12
20230408034
2023-12-21

SUPPLY CONTROL SYSTEM FOR A PLURALITY OF TANKS

#13
20230313951
2023-10-05

Method and system for optimized gas delivery with automated redundant pressure regulation safety feature

#14
20230235856
2023-07-27

Systems and methods for storing molecular diborane

#15
20230129083
2023-04-27

Gas cylinder automation system

#16
20230071679
2023-03-09

Depressurization system, apparatus and method for high pressure gas delivery

#17
20220290814
2022-09-15

Processing apparatus and gas supply method

#18
20220290812
2022-09-15

GAS STORAGE AND DISPENSING CONTAINER AND A METHOD OF DISPENSING THEREFROM

#19
20220274780
2022-09-01

Transfer robot for transferring gas container, gas supply cabinet, and gas supply system including the same

#20
20220260212
2022-08-18

ACETYLENE FLUID SUPPLY PACKAGE, SYSTEM COMPRISING THE SAME AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME

#21
20220251703
2022-08-11

GAS SUPPLY APPARATUS AND GAS SUPPLY METHOD

#22
20220194804
2022-06-23

GAS STORAGE SYSTEMS AND METHOD THEREOF

#23
20220146051
2022-05-12

Precursor supply cabinet

#24
20220112986
2022-04-14

Storage and delivery veseel for storing GeH4, using a zeolitic adsorbent

#25
20210341103
2021-11-04

Method and supply equipment for supplying fluorine gas-containing gas

#26
20210222834
2021-07-22

System for automatically replacing high-pressure gas tank and method thereof

#27
20210190269
2021-06-24

Method for automatically replacing high-pressure gas barrels

#28
20210190268
2021-06-24

Automatic alignment method of high-pressure gas container

#29
20210080061
2021-03-18

High-pressure gas cylinder gasket automatic replacement device

#30
20210048148
2021-02-18

PROCESS AND APPARATUS FOR DISPENSING AND CHARGING GAS TO A STORAGE VESSEL

#31
20210041068
2021-02-11

Vacuum supply gas cylinder

#32
20200292131
2020-09-17

FLUID SUPPLY APPARATUS

#33
20200278084
2020-09-03

GAS SUPPLY METHOD AND GAS SUPPLY SYSTEM

#34
20200208783
2020-07-02

Gas supply system

#35
20200011482
2020-01-09

Smart package

#36
20190330749
2019-10-31

METHOD FOR MANUFACTURING GAS-FILLED CONTAINER, AND METHOD FOR STORING FLUORINATED HYDROCARBON COMPOUND

#37
20190301616
2019-10-03

Cryogenic ferrofluid sealed rotary union

#38
20190292660
2019-09-26

Gas supply apparatus and gas supply method

#39
20190277452
2019-09-12

Gas supply vessel

#40
20190170302
2019-06-06

Smart package

#41
20190137040
2019-05-09

SYSTEM AND METHOD FOR LIQUID NITROGEN RECYCLING

#42
20190113176
2019-04-18

Material, storage container using the material, valve attached to the storage container, method of storing ClF and method of using ClF storage container

#43
20190078696
2019-03-14

FLUID SUPPLY PACKAGE

#44
20190040968
2019-02-07

Valve with interchangeable outlet connections for high purity gases

#45
20180356041
2018-12-13

THERMOCHROMIC INDICATOR FOR REAGENT GAS VESSEL

#46
20180320825
2018-11-08

Pivotable touchscreen for a gas-distribution facility

#47
20180245221
2018-08-30

GAS-FILLED CONTAINER FILLED WITH FLUORINATED HYDROCARBON COMPOUND, METHOD FOR MANUFACTURING GAS-FILLED CONTAINER, AND METHOD FOR STORING FLUORINATED HYDROCARBON COMPOUND

#48
20180237285
2018-08-23

Liquid dispensing systems with gas removal and sensing capabilities

#49
20180224068
2018-08-09

FACILITY FOR DISTRIBUTING WORKING GAS

#50
20180224067
2018-08-09

REMOTE CONTROL OF A GAS-DISTRIBUTION FACILITY

#51
20180221851
2018-08-09

Microporous carbon monoliths from natural carbohydrates

#52
20180180225
2018-06-28

ANTI-SPIKE PRESSURE MANAGEMENT OF PRESSURE-REGULATED FLUID STORAGE AND DELIVERY VESSELS

#53
20180163875
2018-06-14

Modified Vacuum Actuated Valve Assembly and Sealing Mechanism for Improved Flow Stability for Fluids Sub-Atmospherically Dispensed from Storage and Delivery Systems

#54
20180149315
2018-05-31

GAS CABINETS

#55
20180023765
2018-01-25

Smart package

#56
20180017256
2018-01-18

Liquid gas system

#57
20180015589
2018-01-18

GAS-FILLED VESSEL FILLED WITH FLUORINATED HYDROCARBON COMPOUND

#58
20170248275
2017-08-31

PRESSURE-REGULATED GAS SUPPLY VESSEL

#59
20170122496
2017-05-04

ADSORBENT-BASED PRESSURE STABILIZATION OF PRESSURE-REGULATED FLUID STORAGE AND DISPENSING VESSELS

#60
20170032967
2017-02-02

STORAGE AND SUB-ATMOSPHERIC DELIVERY OF DOPANT COMPOSITIONS FOR CARBON ION IMPLANTATION

#61
20160348843
2016-12-01

Inactive gas introducing facility and inactive gas introducing method

#62
20160307785
2016-10-20

Gas injection device and assisting member

#63
20160305682
2016-10-20

VENTILATION GAS MANAGEMENT SYSTEMS AND PROCESSES

#64
20160258537
2016-09-08

Modified vacuum actuated valve assembly and sealing mechanism for improved flow stability for fluids sub-atmospherically dispensed from storage and delivery systems

#65
20160201850
2016-07-14

GAS CYLINDER FOR THE STORAGE AND DELIVERY OF P-TYPE DOPANT GASES

#66
20160097121
2016-04-07

Methods of vapor deposition with multiple vapor sources

#67
20160085246
2016-03-24

Preparation of high pressure BF/Hmixtures

#68
20160084444
2016-03-24

Vessels with personnel access provisions

#69
20150306537
2015-10-29

Rectangular parallelepiped fluid storage and dispensing vessel

#70
20150247605
2015-09-03

Anti-spike pressure management of pressure-regulated fluid storage and delivery vessels

#71
20150027909
2015-01-29

Gas storage and dispensing system with monolithic carbon adsorbent

#72
20150000785
2015-01-01

Inactive gas supply facility and inactive gas supply method

#73
20150000759
2015-01-01

Storage facility and storage method

#74
20140366983
2014-12-18

Inactive gas introducing facility and inactive gas introducing method

#75
20140356796
2014-12-04

Heating vaporization system and heating vaporization method

#76
20140263357
2014-09-18

Passive compressed gas storage container temperature stabilizer

#77
20140179090
2014-06-26

Storage and sub-atmospheric delivery of dopant compositions for carbon ion implantation

#78
20130340858
2013-12-26

Gas hood for gas regulator

#79
20130337737
2013-12-19

COMPRESSED GAS CYLINDER CABINET WITH REGULATED EXHAUST CONTROL

#80
20130334231
2013-12-19

Cylinder preparation for maintaining stability of stored materials

#81
20130330917
2013-12-12

Apparatus and process for integrated gas blending

#82
20130204282
2013-08-08

Method for extracting tubular structures

#83
20130203267
2013-08-08

Multiple vapor sources for vapor deposition

#84
20130180609
2013-07-18

Hydrogen fluoride supply unit

#85
20130032600
2013-02-07

Valve For Container Filled With Halogen Gas Or Halogen Compound Gas

#86
20130025715
2013-01-31

Gas supply system

#87
20130015594
2013-01-17

Splashguard for high flow vacuum bubbler vessel

#88
20120325850
2012-12-27

Gas storage and dispensing system with monolithic carbon adsorbent

#89
20120315837
2012-12-13

Ventilation gas management systems and processes

#90
20120291627
2012-11-22

LIQUID DISPENSING SYSTEMS WITH GAS REMOVAL AND SENSING CAPABILITIES

#91
20120241088
2012-09-27

CYLINDER CABINET AND SEMICONDUCTOR MANUFACTURING SYSTEM

#92
20110303558
2011-12-15

Gas storage and dispensing system with monolithic carbon adsorbent

#93
20110277846
2011-11-17

Rectangular parallelepiped fluid storage and dispensing vessel

#94
20110226874
2011-09-22

Fluid storage and dispensing systems, and fluid supply processes comprising same

#95
20110225986
2011-09-22

SYSTEMS AND METHODS FOR GAS SUPPLY AND USAGE

#96
20110124958
2011-05-26

DEVICE AND METHOD FOR EXTRACTING TUBULAR STRUCTURES

#97
20110114667
2011-05-19

System for heating pressurized liquefied gas stores

#98
20110023501
2011-02-03

METHODS AND SYSTEMS FOR BULK ULTRA-HIGH PURITY HELIUM SUPPLY AND USAGE

#99
20110017614
2011-01-27

Stabilisation of stored gas

#100
20100326537
2010-12-30

LOW VAPOR PRESSURE HIGH PURITY GAS DELIVERY SYSTEM

#101
20100258208
2010-10-14

Miniature gas cabinet

#102
20100243681
2010-09-30

PRESSURIZED-FLUID CONTROL MECHANISM AND PRESSURIZED-FLUID SUPPLY DEVICE

#103
20100228399
2010-09-09

PRESSURE REGULATOR ASSEMBLY AND SYSTEM FOR THE CONTROLLED STORAGE AND DISPENSING OF A FLUID

#104
20100224264
2010-09-09

APPARATUS AND PROCESS FOR INTEGRATED GAS BLENDING

#105
20100213083
2010-08-26

Fluid storage and dispensing systems, and fluid supply processes comprising same

#106
20100193529
2010-08-05

GAS BOTTLE, PROTECTIVE ELEMENT FOR USE ON SUCH GAS BOTTLE, AND FILTER INTENDED TO USE WITH SUCH GAS BOTTLE

#107
20100180955
2010-07-22

GAS DELIVERY SYSTEM WITH INTEGRATED VALVE MANIFOLD FUNCTIONALITY FOR SUB-ATMOSPHERIC AND SUPER-ATMOSPHERIC PRESSURE APPLICATIONS

#108
20100170268
2010-07-08

Energy delivery system for a gas transport vessel containing low vapor pressure gas

#109
20100089321
2010-04-15

GENERATION AND DISTRIBUTION OF A FLUORINE GAS

#110
20100064969
2010-03-18

Semiconductor manufacturing plant

#111
20100059694
2010-03-11

Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases

#112
20100018249
2010-01-28

Method and apparatus for simultaneous gas supply from bulk specialty gas supply systems

#113
20100015038
2010-01-21

Hydrogen supply equipment

#114
20090321416
2009-12-31

ENHANCED ENERGY DELIVERY MECHANISM FOR BULK SPECIALTY GAS SUPPLY SYSTEMS

#115
20090314009
2009-12-24

Vacuum actuated valve for high capacity storage and delivery systems

#116
20090188392
2009-07-30

Gas storage and dispensing system with monolithic carbon adsorbent

#117
20090173225
2009-07-09

Rectangular parallelepiped fluid storage and dispensing vessel

#118
20090170332
2009-07-02

Processing gas supplying system and processing gas supplying method

#119
20090145494
2009-06-11

Integrated valve regulator assembly and system for the controlled storage and dispensing of a hazardous material

#120
20090134172
2009-05-28

Vessels with personnel access provisions

#121
20090014089
2009-01-15

Valve, Valve Controller, and Fuel Cell System

#122
20090001524
2009-01-01

GENERATION AND DISTRIBUTION OF A FLUORINE GAS

#123
20080289712
2008-11-27

Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applications

#124
20080264072
2008-10-30

LIQUEFIED GAS SUPPLY DEVICE AND METHOD

#125
20080245895
2008-10-09

Gas Ejection Device and Spraying Device

#126
20080135104
2008-06-12

Fail-safe vacuum actuated valve for high pressure delivery systems

#127
20080078447
2008-04-03

Low vapor pressure high purity gas delivery system

#128
20080012458
2008-01-17

Gas cabinet

#129
20080000532
2008-01-03

Low release rate cylinder package

#130
20080000239
2008-01-03

Energy delivery system for a gas transport vessel containing low vapor pressure gas

#131
20070298186
2007-12-27

METHOD AND APPARATUS FOR PLATING THREADED PORTION OF HIGH PRESSURE GAS CYLINDER

#132
20070294874
2007-12-27

METHOD OF FABRICATING HIGH-PRESSURE GAS CYLINDER

#133
20070204631
2007-09-06

Liquefied Chemical Gas Delivery System

#134
20070175905
2007-08-02

GAS STORAGE CONTAINER LININGS FORMED WITH CHEMICAL VAPOR DEPOSITION

#135
20070163273
2007-07-19

Liquid Purge for a Vaporizer

#136
20070101864
2007-05-10

Valve outlet cap for toxic-gas container

#137
20070018018
2007-01-25

Apparatus and method for feeding high-purity ammonia gas

#138
20070017596
2007-01-25

System for purging high purity interfaces

#139
20070007879
2007-01-11

Low vapor pressure gas delivery system and apparatus

#140
20070006941
2007-01-11

Method for purging a high purity manifold

#141
20070003898
2007-01-04

Ton unit heating saddle

#142
20060266413
2006-11-30

Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applications

#143
20060254645
2006-11-16

Enhanced purge effect in gas conduit

#144
20060221877
2006-10-05

Apparatus and method for inspecting containers

#145
20060174944
2006-08-10

Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases

#146
20060130896
2006-06-22

High reliability gas mixture back-up system

#147
20060112738
2006-06-01

Divided pressure vessel apparatus for carbon dioxide based systems and methods of using same

#148
20060054018
2006-03-16

Rectangular parallelepiped fluid storage and dispending vessel

#149
20060032550
2006-02-16

Auto-switching system for switch-over of gas storage and dispensing vessels in a multi-vessel array

#150
20060011064
2006-01-19

Gas storage and dispensing system with monolithic carbon adsorbent

#151
20060000358
2006-01-05

Purification and delivery of high-pressure fluids in processing applications

#152
20050276733
2005-12-15

Liquid media containing Lewis acidic reactive compounds for storage and delivery of Lewis basic gases

#153
20050268938
2005-12-08

Method and system for supplying carbon dioxide to a semiconductor tool having variable flow requirement

#154
20050247341
2005-11-10

System for supplying halogen gas or halogen containing gas and method thereof

#155
20050229970
2005-10-20

Cabinet for chemical delivery with solvent purging and removal

#156
20050224116
2005-10-13

Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases

#157
20050188846
2005-09-01

Gas storage and dispensing system with monolithic carbon adsorbent

#158
20050155377
2005-07-21

High-pressure delivery system for ultra high purity liquid carbon dioxide

#159
20050132720
2005-06-23

System for heating tanks of liquefied gas by induction

#160
20050109399
2005-05-26

Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applications

#161
20050086964
2005-04-28

Automatic LN2 distribution system for high-purity germanium multi-detector facilities

#162
20050056338
2005-03-17

Assembly and method for containing, receiving and storing fluids and for dispensing gas from a fluid control and gas delivery assembly having an integrated fluid flow restrictor

#163
20050051234
2005-03-10

Purgeable container for low vapor pressure chemicals

#164
20050051233
2005-03-10

Auto-switching system for switch-over of gas storage and dispensing vessels in a multi-vessel array

#165
20050039815
2005-02-24

Gas supply apparatus and gas supply method

#166
20050016186
2005-01-27

Gas charging system for fill of gas storage and dispensing vessels