161237 ⎘
Furnaces of a kind not covered by any preceding group; Chamber type furnaces the floor of the furnaces consisting of the support carrying the charge, e.g. car type furnaces
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
#2Wafer boat handling device, vertical batch furnace and method
#3Sintering furnance
#4Substrate treatment apparatus
#5Mobile removable hearth for furnace and transporter
#6Industrial heat treating furnace that uses a protective gas
#7Method of determining an amount of impurities that a contaminating material contributes to high purity silicon
#8HEAT TREATMENT DEVICE AND HEAT TREATMENT METHOD
#9Method Of Determining An Amount of Impurities That A Contaminating Material Contributes To High Purity Silicon And Furnace For Treating High Purity Silicon
#10Gas cooling type vacuum heat treating furnace and cooling gas direction switching device therefor