F27D2009/0056 - CPC Classification Index

ClassID:

161514 ⎘

F27D2009/0056 - CPC Classification

Classification description:

Cooling of furnaces or of charges therein; Cooling of furnaces Use of high thermoconductive elements

Sub-classes:

F27D2009/0059 » {made mostly from graphite} 0
F27D2009/0062 » {made from copper or copper alloy} 19

Recent Application in this class:

20230194175

CHILLING UNIT, HEAT TREATMENT APPARATUS INCLUDING SAME, AND HEAT TREATMENT METHOD

20150115511

COOLING ELEMENT AND METHOD FOR MANUFACTURING A COOLING ELEMENT

20130012035

Substrate processing apparatus and method of manufacturing semiconductor device