161474 ⎘
Supports, screens, or the like for the charge within the furnace Supports specially adapted for semi-conductors
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD FOR HEATING SUBSTRATE BY LIGHT IRRADIATION
#2HEATER LIFT ASSEMBLY SPRING DAMPER
#3Workpiece Support For A Thermal Processing System
#4DYNAMIC AND LOCALIZED TEMPERATURE CONTROL FOR EPITAXIAL DEPOSITION REACTORS
#5THERMAL PROCESSING SYSTEM FOR PROCESSING WORKPIECES
#6SPOT HEATING BY MOVING A BEAM WITH HORIZONTAL ROTARY MOTION
#7FLANGE AND APPARATUS FOR PROCESSING SUBSTRATES
#8METHOD AND APPARATUS FOR THE THERMAL POST-TREATMENT OF AT LEAST ONE SIC VOLUME MONOCRYSTAL
#9HEATER LIFT ASSEMBLY SPRING DAMPER
#10HEATER ASSEMBLY WITH PROCESS GAP CONTROL FOR BATCH PROCESSING CHAMBERS
#11SUBSTRATE SUPPORTS AND TRANSFER APPARATUS FOR SUBSTRATE DEFORMATION
#12SEMICONDUCTOR PROCESSING CHAMBER WITH FILAMENT LAMPS HAVING NONUNIFORM HEAT OUTPUT
#13SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND STORAGE MEDIUM
#14Substrate processing apparatus for processing substrates
#15CHAMBER FOR DEGASSING SUBSTRATES
#16Spot heating by moving a beam with horizontal rotary motion
#17DYNAMIC AND LOCALIZED TEMPERATURE CONTROL FOR EPITAXIAL DEPOSITION REACTORS
#18SUBSTRATE PROCESSING APPARATUS
#19WAFER BAKING APPARATUS
#20SUBSTRATE SUPPORT
#21Diffusion furnace
#22Heater lift assembly spring damper
#23SUBSTRATE PROCESSING APPARATUS
#24LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
#25Workpiece Support For A Thermal Processing System
#26Semiconductor substrate manufacturing device applicable to large-diameter semiconductor substrate
#27Substrate treating apparatus and substrate treating method
#28Heat Insulation Structure, Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Substrate Processing Method
#29SUBSTRATE TREATING EQUIPMENT
#30Heater assembly with process gap control for batch processing chambers
#31Baking equipment for use in display panel manufacturing process
#32Spot heating by moving a beam with horizontal rotary motion
#33Substrate treating apparatus and substrate treating method
#34Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
#35THERMAL PROCESSING APPARATUS
#36Flange and apparatus for processing substrates
#37Temperature-controllable process chambers, electronic device processing systems, and manufacturing methods
#38Press sintering process product carrier, press sintering apparatus and press sintering process
#39Heater lift assembly spring damper
#40Substrate processing apparatus for processing substrates
#41Substrate processing apparatus and method
#42FAST RESPONSE DUAL-ZONE PEDESTAL ASSEMBLY FOR SELECTIVE PRECLEAN
#43Semiconductor processing chamber with filament lamps having nonuniform heat output
#44Light irradiation type thermal process apparatus using a gas ring
#45SUPPORTING UNIT, APPARATUS HAVING THE SAME AND METHOD FOR TREATING SUBSTRATE USING THE SAME
#46Apparatus and method for treating substrate
#47Substrate processing apparatus, substrate processing method, and storage medium
#48SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE HOLDER
#49Heater and heater system
#50Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device
#51MULTI-ZONE SILICON NITRIDE WAFER HEATER ASSEMBLY HAVING CORROSION PROTECTIVE LAYER, AND METHODS OF MAKING AND USING THE SAME
#52Correction data creating method, substrate processing method, and substrate processing system
#53Substrate heat treatment apparatus
#54Temperature-controllable process chambers, electronic device processing systems, and manufacturing methods
#55Combination vacuum and over-pressure process chamber and methods related thereto
#56Processing apparatus
#57Substrate processing apparatus for processing substrates
#58Substrate processing apparatus and method
#59Wafer holder with tapered region
#60Chamber for degassing substrates
#61METHOD AND DEVICE FOR THE THERMAL TREATMENT OF SUBSTRATES AND HOLDING UNIT FOR SUBSTRATES
#62Combination vacuum and over-pressure process chamber and methods related thereto
#63Semiconductor wafer support ring for heat treatment
#64System and method for heat treatment of substrates
#65QUARTZ BOAT TRANSMISSION MECHANISM USED IN DIFFUSION FURNACE
#66Thermal treatment system with collector device
#67Heating device and heating chamber
#68SEMICONDUCTOR ANNEALING APPARATUS
#69Semiconductor wafer support ring for heat treatment
#70Ambient laminar gas flow distribution in laser processing systems
#71Heat treatment apparatus emitting flash of light
#72Rapid thermal processing chamber with linear control lamps
#73Magnetic annealing apparatus
#74Magnetic annealing apparatus and magnetic annealing method
#75Wafer holder with tapered region
#76Semiconductor device manufacturing apparatus
#77SUBSTRATE HEATING DEVICE AND METHOD
#78Method and system for forming absorber layer on metal coated glass for photovoltaic devices
#79Support device for a plurality of wafers for a vertical oven
#80Substrate support with surface feature for reduced reflection and manufacturing techniques for producing same
#81Apparatus for liquid treatment of disc-shaped articles and heating system for use in such apparatus
#82Absorbing lamphead face
#83Edge ring for a thermal processing chamber
#84Edge ring for a thermal processing chamber
#85Method and system for forming absorber layer on metal coated glass for photovoltaic devices
#86Heat treatment apparatus emitting flash of light
#87Heating/cooling pedestal for semiconductor-processing apparatus
#88Method and apparatus for liquid treatment of wafer shaped articles
#89HEAT TREATMENT APPARATUS
#90Wafer holder with tapered region
#91Wafer holder with varying surface property
#92Susceptor heater shim
#93Heat treatment apparatus for heating substrate by irradiation with flashes of light, and heat treatment method
#94Method for processing solar cell substrates
#95Edge ring for a thermal processing chamber
#96Rapid thermal processing lamphead with improved cooling
#97Heat treatment method and heat treatment apparatus for heating substrate by irradiating substrate with light
#98Diffusion furnaces employing ultra low mass transport systems and methods of wafer rapid diffusion processing
#99HEAT TREATMENT APPARATUS AND METHOD FOR HEATING SUBSTRATE BY IRRADIATION THEREOF WITH LIGHT
#100Ambient laminar gas flow distribution in laser processing systems
#101Wafer boat assembly, loading apparatus comprising such a wafer boat assembly and method for loading a vertical furnace
#102Edge ring for a thermal processing chamber
#103Heat treatment apparatus emitting flash of light
#104Heat treatment apparatus emitting flash of light
#105Heat treatment apparatus emitting flash of light
#106Diffusion furnaces employing ultra low mass transport systems and methods of wafer rapid diffusion processing
#107Method for processing solar cell substrates
#108Substrate support having dynamic temperature control
#109Device and Method for Inert Gas Cure for Leadframe or Substrate Strips
#110Adjusting mechanism and adjusting method thereof
#111Method of object transfer for a heat treatment system
#112HIGH STRENGTH CAMFER ON QUARTZWARE
#113Diffusion furnaces employing ultra low mass transport systems and methods of wafer rapid diffusion processing
#114Substrate heating apparatus and method and coating and developing system
#115SUPPORT FOR A SEMICONDUCTOR WAFER IN A HIGH TEMPERATURE ENVIRONMENT
#116Temperature controlled substrate holder with non-uniform insulation layer for a substrate processing system
#117Rapid thermal processing lamphead with improved cooling
#118Method and heat treatment apparatus for uniformly heating a substrate during a bake process
#119Heat treatment jig and heat treatment method for silicon wafer
#120Workpiece support with fluid zones for temperature control
#121Heat treatment apparatus and method for heating substrate by irradiation thereof with light
#122Indexing method and apparatus for an electroheating technology oven
#123Heat treatment apparatus emitting flash of light
#124Systems and methods for supporting a workpiece during heat-treating
#125Temperature controlled substrate holder with non-uniform insulation layer for a substrate processing system
#126Heat treatment jig and heat treatment jig set
#127Jig for electronic part firing
#128Heat treatment jig for semiconductor silicon substrates and method for manufacturing the same
#129Heat treatment system and method therefore
#130Heating device and heating method
#131VERTICAL BOAT AND VERTICAL HEAT PROCESSING APPARATUS FOR SEMICONDUCTOR PROCESS
#132Adjusting mechanism and adjusting method thereof
#133Substrate heat treatment apparatus
#134Device and method for the reduction of particles in the thermal treatment of rotating substrates
#135Heat treatment jig for semiconductor silicon substrate
#136Low contact SiC boat for silicon nitride stress reduction
#137Heat treatment equipment and method of driving the same
#138Substrate heating apparatus and method and coating and developing system
#139Heat treatment jig and heat treatment method for silicon wafer
#140Heat treatment apparatus
#141Thermal processing apparatus and thermal processing method
#142Methods and systems for rapid thermal processing
#143Bake system
#144Heat treatment jig for silicon semiconductor substrate
#145Thermal processing apparatus and thermal processing method
#146Heat treatment jig for semiconductor silicon substrate
#147Thermal processing apparatus and thermal processing method
#148Method of forming a piezoelectric layer in forming a piezoelectric element including a lower electrode on one surface of a substrate
#149Shadow-free shutter arrangement and method
#150Thermal processing apparatus, thermal processing method, and substrate processing apparatus
#151Heat treatment system and a method for cooling a loading chamber
#152Heat treatment apparatus of light-emission type and method of cleaning same
#153Systems for supporting ceramic susceptors
#154Method and system for doping semiconductor materials