ClassID:

164278

G01B11/0666 - CPC Classification

Classification description:

Measuring arrangements characterised by the use of optical means for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using an exciting beam and a detection beam including surface acoustic waves [SAW]

Recent Application in this class:
#1
20250389665
2025-12-25

HYBRID METROLOGY METHOD AND SYSTEM

#2
20250353082
2025-11-20

Additive Manufacturing with Photo-Acoustic Tomography Defect Testing

#3
20250123210
2025-04-17

RAMAN SPECTROSCOPY BASED MEASUREMENTS IN PATTERNED STRUCTURES

#4
20250003882
2025-01-02

HYBRID METROLOGY METHOD AND SYSTEM

#5
20240151515
2024-05-09

NON-DESTRUCTIVE ESTIMATION OF COATING LAYER THICKNESS BASED ON SWEEP FREQUENCY PHOTO ACOUSTIC GUIDED WAVE TECHNIQUE

#6
20220406667
2022-12-22

Plasma processing apparatus and plasma processing method

#7
20220326159
2022-10-13

Raman spectroscopy based measurements in patterned structures

#8
20220120690
2022-04-21

Hybrid metrology method and system

#9
20210379670
2021-12-09

Additive Manufacturing With Photo-Acoustic Tomography Defect Testing

#10
20210003508
2021-01-07

Hybrid metrology method and system

#11
20200256799
2020-08-13

Raman spectroscopy based measurements in patterned structures

#12
20200208964
2020-07-02

Methods for nondestructive measurements of thickness of underlying layers

#13
20190234872
2019-08-01

Inspection apparatus, inspection method, computer program and recording medium

#14
20190186898
2019-06-20

Method for real-time inspection of structural components

#15
20180372645
2018-12-27

Hybrid metrology method and system

#16
20180372644
2018-12-27

Raman spectroscopy based measurements in patterned structures

#17
20180113079
2018-04-26

METHOD AND DEVICE FOR MEASURING A LONG PROFILE

#18
20160054122
2016-02-25

Method for determining the layer thickness of a connecting layer between two packaging layers

#19
20150159997
2015-06-11

Wavelength-selectable coating thickness measurement apparatus

#20
20150009506
2015-01-08

Interferometric material sensing apparatus including adjustable coupling and associated methods

#21
20140128746
2014-05-08

Interferometric biometric sensing apparatus including adjustable coupling and associated methods

#22
20140098372
2014-04-10

Interferometric sensing apparatus including adjustable coupling and associated methods

#23
20120281229
2012-11-08

Interferometric material sensing apparatus including adjustable coupling and associated methods

#24
20120281228
2012-11-08

Interferometric biometric sensing apparatus including adjustable coupling and associated methods

#25
20120281227
2012-11-08

Interferometric sensing apparatus including adjustable coupling and associated methods

#26
20110138920
2011-06-16

Contact-free pipe wall thickness measurement device and pipe wall thickness measurement

#27
20110133102
2011-06-09

Method and arrangement for detecting a surface of an object

#28
20100332203
2010-12-30

Optical method and system for the characterization of laterally-patterned samples in integrated circuits

#29
20100195092
2010-08-05

NONCONTACT FILM THICKNESS MEASUREMENT METHOD AND DEVICE

#30
20090213375
2009-08-27

Optical method for the characterization of laterally-patterned samples in integrated circuits

#31
20090201502
2009-08-13

Metrology system with spectroscopic ellipsometer and photoacoustic measurements

#32
20080151219
2008-06-26

Optical method for the characterization of laterally patterned samples in integrated circuits

#33
20070273952
2007-11-29

Characterization of micro- and nano scale materials by acoustic wave generation with a CW modulated laser

#34
20070268478
2007-11-22

Metrology system with spectroscopic ellipsometer and photoacoustic measurements

#35
20070109540
2007-05-17

Method for measuring thin films

#36
20070024871
2007-02-01

Method and apparatus for measuring thickness of thin films via transient thermoreflectance

#37
20060203876
2006-09-14

Method of determining properties of patterned thin film metal structures using transient thermal response

#38
20060144147
2006-07-06

Device and method for measuring thickness

#39
20060126057
2006-06-15

Metrology system with spectroscopic ellipsometer and photoacoustic measurements

#40
20060052979
2006-03-09

Method and apparatus for measuring thickness of metal layer