164412 ⎘
Aspects of interferometers not specifically covered by any group under Cat eye, i.e. reflection always parallel to incoming beam
Line-field OCT System with Multi Transverse Mode Laser
#2Relative intensity noise Cat's-eye swept source laser for OCT and spectroscopy
#3Interferometric position sensor
#4Spatial accuracy correction method and apparatus
#5Gradiometer and method of changing an optical path length to directly obtain a value of a gradient of gravity
#6Interferometric heterodyne optical encoder system
#7Method and arrangement for robust interferometry for detecting a feature of an object
#8Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device
#9APPARATUS AND METHOD OF MEASURING SHAPE
#10Interferometric heterodyne optical encoder system
#11Optical system, in particular in a microlithographic projection exposure apparatus
#12Interferometer and distance calculation method therefor
#13Optical distance-measuring device
#14Rotary Interferometer
#15Interferometer
#16Laser interferometer system for measuring roll angle
#17Interferometer system for monitoring an object
#18Displacement measuring instrument and displacement measuring method
#19Optical member, interferometer system, stage apparatus, exposure apparatus, and device manufacturing method
#20Method for estimating distance between tracking type laser interferometer and target, and tracking type laser interferometer
#21Interferometric Gravity Sensor
#22Systems and Methods for Reducing Nonlinearity in an Interferometer
#23Homodyne laser interferometer probe and displacement measurement system using the same
#24Tracking type laser interferometer and method for resetting the same
#25Displacement measurement sensor head and system having measurement sub-beams comprising zeroth order and first order diffraction components
#26Measurement method and measurement apparatus using tracking type laser interferometer
#27Optical coherence tomography implementation apparatus and method of use
#28Interferometer system for monitoring an object
#29Method and assembly for confocal, chromatic, interferometric and spectroscopic scanning of optical, multi-layer data memories
#30Method of manufacturing an optical element
#31Multi-axis interferometers and methods and systems using multi-axis interferometers
#32Measuring apparatus sensitive to rotational but not translational or vibrational movement
#33Optical-axis deflection type laser interferometer, calibration method thereof, correcting method thereof, and measuring method thereof
#34Interferometer system for monitoring an object
#35Optical interferometer
#36Interferometer using integrated retarders to reduce physical volume
#37Rotation and translation measurement
#38Phase-compensated cube corner in laser interferometry
#39Position-measuring device for determining the position of two objects movable with respect to each other along a measuring direction, and method for forming a reference pulse for such a position-measuring device
#40Interferometry systems and methods of using interferometry systems
#41Position detection apparatus and method
#42Polarizing beam splitter device, interferometer module, lithographic apparatus, and device manufacturing method
#43Heterodyne laser interferometer with porro prisms for measuring stage displacement
#44Coating for reflective optical components
#45Systems using polarization-manipulating retroreflectors
#46Interferometry systems and methods of using interferometry systems
#47Interferometry systems and methods of using interferometry systems
#48MEASUREMENT SYSTEM FOR DETERMINING THE THICKNESS OF A LAYER DURING A PLATING PROCESS
#49Multi-axis interferometers and methods and systems using multi-axis interferometers
#50Phase-compensated cube corner in laser interferometry
#51System for rotation measurement with laser interferometry
#52Position measuring device