164419 ⎘
Aspects of interferometers not specifically covered by any group under Pupil plane manipulation, e.g. filtering light of certain reflection angles
SINGLE FRAME-TILTED WAVE INTERFEROMETER
#2Method for compensation during the process of wavefront reconstruction in grating-based lateral shearing interferometry
#3System and method for a displacement measurement
#4Measuring device for interferometric determination of a shape of an optical surface
#5Interferometer using tilted object waves and comprising a Fizeau interferometer objective
#6Scanning white-light interferometry system for characterization of patterned semiconductor features
#7System and method for a displacement measurement
#8Edge registration for interferometry
#9True-spectroscopic dual mode high resolution full-field optical coherence tomography using liquid crystal devices
#10Portable interferometric device
#11Measuring apparatus including multi-wavelength interferometer
#12Multi-wavelength interferometer, measurement apparatus, and measurement method
#13Optical coherence microscopy system having a filter for suppressing a specular light contribution
#14Interferometer and method for measuring characteristics of optically unresolved surface features
#15Generating model signals for interferometry
#16Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
#17Interferometer and method for measuring characteristics of optically unresolved surface features
#18Scanning interferometry for thin film thickness and surface measurements
#19Profiling complex surface structures using scanning interferometry
#20Multiple-angle multiple-wavelength interferometer using high-NA imaging and spectral analysis
#21Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
#22High-sensitivity surface detection system and method
#23Profiling complex surface structures using height scanning interferometry
#24Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
#25Interferometer and method for measuring characteristics of optically unresolved surface features
#26Simultaneous phase-shifting fizeau interferometer
#27Scanning interferometry for thin film thickness and surface measurements
#28Profiling complex surface structures using scanning interferometry
#29Simultaneous phase-shifting Fizeau interferometer