164177 ⎘
Instruments as specified in the subgroups and characterised by the use of optical measuring means; Interferometers characterised by the beam path configuration contacting two or more objects
Low-Bulk Interferometric Sensor
#2NON-CONTACT OPTICAL METROLOGY SYSTEM TO MEASURE SIMULTANEOUSLY THE RELATIVE PISTON AND THE RELATIVE INCLINATION IN TWO AXES (TIP AND TILT) BETWEEN TWO REFLECTIVE SURFACES
#3MEASURING PARALLELISM
#4Optical measurement system
#5MEASUREMENT METHOD AND MEASUREMENT APPARATUS FOR MEASURING THICKNESS OF SEMICONDUCTOR WAFER
#6Optical systems with controlled mirror arrangements
#7APPARATUS FOR COLLIMATING ATOMIC BEAM, ATOMIC INTERFEROMETER, AND ATOMIC GYROSCOPE
#8Method of collimating atomic beam, apparatus for collimating atomic beam, atomic interferometer, and atomic gyroscope
#9Measurement system based on optical interference and measuring method using same
#10Interferometric waviness detection systems
#11Interferometer measurement device and control method therefor
#12Method for defect inspection of transparent substrate by integrating interference and wavefront recording to reconstruct defect complex images information
#13Method of inspecting a substrate, metrology apparatus, and lithographic system
#14Homodyne optical sensor system incorporating a multi-phase beam combining system
#15Detection device and detection method
#16Measuring system and measuring method
#17Gradiometer and method of changing an optical path length to directly obtain a value of a gradient of gravity
#18Error measurement method and machine tool
#19Interferometric gravimeter apparatus and method
#20Interferometric gradiometer apparatus and method
#21OPTICAL COHERENCE TOMOGRAPHY WITH MULTIPLE IMAGING INSTRUMENTS
#22OPTICAL COHERENCE TOMOGRAPHY FOR NEURAL-SIGNAL APPLICATIONS
#23Optical coherence tomography with multiple sample arms
#24Methods and systems for measuring target movement with an interferometer
#25Motion measurement and synchronization using a scanning interferometer with gratings
#26Vibration detection device and vibration detector
#27Interferometer for measuring perpendicular translations
#28Interferometer calibration methods and apparatus
#29Interferometer calibration methods and apparatus
#30Multi-pass optical system to improve resolution of interferometers