G01B9/02022 - CPC Classification Index

#1

20260146850

2026-05-28

LATERAL SHEARING INTERFEROMETRY FOR SURFACE PROFILE MEASUREMENT OF PATTERN WAFERS

#2

20230168083

2023-06-01

SYSTEM FOR GENERATING A SIGNAL REPRESENTATIVE OF THE PROFILE OF A SURFACE MOVING RELATIVE TO THE SYSTEM

#3

20230168082

2023-06-01

SYSTEM FOR GENERATING A SIGNAL REPRESENTATIVE OF THE PROFILE OF A SURFACE MOVING RELATIVE TO THE SYSTEM

#4

20220011089

2022-01-13

WIDE FIELD-OF-VIEW MICHELSON FOR SHEAROGRAPHY

#5

20200096315

2020-03-26

Metrology and profilometry using light field generator

#6

20190128823

2019-05-02

Optical system and method for measurements of samples

#7

20190011247

2019-01-10

Method for phase resolved heterodyne shearographic measurements

#8

20180224266

2018-08-09

Method and apparatus for phase resolved heterodyne shearographic measurements

#9

20180217001

2018-08-02

Optical interferometer

#10

20180017372

2018-01-18

Precision surface measurement in a vacuum

#11

20170292833

2017-10-12

Apparatus for measuring three-dimensional shape using prism

#12

20160153764

2016-06-02

Three-DOF heterodyne grating interferometer displacement measurement system

#13

20150292870

2015-10-15

Displacement detecting device

#14

20150241201

2015-08-27

Grazing incidence interferometer

#15

20150226538

2015-08-13

GRAZING INCIDENCE INTERFEROMETER

#16

20150049337

2015-02-19

Grazing-incidence interferometer with dual-side measurement capability using a common image plane

#17

20140168637

2014-06-19

Simultaneous refractive index and thickness measurements with a monochromatic low-coherence interferometer

#18

20130335746

2013-12-19

Device for distance measurement

#19

20130250307

2013-09-26

Displacement detecting device

#20

20130107276

2013-05-02

Interferometric measuring device with detectors set at different angular ranges

#21

20130057872

2013-03-07

Device for determining distance interferometrically

#22

20130003152

2013-01-03

INTERFEROMETRY-BASED STRESS ANALYSIS

#23

20120327425

2012-12-27

Grazing incidence interferometer

#24

20110273719

2011-11-10

Optical imaging for optical device inspection

#25

20110235051

2011-09-29

Device for interferential distance measurement

#26

20110176139

2011-07-21

Measuring apparatus and exposure device

#27

20110032536

2011-02-10

Grazing incidence interferometer

#28

20110032504

2011-02-10

Height measurement apparatus, exposure apparatus, and device fabrication method

#29

20110032503

2011-02-10

Measurement apparatus for calculation of substrate tilt, exposure apparatus, and device fabrication method

#30

20110001982

2011-01-06

Optical imaging apparatus and method

#31

20100209832

2010-08-19

Measurement apparatus, exposure apparatus, and device fabrication method

#32

20100149548

2010-06-17

Reticle inspection systems and method

#33

20100060898

2010-03-11

Methods and systems for interferometric analysis of surfaces and related applications

#34

20100027028

2010-02-04

Oblique incidence interferometer

#35

20100014098

2010-01-21

Oblique incidence interferometer

#36

20090262323

2009-10-22

MEASUREMENT APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

#37

20090251670

2009-10-08

OPTICAL FEEDBACK FOR HIGH SPEED SCAN MIRROR

#38

20090096980

2009-04-16

Methods and systems for interferometric analysis of surfaces and related applications

#39

20080304079

2008-12-11

Displacement measurement sensor head and system having measurement sub-beams comprising zeroth order and first order diffraction components

#40

20080291457

2008-11-27

Optical displacement sensor

#41

20080252896

2008-10-16

Image forming apparatus for forming image on record medium

#42

20080180682

2008-07-31

Apparatus and method for joint measurements of conjugated quadratures of fields of reflected/scattered and transmitted beams by an object in interferometry

#43

20080163686

2008-07-10

Accelerometer comprising an optically resonant cavity

#44

20080068614

2008-03-20

Methods and systems for interferometric analysis of surfaces and related applications

#45

20080043222

2008-02-21

METHOD FOR BIOMOLECULAR SENSING AND SYSTEM THEREOF

#46

20080002212

2008-01-03

Oblique incidence interferometer

#47

20070211256

2007-09-13

Linear-carrier phase-mask interferometer

#48

20070109551

2007-05-17

Self referencing heterodyne reflectometer and method for implementing

#49

20070086013

2007-04-19

Interferometry method and system including spectral decomposition

#50

20070058173

2007-03-15

Position-measuring device

#51

20070024868

2007-02-01

Interferometers for optical coherence domain reflectometry

#52

20060250620

2006-11-09

Apparatus and method of in situ and ex situ measurement of spatial impulse response of an optical system using phase-shifting point-diffraction interferometry

#53

20060244975

2006-11-02

Interferometer calibration methods and apparatus

#54

20060227340

2006-10-12

Position sensing apparatus, and position sensing method

#55

20060092429

2006-05-04

Catoptric and catadioptric imaging systems with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfaces

#56

20060072204

2006-04-06

Catoptric and catadioptric imaging systems with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfaces

#57

20060066873

2006-03-30

Catoptric imaging systems comprising pellicle and/or aperture-array beam-splitters and non-adaptive and/or adaptive catoptric surfaces

#58

20060033924

2006-02-16

Apparatus and method for joint and time delayed measurements of components of conjugated quadratures of fields of reflected/scattered and transmitted/scattered beams by an object in interferometry

#59

20060017934

2006-01-26

Interferometer calibration methods and apparatus

#60

20050259268

2005-11-24

Heterodyne laser interferometer for measuring wafer stage translation

#61

20050206909

2005-09-22

Method and apparatus for enhanced resolution of high spatial frequency components of images using standing wave beams in non-interferometric and interferometric microscopy

#62

20050117169

2005-06-02

Polarization-dependent grating interferometer for measuring optical profile depth and spectral properties of a sample

#63

20050111007

2005-05-26

Catoptric and catadioptric imaging system with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfaces

#64

20050078319

2005-04-14

Surface profiling using an interference pattern matching template

#65

20050078318

2005-04-14

Methods and systems for interferometric analysis of surfaces and related applications

#66

20050068540

2005-03-31

Triangulation methods and systems for profiling surfaces through a thin film coating

#67

20050057757

2005-03-17

Low coherence grazing incidence interferometry for profiling and tilt sensing

#68

20050046866

2005-03-03

Surface inspection apparatus

#69

20050046865

2005-03-03

Pixelated phase-mask interferometer

#70

20050046863

2005-03-03

Common optical-path testing of high-numerical-aperture wavefronts

#71

20050030548

2005-02-10

Interferometric optical apparatus and method for measurements