164199 ⎘
Instruments as specified in the subgroups and characterised by the use of optical measuring means; Interferometers characterised by particular imaging or detection techniques Confocal imaging
Low-Bulk Interferometric Sensor
#2METHODS AND SYSTEMS FOR CONFOCAL FUNCTION DETERMINATION AND CORRECTION IN AN OCT IMAGING SYSTEM
#3OPTICAL MEASUREMENT APPARATUS AND METHOD OF MEASURING AN AXIAL LENGTH
#4OPTICAL MEASUREMENT APPARATUS AND METHOD OF RAPID MEASUREMENT
#5Broadband interferometric confocal microscope
#6Sensor head
#7Wafer carrier thickness measuring device
#8Method and assembly for chromatic confocal spectral interferometry or spectral domain oct
#9Systems and methods for optimizing focus for imaging-based overlay metrology
#10Device and method for measuring lens contour based on laser wave number scanning
#11Optical measuring device
#12Sample shape measuring apparatus for calculating a shape of a sample disposed between an illumination optical system and an observation optical system
#13Sub-resolution defect detection
#14Confocal microscope for determination of a layer thickness and microscopy method for determination of a layer thickness
#15Systems and methods for optimizing focus for imaging-based overlay metrology
#16Hybrid telescope for optical beam delivery and related systems
#17Interference observation device and interference observation method
#18Interference observation device
#19Portable interferometric device
#20Multi-functioned optical measurement device and method for optically measuring a plurality of parameters
#21Differential filtering chromatic confocal microscopic system
#22Light microscope and method for image recording using a light microscope
#23Hybrid telescope for optical beam delivery and related systems and methods
#24Three-dimensional optical coherence tomography confocal imaging apparatus
#25Method and apparatus for interferometry
#26Device and method for acquiring position with a confocal Fabry-Perot interferometer
#27Optical object measurement apparatus
#28Optical coherence tomography apparatus
#29Heterodyne interferometer device for optically measuring an object
#30Apparatus and method for joint measurements of conjugated quadratures of fields of reflected/scattered and transmitted beams by an object in interferometry
#31Spectral Imaging Camera and Applications
#32Method and assembly for confocal, chromatic, interferometric and spectroscopic scanning of optical, multi-layer data memories
#33Device and method for the non-invasive detection and measurement of the properties of a medium
#34Apparatus and methods for overlay, alignment mark, and critical dimension metrologies based on optical interferometry
#35Optical fiber-typed spectral confocal coherence tomography optical system and application thereof