164200 ⎘
Instruments as specified in the subgroups and characterised by the use of optical measuring means; Interferometers characterised by particular imaging or detection techniques Imaging of the Fourier or pupil or back focal plane, i.e. angle resolved imaging
METHODS AND SYSTEMS FOR TWO-DIMENSIONAL DETERMINATION OF THE SIZE AND SHAPE OF A BRIGHT, MICRON-SIZE LIGHT SOURCE USING INTERFEROMETRY WITH A TWO-DIMENSIONAL NON-REDUNDANT APERTURE MASK, INCLUDING METHODS AND SYSTEMS FOR WAVEFRONT SENSING
#2ABSOLUTE MEASUREMENT METHOD FOR THE PHASE OF THE COMPLEX COHERENCE COEFFICIENT
#3Scanning overlay metrology with high signal to noise ratio
#4Imaging Target Movement Compensation in a Fourier-domain Optical Coherence Tomography Imaging System
#5PUPIL IMAGE MEASURING DEVICE AND METHOD
#6FREQUENCY-DOMAIN INTERFEROMETRIC BASED IMAGING SYSTEMS AND METHODS
#7MULTI-PITCH GRID OVERLAY TARGET FOR SCANNING OVERLAY METROLOGY
#8Automatic optical path adjustment in home OCT
#9SYSTEMS AND METHODS FOR CONCURRENT MEASUREMENTS OF INTERFEROMETRIC AND ELLIPSOMETRIC SIGNALS OF MULTI-LAYER THIN FILMS
#10Local shape deviation in a semiconductor specimen
#11Thin films and surface topography measurement using polarization resolved interferometry
#12Grey-mode scanning scatterometry overlay metrology
#13Ellipsometer
#14Optical coherence tomography apparatus, imaging method, and non-transitory computer readable medium storing imaging program
#15SWEPT SOURCE OPTICAL COHERENCE TOMOGRAPHY IMAGING SYSTEM
#16Three dimensional (3D) imaging using optical coherence factor (OCF)
#17Frequency-domain interferometric based imaging systems and methods
#18Automatic optical path adjustment in home OCT
#19Methods and systems of holographic interferometry
#20Automatic optical path adjustment in home OCT
#21Physical parameter estimating method, physical parameter estimating device, and electronic apparatus using sampling theorem in the fractional fourier transform domain
#22Sample shape measuring apparatus for calculating a shape of a sample disposed between an illumination optical system and an observation optical system
#23System for Performing Dual Path, Two- Dimensional Optical Coherence Tomography(OCT)
#24Cascade Fourier domain optical coherence tomography
#25Optical measurement apparatus and optical measurement method
#26Optical measurement apparatus and optical measurement method
#27Device and method for determining the water content in the atmosphere, device and method for detecting icing conditions and computer programs
#28Dynamic mode switching for multi-mode ophthalmic optical coherence tomography
#29Scanning white-light interferometry system for characterization of patterned semiconductor features
#30Interferometer
#31Method for determining the water content in the atmosphere, method for detecting icing conditions and computer programs
#32Systems and methods for endoscopic angle-resolved low coherence interferometry
#33Methods and Apparatus for Swept-Source Optical Coherence Tomography
#34Edge registration for interferometry
#35System for performing dual path, two-dimensional optical coherence tomography (OCT)
#36ROTARY FOURIER TRANSFORM INTERFEROMETER SPECTROMETER INCLUDING A MULTI-FACETED OPTICAL ELEMENT
#37Frequency-domain interferometric based imaging systems and methods
#38Method and apparatus for performing optical imaging using frequency-domain interferometry
#39Real-time label-free high-throughput cell screening in flow
#40SD-OCT Flatten Coherence Length by Controlling Spatial Dispersion
#41ROTARY FOURIER TRANSFORM INTERFEROMETER SPECTROMETER INCLUDING A MULTI-FACETED OPTICAL ELEMENT
#42Methods and apparatus for swept-source optical coherence tomography
#43Spectral filtering of k-clock signal in OCT system and method
#44System for performing dual path, two-dimensional optical coherence tomography (OCT)
#45Image registration, averaging, and compounding for high speed extended depth optical coherence tomography
#46Method For Biodynamic Spectroscope Imaging
#47Methods, systems and computer program products for dynamic optical histology using optical coherence tomography
#48Swept source OCT system and method with phase-locked detection
#49Method and apparatus for performing optical imaging using frequency-domain interferometry
#50APPARATUSES, SYSTEMS, AND METHODS FOR LOW-COHERENCE INTERFEROMETRY (LCI)
#51Systems and methods for endoscopic angle-resolved low coherence interferometry
#52MINIATURE SCAN-FREE OPTICAL TOMOGRAPHY SYSTEM
#53Observation device
#54Systems and methods of angle-resolved low coherence interferometry based optical correlation
#55Phase characterization of targets
#56Line-field holoscopy
#57OPTICAL TOMOGRAPHY SYSTEM
#58APPARATUSES, SYSTEMS, AND METHODS FOR LOW-COHERENCE INTERFEROMETRY (LCI)
#59DATA INTERPOLATION METHODS FOR METROLOGY OF SURFACES, FILMS AND UNDERRESOLVED STRUCTURES
#60Interferometric methods for metrology of surfaces, films and underresolved structures
#61Method and apparatus for performing optical imaging using frequency-domain interferometry
#62Methods and apparatus for swept-source optical coherence tomography
#63Systems and methods for endoscopic angle-resolved low coherence interferometry
#64Methods and apparatus for swept-source optical coherence tomography
#65Interferometer for determining overlay errors
#66Method and apparatus for performing optical imaging using frequency-domain interferometry
#67Interference microscope with scan motion detection using fringe motion in monitor patterns
#68Interferometer with multiple modes of operation for determining characteristics of an object surface
#69APPARATUSES, SYSTEMS, AND METHODS FOR LOW-COHERENCE INTERFEROMETRY (LCI)
#70Method and apparatus for performing optical imaging using frequency-domain interferometry
#71Optical heterodyne fourier transform interferometer
#72Generating model signals for interferometry
#73Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
#74Apparatus and method for measuring characteristics of surface features
#75Methods and apparatus for swept-source optical coherence tomography
#76Interferometry for determining characteristics of an object surface, with spatially coherent illumination
#77Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
#78Methods and systems for performing angle-resolved fourier-domain optical coherence tomography
#79Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
#80Method and apparatus for performing optical imaging using frequency-domain interferometry
#81Interferometer for determining characteristics of an object surface
#82Interferometer with multiple modes of operation for determining characteristics of an object surface
#83Interferometer for determining characteristics of an object surface, including processing and calibration
#84Heterodyning time resolution boosting method and system
#85Apparatus and techniques for enhanced resolution imaging