164208 ⎘
Instruments as specified in the subgroups and characterised by the use of optical measuring means; Interferometers characterised by particular mechanical design details Protecting, e.g. shock absorbing, arrangements
OPTICAL SAFETY DEVICE
#2Chamber for vibrational and environmental isolation of thin wafers
#3Retro-reflective interferometer
#4Pressure insensitive interferometer
#5Apparatus to reduce pressure and thermal sensitivity of high precision optical displacement sensors
#6Durable single mode fiber probe with optimized reference reflectivity
#7OPTICAL MODULE
#8OPTICAL INTERFEROMETER SYSTEM WITH DAMPED VIBRATION AND NOISE EFFECT PROPERTY
#9Method and apparatus for improving the temperature stability and minimizing the noise of the environment that encloses an interferometric measuring system
#10System and method for effective isolation of an interferometer
#11Precision length standard for coherent laser radar
#12Method for determining positions of structures on a substrate
#13System and method for determining positions of structures on a substrate
#14Coordinate measuring machine for measuring structures on a substrate
#15Interferometry system chamber viewing window
#16SYSTEM AND METHOD FOR REDUCING CONVECTION CURRENT EFFECTS IN THE OPTICAL PATH OF A HOLOGRAPHIC INTERFEROMETRY SYSTEM
#17APPARATUS FOR MEASURING THE POSITION OF AN OBJECT WITH A LASER INTERFEROMETER SYSTEM
#18Precision length standard for coherent laser radar
#19Interferometry measurement in disturbed environments
#20Method and device for measuring wall thickness of a pipe in a pipe-rolling mill
#21Coherent beam device for observing and measuring sample