ClassID:

164235

G01B9/02084 - CPC Classification

Classification description:

Instruments as specified in the subgroups and characterised by the use of optical measuring means; Interferometers characterised by particular signal processing and presentation Processing in the Fourier or frequency domain when not imaged in the frequency domain

Recent Application in this class:
#1
20250334393
2025-10-30

SEMICONDUCTOR MEASURING DEVICE USING BEAM DISPLACER

#2
20250172379
2025-05-29

DETECTION SYSTEM, COMPENSATION METHOD, AND COMPUTER READABLE MEDIUM FOR SEMICONDUCTOR SURFACE MORPHOLOGY

#3
20250116501
2025-04-10

METHOD OF CALCULATING OPTICAL AERIAL IMAGE

#4
20240280914
2024-08-22

Scanning overlay metrology with high signal to noise ratio

#5
20240053136
2024-02-15

Method of Processing Interferometry Signal, and Associated Interferometer

#6
20230366674
2023-11-16

Method for measuring the diameter of filament diffraction fringes by calculating the frequency domain

#7
20230349688
2023-11-02

MEASUREMENT METHOD AND MEASUREMENT APPARATUS FOR MEASURING THICKNESS OF SEMICONDUCTOR WAFER

#8
20230314122
2023-10-05

OPTICAL INTERFEROMETRIC RANGE SENSOR

#9
20230288185
2023-09-14

OPTICAL INTERFERENCE RANGE SENSOR

#10
20230213328
2023-07-06

METHOD FOR OPERATING AN OPTICAL TOMOGRAPHIC IMAGING APPARATUS

#11
20230144331
2023-05-11

SYSTEMS AND METHODS FOR SEMICONDUCTOR CHIP SURFACE TOPOGRAPHY METROLOGY

#12
20230084871
2023-03-16

OPTICAL INTERFERENCE RANGE SENSOR

#13
20230069303
2023-03-02

Local shape deviation in a semiconductor specimen

#14
20220357236
2022-11-10

Device and method for measuring interfaces of an optical element

#15
20220299888
2022-09-22

Metrology method and apparatus for of determining a complex-valued field

#16
20220260360
2022-08-18

Systems and methods improving optical coherence tomography (OCT) image resolution using k-linearization (KL) and dispersion correction (DC)

#17
20220228850
2022-07-21

Optical interference measuring apparatus and optical interference measuring method

#18
20220221266
2022-07-14

OPTICAL INTERFERENCE MEASURING APPARATUS AND OPTICAL INTERFERENCE MEASURING METHOD

#19
20220065616
2022-03-03

Optical coherence tomography with dispersed structured illumination

#20
20220003539
2022-01-06

Apparatus and method for measuring the thickness and refractive index of multilayer thin films using angle-resolved spectral interference image according to polarization

#21
20220003535
2022-01-06

Ellipsometer

#22
20210396508
2021-12-23

Method and device for analog in situ laser process monitoring

#23
20210348912
2021-11-11

SWEPT SOURCE OPTICAL COHERENCE TOMOGRAPHY IMAGING SYSTEM

#24
20210231526
2021-07-29

Multi-spectral feature sensing techniques and sensors for determining a phase shift by comparing a measured narrowband response to a known wideband response

#25
20210034863
2021-02-04

Method for photocopying a sequence of cut surfaces inside a light-scattering object with improved scanning

#26
20210000645
2021-01-07

Laser doppler vibrometry for eye surface vibration measurement to determine cell damage

#27
20200355487
2020-11-12

Method, device and electronic apparatus for estimating physical parameter by discrete chirp fourier transform

#28
20200103215
2020-04-02

Optical coherence tomography with dispersed structured illumination

#29
20200096312
2020-03-26

Imaging apparatus and imaging method

#30
20200033112
2020-01-30

Interferometric distance measurement based on compression of chirped interferogram from cross-chirped interference

#31
20190271534
2019-09-05

LENSLESS IMAGING WITH REDUCED APERTURE

#32
20190265023
2019-08-29

Metrology of multi-layer stacks

#33
20190212187
2019-07-11

Optical detection of vibrations

#34
20190186898
2019-06-20

Method for real-time inspection of structural components

#35
20190137265
2019-05-09

METHOD AND SYSTEM FOR THE OPTICAL INSPECTION AND MEASUREMENT OF A FACE OF AN OBJECT

#36
20190128659
2019-05-02

Dual-edge sampling with k-clock to avoid aliasing in optical coherence tomography

#37
20190017805
2019-01-17

SELECTIVE AMPLIFICATION OF OPTICAL COHERENCE TOMOGRAPHY SIGNALS

#38
20190011247
2019-01-10

Method for phase resolved heterodyne shearographic measurements

#39
20180235461
2018-08-23

Method and device for exposing at least one sectional face inside a light scattering object

#40
20180226246
2018-08-09

Method of manufacturing silicon carbide epitaxial wafer

#41
20180224266
2018-08-09

Method and apparatus for phase resolved heterodyne shearographic measurements

#42
20180156597
2018-06-07

Scanning white-light interferometry system for characterization of patterned semiconductor features

#43
20180149466
2018-05-31

Code-modulated phased-array interferometric imaging

#44
20180128591
2018-05-10

Noise reduction techniques, fractional bi-spectrum and fractional cross-correlation, and applications

#45
20180055365
2018-03-01

Optical coherence tomographic imaging based image processing apparatus and image processing method for imaging object at a plurality of times at different focus positions

#46
20180020923
2018-01-25

Electric motor capable of reducing cogging torque

#47
20180008147
2018-01-11

Systems and methods for endoscopic angle-resolved low coherence interferometry

#48
20170290514
2017-10-12

Methods to improve axial resolution in optical coherence tomography

#49
20170146335
2017-05-25

Dual laser frequency sweep interferometry system and method

#50
20160320170
2016-11-03

Method and apparatus for performing optical imaging using frequency-domain interferometry

#51
20160305773
2016-10-20

Lensless imaging with reduced aperture

#52
20160290867
2016-10-06

Multiple window processing schemes for spectroscopic optical coherence tomography (OCT) and fourier domain low coherence interferometry

#53
20160252340
2016-09-01

Selective amplification of optical coherence tomography signals

#54
20160139253
2016-05-19

Signal acquisition and distance variation measurement system for laser ranging interferometers

#55
20150345931
2015-12-03

Apparatus for optical interferometric measurement and method for the same

#56
20150223681
2015-08-13

Method and Apparatus for Ultrafast Multi-Wavelength Photothermal Optical Coherence Tomography (OCT)

#57
20150198431
2015-07-16

Surface emitting laser and optical coherence tomography apparatus including the same

#58
20150160124
2015-06-11

Method for measuring characteristics of sample

#59
20150153166
2015-06-04

Systems and methods for interferometric phase measurement

#60
20150131104
2015-05-14

Apparatus and method for generating tomography image

#61
20150109622
2015-04-23

OPTICAL COHERENCE TOMOGRAPHY APPARATUS AND OPTICAL COHERENCE TOMOGRAPHY METHOD

#62
20150092197
2015-04-02

Device for optical coherence tomography

#63
20150077755
2015-03-19

Method and apparatus for performing optical imaging using frequency-domain interferometry

#64
20150045677
2015-02-12

Systems and methods for endoscopic angle-resolved low coherence interferometry

#65
20140244196
2014-08-28

MEASURING APPARATUS

#66
20140239181
2014-08-28

Film thickness measurement method

#67
20130265582
2013-10-10

Systems and methods for endoscopic angle-resolved low coherence interferometry

#68
20130235382
2013-09-12

Device for optical coherence tomography

#69
20130166239
2013-06-27

Method for generating information signal

#70
20130135614
2013-05-30

Dual window processing schemes for spectroscopic optical coherence tomography (OCT) and fourier domain low coherence interferometry

#71
20130003077
2013-01-03

TOMOGRAPHIC IMAGING APPARATUS AND CONTROL APPARATUS FOR TOMOGRAPHIC IMAGING APPARATUS

#72
20120320381
2012-12-20

MEASUREMENT APPARATUS AND MEASUREMENT METHOD

#73
20120307035
2012-12-06

Single shot full-field reflection phase microscopy

#74
20120281224
2012-11-08

SYSTEMS AND METHODS FOR ENDOSCOPIC ANGLE-RESOLVED LOW COHERENCE INTERFEROMETRY

#75
20120271591
2012-10-25

Thin films and surface topography measurement using reduced library

#76
20120257213
2012-10-11

Apparatus and method for determining a depth of a region having a high aspect ratio that protrudes into a surface of a semiconductor wafer

#77
20120176624
2012-07-12

Apparatus for and a method of determining surface characteristics

#78
20120127475
2012-05-24

APPARATUSES, SYSTEMS, AND METHODS FOR LOW-COHERENCE INTERFEROMETRY (LCI)

#79
20120026508
2012-02-02

Surface characteristic determining apparatus

#80
20120004888
2012-01-05

Apparatus for and a method of determining surface characteristics

#81
20110299091
2011-12-08

Method and apparatus for performing optical imaging using frequency-domain interferometry

#82
20110299064
2011-12-08

Deformation measuring apparatus and deformation measuring method

#83
20110228260
2011-09-22

System and method for measuring an optical fiber

#84
20110181889
2011-07-28

Optical interference measuring method and optical interference measuring apparatus

#85
20110157596
2011-06-30

Systems and methods for endoscopic angle-resolved low coherence interferometry

#86
20110134984
2011-06-09

Apparatus and method for obtaining phase corresponding to object position

#87
20110090511
2011-04-21

Method and apparatus for determining the height of a number of spatial positions on a sample defining a profile of a surface through white light interferometry

#88
20100309477
2010-12-09

Method and apparatus for performing optical imaging using frequency-domain interferometry

#89
20100265516
2010-10-21

Interferometer and method for measuring characteristics of optically unresolved surface features

#90
20100259762
2010-10-14

Vibration-insensitive interferometer using high-speed camera and continuous phase scanning method

#91
20100220333
2010-09-02

Optics for forming a linear beam in optical coherence tomography

#92
20100161273
2010-06-24

Apparatus for and a method of determining surface characteristics

#93
20100134786
2010-06-03

Interferometer with multiple modes of operation for determining characteristics of an object surface

#94
20100060898
2010-03-11

Methods and systems for interferometric analysis of surfaces and related applications

#95
20100033730
2010-02-11

Optical imaging system based on coherence frequency domain reflectometry

#96
20100014090
2010-01-21

Systems and methods for endoscopic angle-resolved low coherence interferometry

#97
20090319225
2009-12-24

Apparatus for and a method of determining surface characteristics

#98
20090262362
2009-10-22

Interferometer for overlay measurements

#99
20090182528
2009-07-16

Analyzing surface structure using scanning interferometry

#100
20090147268
2009-06-11

Interferometric analysis of under-resolved features

#101
20090096980
2009-04-16

Methods and systems for interferometric analysis of surfaces and related applications

#102
20090093980
2009-04-09

Real time SD-OCT with distributed acquisition and processing

#103
20090073459
2009-03-19

Wavefront measuring apparatus for optical pickup

#104
20090073456
2009-03-19

APPARATUSES, SYSTEMS, AND METHODS FOR LOW-COHERENCE INTERFEROMETRY (LCI)

#105
20090027689
2009-01-29

Method and apparatus for performing optical imaging using frequency-domain interferometry

#106
20090027686
2009-01-29

Optical heterodyne fourier transform interferometer

#107
20090021723
2009-01-22

Generating model signals for interferometry

#108
20090015844
2009-01-15

Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures

#109
20080304078
2008-12-11

Method and apparatus for optically analyzing a surface

#110
20080304077
2008-12-11

Cyclic error compensation in interferometry systems

#111
20080278730
2008-11-13

METHODS AND SYSTEMS FOR DETERMINING OPTICAL PROPERTIS USING LOW COHERENCE INTERFERENCE SIGNALS

#112
20080266574
2008-10-30

Interferometer and method for measuring characteristics of optically unresolved surface features

#113
20080266571
2008-10-30

Vibration resistant interferometry

#114
20080252896
2008-10-16

Image forming apparatus for forming image on record medium

#115
20080221837
2008-09-11

Method and system for analyzing low-coherence interferometry signals for information about thin film structures

#116
20080180694
2008-07-31

Scanning interferometry for thin film thickness and surface measurements

#117
20080174784
2008-07-24

Apparatus and method for measuring characteristics of surface features

#118
20080111996
2008-05-15

Three-dimensional shape measuring method and apparatus

#119
20080088849
2008-04-17

Interferometry for determining characteristics of an object surface, with spatially coherent illumination

#120
20080068614
2008-03-20

Methods and systems for interferometric analysis of surfaces and related applications

#121
20080065350
2008-03-13

Profiling complex surface structures using scanning interferometry

#122
20080062405
2008-03-13

Compensation of effects of atmospheric perturbations in optical metrology

#123
20080018901
2008-01-24

Compensation of systematic effects in low coherence interferometry

#124
20070268496
2007-11-22

Method for enhancing the measuring accuracy when determining the coordinates of structures on a substrate

#125
20070263215
2007-11-15

Means and methods for signal validation for sizing spherical objects

#126
20070247637
2007-10-25

Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures

#127
20070177157
2007-08-02

Optical readhead

#128
20070139656
2007-06-21

Measurement of thin films using fourier amplitude

#129
20070133002
2007-06-14

Systems and methods for endoscopic angle-resolved low coherence interferometry

#130
20070097380
2007-05-03

Profiling complex surface structures using height scanning interferometry

#131
20070091318
2007-04-26

Method and apparatus for optically analyzing a surface

#132
20070091317
2007-04-26

Method and apparatus for optically analyzing a surface

#133
20070086019
2007-04-19

Methods and systems for determining optical properties using low-coherence interference signals

#134
20070081167
2007-04-12

Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures

#135
20070046953
2007-03-01

Interferometer and method for measuring characteristics of optically unresolved surface features

#136
20070013916
2007-01-18

Methods and systems for ultra-precise measurement and control of object motion in six degrees of freedom by projection and measurement of interference fringes

#137
20070008547
2007-01-11

Cyclic error compensation in interferometry systems

#138
20060262321
2006-11-23

Method and system for analyzing low-coherence interferometry signals for information about thin film structures

#139
20060244973
2006-11-02

Method and apparatus for performing optical imaging using frequency-domain interferometry

#140
20060187464
2006-08-24

Interferometry systems and methods of using interferometry systems

#141
20060158659
2006-07-20

Interferometer for determining characteristics of an object surface

#142
20060158658
2006-07-20

Interferometer with multiple modes of operation for determining characteristics of an object surface

#143
20060158657
2006-07-20

Interferometer for determining characteristics of an object surface, including processing and calibration

#144
20060053005
2006-03-09

Detecting events of interest using quantum resonance interferometry

#145
20050259265
2005-11-24

Methods and systems for determining optical properties using low-coherence interference signals

#146
20050248772
2005-11-10

Interferometry systems and methods of using interferometry systems

#147
20050237536
2005-10-27

Interferometry systems and methods of using interferometry systems

#148
20050237535
2005-10-27

Vibration resistant interferometry

#149
20050237534
2005-10-27

Vibration resistant interferometry

#150
20050166118
2005-07-28

Cyclic error compensation in interferometry systems

#151
20050088663
2005-04-28

Scanning interferometry for thin film thickness and surface measurements

#152
20050078319
2005-04-14

Surface profiling using an interference pattern matching template

#153
20050078318
2005-04-14

Methods and systems for interferometric analysis of surfaces and related applications

#154
20050073692
2005-04-07

Profiling complex surface structures using scanning interferometry

#155
20050068540
2005-03-31

Triangulation methods and systems for profiling surfaces through a thin film coating

#156
20050062957
2005-03-24

Phase determination of a radiation wave field

#157
20050057757
2005-03-17

Low coherence grazing incidence interferometry for profiling and tilt sensing

#158
18984931
2025-08-26

Optical fiber-typed spectral confocal coherence tomography optical system and application thereof

#159
17679423
2023-07-18

Homodyne encoder system with adaptive path length matching

#160
17300091
2023-06-13

Reflectometer, spectrophotometer, ellipsometer and polarimeter system with a super continuum laser source of a beam of electromagnetism, and improved detector system

#161
16031298
2019-09-24

Modular interferometric telescope

#162
15839658
2018-12-18

System and method for measuring displacement

#163
14541609
2018-05-08

Narrow bandwidth detection of vibration signature using fiber lasers