164235 ⎘
Instruments as specified in the subgroups and characterised by the use of optical measuring means; Interferometers characterised by particular signal processing and presentation Processing in the Fourier or frequency domain when not imaged in the frequency domain
SEMICONDUCTOR MEASURING DEVICE USING BEAM DISPLACER
#2DETECTION SYSTEM, COMPENSATION METHOD, AND COMPUTER READABLE MEDIUM FOR SEMICONDUCTOR SURFACE MORPHOLOGY
#3METHOD OF CALCULATING OPTICAL AERIAL IMAGE
#4Scanning overlay metrology with high signal to noise ratio
#5Method of Processing Interferometry Signal, and Associated Interferometer
#6Method for measuring the diameter of filament diffraction fringes by calculating the frequency domain
#7MEASUREMENT METHOD AND MEASUREMENT APPARATUS FOR MEASURING THICKNESS OF SEMICONDUCTOR WAFER
#8OPTICAL INTERFEROMETRIC RANGE SENSOR
#9OPTICAL INTERFERENCE RANGE SENSOR
#10METHOD FOR OPERATING AN OPTICAL TOMOGRAPHIC IMAGING APPARATUS
#11SYSTEMS AND METHODS FOR SEMICONDUCTOR CHIP SURFACE TOPOGRAPHY METROLOGY
#12OPTICAL INTERFERENCE RANGE SENSOR
#13Local shape deviation in a semiconductor specimen
#14Device and method for measuring interfaces of an optical element
#15Metrology method and apparatus for of determining a complex-valued field
#16Systems and methods improving optical coherence tomography (OCT) image resolution using k-linearization (KL) and dispersion correction (DC)
#17Optical interference measuring apparatus and optical interference measuring method
#18OPTICAL INTERFERENCE MEASURING APPARATUS AND OPTICAL INTERFERENCE MEASURING METHOD
#19Optical coherence tomography with dispersed structured illumination
#20Apparatus and method for measuring the thickness and refractive index of multilayer thin films using angle-resolved spectral interference image according to polarization
#21Ellipsometer
#22Method and device for analog in situ laser process monitoring
#23SWEPT SOURCE OPTICAL COHERENCE TOMOGRAPHY IMAGING SYSTEM
#24Multi-spectral feature sensing techniques and sensors for determining a phase shift by comparing a measured narrowband response to a known wideband response
#25Method for photocopying a sequence of cut surfaces inside a light-scattering object with improved scanning
#26Laser doppler vibrometry for eye surface vibration measurement to determine cell damage
#27Method, device and electronic apparatus for estimating physical parameter by discrete chirp fourier transform
#28Optical coherence tomography with dispersed structured illumination
#29Imaging apparatus and imaging method
#30Interferometric distance measurement based on compression of chirped interferogram from cross-chirped interference
#31LENSLESS IMAGING WITH REDUCED APERTURE
#32Metrology of multi-layer stacks
#33Optical detection of vibrations
#34Method for real-time inspection of structural components
#35METHOD AND SYSTEM FOR THE OPTICAL INSPECTION AND MEASUREMENT OF A FACE OF AN OBJECT
#36Dual-edge sampling with k-clock to avoid aliasing in optical coherence tomography
#37SELECTIVE AMPLIFICATION OF OPTICAL COHERENCE TOMOGRAPHY SIGNALS
#38Method for phase resolved heterodyne shearographic measurements
#39Method and device for exposing at least one sectional face inside a light scattering object
#40Method of manufacturing silicon carbide epitaxial wafer
#41Method and apparatus for phase resolved heterodyne shearographic measurements
#42Scanning white-light interferometry system for characterization of patterned semiconductor features
#43Code-modulated phased-array interferometric imaging
#44Noise reduction techniques, fractional bi-spectrum and fractional cross-correlation, and applications
#45Optical coherence tomographic imaging based image processing apparatus and image processing method for imaging object at a plurality of times at different focus positions
#46Electric motor capable of reducing cogging torque
#47Systems and methods for endoscopic angle-resolved low coherence interferometry
#48Methods to improve axial resolution in optical coherence tomography
#49Dual laser frequency sweep interferometry system and method
#50Method and apparatus for performing optical imaging using frequency-domain interferometry
#51Lensless imaging with reduced aperture
#52Multiple window processing schemes for spectroscopic optical coherence tomography (OCT) and fourier domain low coherence interferometry
#53Selective amplification of optical coherence tomography signals
#54Signal acquisition and distance variation measurement system for laser ranging interferometers
#55Apparatus for optical interferometric measurement and method for the same
#56Method and Apparatus for Ultrafast Multi-Wavelength Photothermal Optical Coherence Tomography (OCT)
#57Surface emitting laser and optical coherence tomography apparatus including the same
#58Method for measuring characteristics of sample
#59Systems and methods for interferometric phase measurement
#60Apparatus and method for generating tomography image
#61OPTICAL COHERENCE TOMOGRAPHY APPARATUS AND OPTICAL COHERENCE TOMOGRAPHY METHOD
#62Device for optical coherence tomography
#63Method and apparatus for performing optical imaging using frequency-domain interferometry
#64Systems and methods for endoscopic angle-resolved low coherence interferometry
#65MEASURING APPARATUS
#66Film thickness measurement method
#67Systems and methods for endoscopic angle-resolved low coherence interferometry
#68Device for optical coherence tomography
#69Method for generating information signal
#70Dual window processing schemes for spectroscopic optical coherence tomography (OCT) and fourier domain low coherence interferometry
#71TOMOGRAPHIC IMAGING APPARATUS AND CONTROL APPARATUS FOR TOMOGRAPHIC IMAGING APPARATUS
#72MEASUREMENT APPARATUS AND MEASUREMENT METHOD
#73Single shot full-field reflection phase microscopy
#74SYSTEMS AND METHODS FOR ENDOSCOPIC ANGLE-RESOLVED LOW COHERENCE INTERFEROMETRY
#75Thin films and surface topography measurement using reduced library
#76Apparatus and method for determining a depth of a region having a high aspect ratio that protrudes into a surface of a semiconductor wafer
#77Apparatus for and a method of determining surface characteristics
#78APPARATUSES, SYSTEMS, AND METHODS FOR LOW-COHERENCE INTERFEROMETRY (LCI)
#79Surface characteristic determining apparatus
#80Apparatus for and a method of determining surface characteristics
#81Method and apparatus for performing optical imaging using frequency-domain interferometry
#82Deformation measuring apparatus and deformation measuring method
#83System and method for measuring an optical fiber
#84Optical interference measuring method and optical interference measuring apparatus
#85Systems and methods for endoscopic angle-resolved low coherence interferometry
#86Apparatus and method for obtaining phase corresponding to object position
#87Method and apparatus for determining the height of a number of spatial positions on a sample defining a profile of a surface through white light interferometry
#88Method and apparatus for performing optical imaging using frequency-domain interferometry
#89Interferometer and method for measuring characteristics of optically unresolved surface features
#90Vibration-insensitive interferometer using high-speed camera and continuous phase scanning method
#91Optics for forming a linear beam in optical coherence tomography
#92Apparatus for and a method of determining surface characteristics
#93Interferometer with multiple modes of operation for determining characteristics of an object surface
#94Methods and systems for interferometric analysis of surfaces and related applications
#95Optical imaging system based on coherence frequency domain reflectometry
#96Systems and methods for endoscopic angle-resolved low coherence interferometry
#97Apparatus for and a method of determining surface characteristics
#98Interferometer for overlay measurements
#99Analyzing surface structure using scanning interferometry
#100Interferometric analysis of under-resolved features
#101Methods and systems for interferometric analysis of surfaces and related applications
#102Real time SD-OCT with distributed acquisition and processing
#103Wavefront measuring apparatus for optical pickup
#104APPARATUSES, SYSTEMS, AND METHODS FOR LOW-COHERENCE INTERFEROMETRY (LCI)
#105Method and apparatus for performing optical imaging using frequency-domain interferometry
#106Optical heterodyne fourier transform interferometer
#107Generating model signals for interferometry
#108Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
#109Method and apparatus for optically analyzing a surface
#110Cyclic error compensation in interferometry systems
#111METHODS AND SYSTEMS FOR DETERMINING OPTICAL PROPERTIS USING LOW COHERENCE INTERFERENCE SIGNALS
#112Interferometer and method for measuring characteristics of optically unresolved surface features
#113Vibration resistant interferometry
#114Image forming apparatus for forming image on record medium
#115Method and system for analyzing low-coherence interferometry signals for information about thin film structures
#116Scanning interferometry for thin film thickness and surface measurements
#117Apparatus and method for measuring characteristics of surface features
#118Three-dimensional shape measuring method and apparatus
#119Interferometry for determining characteristics of an object surface, with spatially coherent illumination
#120Methods and systems for interferometric analysis of surfaces and related applications
#121Profiling complex surface structures using scanning interferometry
#122Compensation of effects of atmospheric perturbations in optical metrology
#123Compensation of systematic effects in low coherence interferometry
#124Method for enhancing the measuring accuracy when determining the coordinates of structures on a substrate
#125Means and methods for signal validation for sizing spherical objects
#126Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
#127Optical readhead
#128Measurement of thin films using fourier amplitude
#129Systems and methods for endoscopic angle-resolved low coherence interferometry
#130Profiling complex surface structures using height scanning interferometry
#131Method and apparatus for optically analyzing a surface
#132Method and apparatus for optically analyzing a surface
#133Methods and systems for determining optical properties using low-coherence interference signals
#134Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
#135Interferometer and method for measuring characteristics of optically unresolved surface features
#136Methods and systems for ultra-precise measurement and control of object motion in six degrees of freedom by projection and measurement of interference fringes
#137Cyclic error compensation in interferometry systems
#138Method and system for analyzing low-coherence interferometry signals for information about thin film structures
#139Method and apparatus for performing optical imaging using frequency-domain interferometry
#140Interferometry systems and methods of using interferometry systems
#141Interferometer for determining characteristics of an object surface
#142Interferometer with multiple modes of operation for determining characteristics of an object surface
#143Interferometer for determining characteristics of an object surface, including processing and calibration
#144Detecting events of interest using quantum resonance interferometry
#145Methods and systems for determining optical properties using low-coherence interference signals
#146Interferometry systems and methods of using interferometry systems
#147Interferometry systems and methods of using interferometry systems
#148Vibration resistant interferometry
#149Vibration resistant interferometry
#150Cyclic error compensation in interferometry systems
#151Scanning interferometry for thin film thickness and surface measurements
#152Surface profiling using an interference pattern matching template
#153Methods and systems for interferometric analysis of surfaces and related applications
#154Profiling complex surface structures using scanning interferometry
#155Triangulation methods and systems for profiling surfaces through a thin film coating
#156Phase determination of a radiation wave field
#157Low coherence grazing incidence interferometry for profiling and tilt sensing
#158Optical fiber-typed spectral confocal coherence tomography optical system and application thereof
#159Homodyne encoder system with adaptive path length matching
#160Reflectometer, spectrophotometer, ellipsometer and polarimeter system with a super continuum laser source of a beam of electromagnetism, and improved detector system
#161Modular interferometric telescope
#162System and method for measuring displacement
#163Narrow bandwidth detection of vibration signature using fiber lasers