164581 ⎘
Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects; Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
SILICON MEMS GYROSCOPES WITH UPPER AND LOWER SENSE PLATES
#2MECHANICALLY AMPLIFIED HIGH-PRECISION, HIGH-STABILITY ANGULAR RATE SENSORS
#3Vibrator Device, Electronic Apparatus, And Vehicle
#4Vibration Element, Manufacturing Method Of Vibration Element, Physical Quantity Sensor, Inertial Measurement Device, Electronic Apparatus, And Vehicle
#5Vibration element, manufacturing method of vibration element, physical quantity sensor, inertial measurement device, electronic apparatus, and vehicle
#6PRECISION GYROSCOPE MODE-MATCHING INSENSITIVE TO RATE INPUT
#7Vibration element, physical quantity sensor, inertial measurement unit, electronic apparatus, and vehicle
#8Silicon MEMS gyroscopes with upper and lower sense plates
#9Vibrator device, oscillator, gyro sensor, electronic apparatus, and vehicle
#10Vibrator Device, Electronic Apparatus, And Vehicle
#11SENSOR ELEMENT AND ANGULAR VELOCITY SENSOR
#12Vibration element, manufacturing method of vibration element, physical quantity sensor, inertial measurement device, electronic apparatus, and vehicle
#13Vibrator device, electronic apparatus, and vehicle
#14Accelerometer system enclosing gas
#15Positioning apparatus comprising an inertial sensor and inertial sensor temperature compensation method
#16IN-PLANE NON-DEGENERATE CORIOLIS VIBRATORY GYROSCOPE
#17Vibrator device, oscillator, gyro sensor, electronic apparatus, and vehicle
#18Piezoelectric thin film, piezoelectric thin film device, piezoelectric actuator, piezoelectric sensor, piezoelectric transducer, hard disk drive, printer head, and ink jet printer device
#19Sensor element and angular velocity sensor
#20Vibration element, method of manufacturing vibration element, physical quantity sensor, inertial measurement unit, electronic device, and vehicle
#21Physical quantity detection device, manufacturing method for physical quantity detection device, electronic apparatus, and moving object
#22Silicon carbide microelectromechanical structure, device, and method
#23Methods for fabricating silicon MEMS gyroscopes with upper and lower sense plates
#24Vibratory error compensation in a tuning fork gyroscope such as a Coriolis Vibratory Gyroscope (CVG)
#25MEMS metal-quartz gyroscope
#26Sensor element, angular velocity sensor, and multi-axis angular velocity sensor
#27Sensor element, physical quantity sensor, electronic apparatus, and vehicle
#28PHYSICAL QUANTITY SENSOR
#29Angular velocity sensor, sensor element, and multi-axis angular velocity sensor
#30Vibration element, manufacturing method of vibration element, physical quantity sensor, inertial measurement device, electronic apparatus, and vehicle
#31Vibrator device, circuit device, method of manufacturing vibrator device, electronic apparatus, and vehicle
#32Vibration device, electronic apparatus, and vehicle
#33Angular rate sensor with in-phase motion suppression structure
#34Silicon-based micro-machined vibratory gyroscope with an I-shaped structure
#35MEMS DEVICE
#36Circuit Apparatus, Physical Quantity Measuring Apparatus, Electronic Device, And Vehicle
#37Sensor element, sensor, electronic apparatus, and vehicle
#38Vibrator device, oscillator, gyro sensor, electronic apparatus, and vehicle
#39Vibration device, angular velocity sensor, electronic device, and vehicle
#40Composite sensor
#41Vibration device
#42Detection device for detecting dynamic quantity exerted on mechanical system including first and second mechanical oscillators
#43MEMS LINK MECHANISM USED FOR GYROSCOPE
#44Physical quantity detecting device, electronic apparatus, and moving object
#45Silicon carbide microelectromechanical structure, device, and method
#46Composite sensor
#47Gyro sensor and electronic apparatus
#48PHYSICAL QUANTITY SENSOR
#49Angular velocity sensor
#50Systems and methods for a time-based optical pickoff for MEMS sensors
#51INERTIAL SENSOR WITH COUPLE SPRING FOR COMMON MODE REJECTION
#52System and methods for highly integrated optical readout MEMS sensors
#53MEMS Sensor for Measuring Z-Axis Angular Rate
#54Vibrator element, method of manufacturing vibrator element, vibrator, electronic device, electronic apparatus and moving body
#55Resonator element, electronic device, electronic apparatus, and moving object
#56VIBRATION UNIT AND ANGULAR VELOCITY SENSOR MODULE
#57Micromechanical sensor and method for manufacturing a micromechanical sensor
#58MEMS angular inertial sensor operating in tuning fork mode
#59Positioning apparatus comprising an inertial sensor and inertial sensor temperature compensation method
#60Resonator element, gyro sensor element, electronic device, electronic apparatus, and moving object
#61Oscillating voltage of sense electrodes in a MEMS tuning fork gyroscope
#62Vibration element, vibrator, vibration device, electronic device and moving object
#63Piezoelectric actuator device and method for manufacturing same
#64Thin film piezoelectric element, thin film piezoelectric actuator, thin film piezoelectric sensor, hard drive disk, and inkjet printer device
#65Angular velocity sensor and detection element used therein
#66Lever mechanisms for anti-phase mode isolation in MEMS tuning-fork structures
#67Thin-film piezoelectric element, thin-film piezoelectric actuator, thin-film piezoelectric sensor, hard disk drive, and inkjet printer apparatus
#68Vibrator and vibrating gyroscope
#69Thin film piezoelectric device
#70Tuning fork gyroscope time domain inertial sensor
#71Piezoelectric film and method of manufacturing the piezoelectric film, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
#72Vibrator element, method of manufacturing vibrator element, vibrator, electronic device, electronic apparatus and moving body
#73Vibrating element, gyro sensor, electronic apparatus and moving object
#74Vibrating reed, gyro sensor, electronic apparatus, and mobile unit
#75Vibrating element, sensor unit, electronic apparatus, and method for manufacturing vibrating element
#76Vibration device
#77Sensor element, sensor device, and electronic apparatus
#78Piezoelectric film and ink jet head and angular velocity sensor using the same
#79Vibrator element, sensor unit, and electronic device
#80Piezoelectric thin film, method for manufacturing same, inkjet head, method for forming image using inkjet head, angular velocity sensor, method for measuring angular velocity using angular velocity sensor, piezoelectric power generation element, and method for generating power using piezoelectric power generation element
#81Sensor element, method for manufacturing sensor element, sensor device, and electronic apparatus
#82Sensor element, method for manufacturing sensor element, sensor device, and electronic apparatus
#83Vibrating structure gyrometer with at least one tuning fork
#84Ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the peizoelectric generating element
#85Piezoelectric film, ink jet head, angular velocity sensor and piezoelectric generating element
#86Bending vibration piece and electronic device
#87Piezoelectric film and method of manufacturing the same, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
#88Piezoelectric film and method of manufacturing the same, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
#89Sensor module, sensor device, manufacturing method of sensor device, and electronic apparatus
#90Piezoelectric resonator element, piezoelectric resonator, piezoelectric oscillator, resonator gyro element, resonator gyro sensor, and electronic apparatus
#91SOLID-STATE INERTIAL SENSOR ON CHIP
#92Sensor device, motion sensor, and electronic device
#93Piezoelectric film, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
#94Element vibrating in two uncoupled modes, and use in vibrating rate gyroscope
#95Physical amount detecting device
#96Vibrator element, sensor device, sensor, and electronic apparatus
#97Micromechanical resonator
#98Support member of vibrator
#99Solid-state inertial sensor on chip
#100Angular velocity sensor and method of manufacturing the same
#101INERTIAL SENSOR AND INERTIAL DETECTING DEVICE
#102Angular velocity sensor element
#103Piezoelectric vibrating piece with extended supporting arms
#104Tuning bar vibrator and vibrating gyroscope using the same
#105Support member of vibrator
#106Angular velocity sensor and manufacturing method thereof
#107Angular rate sensor and electronic device
#108Angular rate sensor and method of manufacturing the same
#109Silicon inertial sensors formed using MEMS
#110Angular velocity sensor and method for manufacturing the same
#111Support member of vibrator
#112Silicon inertial sensors formed using MEMS
#113Angular velocity sensor and method of fabrication thereof
#114Structures for supporting vibrators and devices for measuring physical quantities
#115Piezoelectric element, fabrication method for the same, and inkjet head, inkjet recording apparatus and angular velocity sensor including the same
#116Method for manufacturing resonant device