164582 ⎘
Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects; Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks Manufacturing; Trimming; Mounting; Housings
SILICON MEMS GYROSCOPES WITH UPPER AND LOWER SENSE PLATES
#2Vibrator Device, Electronic Apparatus, And Vehicle
#3Vibration Element, Manufacturing Method Of Vibration Element, Physical Quantity Sensor, Inertial Measurement Device, Electronic Apparatus, And Vehicle
#4METHOD FOR MANUFACTURING VIBRATOR
#5METHOD FOR MANUFACTURING VIBRATOR
#6Structure, physical quantity sensor, inertial sensor, and method for manufacturing structure
#7Vibration element, manufacturing method of vibration element, physical quantity sensor, inertial measurement device, electronic apparatus, and vehicle
#8Method For Manufacturing Vibration Element
#9Vibration element, physical quantity sensor, inertial measurement unit, electronic apparatus, and vehicle
#10Silicon MEMS gyroscopes with upper and lower sense plates
#11Vibrator Device, Electronic Apparatus, And Vehicle
#12INERTIA MEASUREMENT MODULE FOR UNMANNED AIRCRAFT
#13SYSTEM AND METHOD FOR PROVIDING A SIMPLE AND RELIABLE INERTIA MEASUREMENT UNIT (IMU)
#14Vibrator device
#15Vibrator device, electronic apparatus, and vehicle
#16System and method for providing a simple and reliable inertia measurement unit (IMU)
#17Sensor element and angular velocity sensor
#18Inertia measurement module for unmanned aircraft
#19Sensor element and angular velocity sensor
#20Vibration element, method of manufacturing vibration element, physical quantity sensor, inertial measurement unit, electronic device, and vehicle
#21Methods for fabricating silicon MEMS gyroscopes with upper and lower sense plates
#22Sensor element, physical quantity sensor, electronic apparatus, and vehicle
#23VIBRATING ELEMENT, PHYSICAL QUANTITY SENSOR, INERTIAL MEASUREMENT DEVICE, ELECTRONIC APPARATUS, VEHICLE, AND METHOD OF MANUFACTURING VIBRATING ELEMENT
#24PHYSICAL QUANTITY SENSOR
#25Physical quantity sensor, method of manufacturing physical quantity sensor, electronic apparatus, and vehicle
#26Vibrator device, circuit device, method of manufacturing vibrator device, electronic apparatus, and vehicle
#27Piezoelectric vibration device
#28Structure using ferroelectric film and sensor using said structure
#29Physical quantity sensor, method for manufacturing physical quantity sensor, complex sensor, inertia measurement unit, portable electronic apparatus, electronic apparatus, and vehicle
#30System and method for providing a simple and reliable inertia measurement unit (IMU)
#31Circuit device, electronic apparatus, moving object and method of manufacturing of physical quantity detection device
#32Sensor element, sensor, electronic apparatus, and vehicle
#33Vibration device, angular velocity sensor, electronic device, and vehicle
#34Composite sensor
#35Gyro sensor, electronic apparatus, and vehicle
#36GYRO SENSOR, ELECTRONIC APPARATUS, AND VEHICLE
#37Inertia measurement module for unmanned aircraft
#38Composite sensor
#39Gyro sensor and electronic apparatus
#40Physical quantity sensor, electronic apparatus, and moving object
#41Electronic device, electronic apparatus, and moving object
#42Physical quantity sensor
#43System and method for providing a simple and reliable inertia measurement unit (IMU)
#44Angular velocity sensor
#45Inertia measurement module for unmanned aircraft
#46Physical quantity sensor, electronic apparatus, and moving object
#47Angular velocity sensor element and angular velocity sensor using same
#48Vibrator element, method of manufacturing vibrator element, vibrator, electronic device, electronic apparatus and moving body
#49Circuit device, electronic apparatus, moving object and method of manufacturing of physical quantity detection device
#50Physical quantity sensor, electronic apparatus and moving object
#51Electronic device, electronic apparatus, and moving object
#52Electronic device, electronic apparatus, and moving object
#53Fabrication of tungsten MEMS structures
#54Angular velocity sensor
#55Package, electronic component mounted package, physical quantity sensor, electronic device, and moving object
#56Piezoelectric actuator device and method for manufacturing same
#57Thin film piezoelectric element, thin film piezoelectric actuator, thin film piezoelectric sensor, hard drive disk, and inkjet printer device
#58Physical quantity sensor, electronic apparatus, and moving object
#59Vibrator element and method of manufacturing the same
#60Inertia measurement module for unmanned aircraft
#61Method of manufacturing electronic device, electronic apparatus, and mobile apparatus
#62Thin film piezoelectric device
#63Piezoelectric film and method of manufacturing the piezoelectric film, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
#64Piezoelectric film, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
#65Electronic device, electronic apparatus, mobile unit, and method of manufacturing electronic device
#66Piezoelectric film and method of manufacturing the same, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
#67Electronic device and electronic apparatus
#68Sensor device, manufacturing method of sensor device and electronic apparatus
#69Piezoelectric film and ink jet head and angular velocity sensor using the same
#70Angular velocity sensor and method of manufacture
#71Ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the peizoelectric generating element
#72Vibrating device and electronic apparatus
#73Angular speed sensor for detecting angular speed
#74Piezoelectric film and method of manufacturing the same, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
#75Piezoelectric film and method of manufacturing the same, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
#76Piezoelectric film and method of manufacturing the same, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
#77Method for connecting substrate and method for manufacturing semiconductor device
#78Piezoelectric film, ink jet head, method of forming image by the ink jet head, angular velocity sensor, method of measuring angular velocity by the angular velocity sensor, piezoelectric generating element, and method of generating electric power using the piezoelectric generating element
#79Vibrator element, sensor device, sensor, and electronic apparatus
#80SENSOR DEVICE, METHOD OF MANUFACTURING SENSOR DEVICE, MOTION SENSOR, AND METHOD OF MANUFACTURING MOTION SENSOR
#81Piezoelectric thin film, ink jet head, method for forming image with the ink jet head, angular velocity sensor, method for measuring angular velocity with the angular velocity sensor, piezoelectric generating element and method for generating electric power with the piezoelectric generating element
#82Tuning fork-type vibrator, tuning fork-type vibrator manufacturing method, and angular velocity sensor
#83Method for manufacturing crystal oscillator
#84ANGULAR VELOCITY SENSOR AND ELECTRONIC APPARATUS
#85Piezoelectric thin film and method of manufacturing the same, ink jet head, method of forming image with the ink jet head, angular velocity sensor, method of measuring angular velocity with the angular velocity sensor, piezoelectric generating element, and method of generating electric power with the piezoelectric generating element
#86Resonator element, resonator, physical quantity sensor, and electronic equipment that have steps on a side surface of a vibrating arm
#87Method of fabricating an inertial sensor
#88Support member of vibrator
#89Piezoelectric thin film and method of manufacturing the same, ink jet head, method of forming image with the ink jet head, angular velocity sensor, method of measuring angular velocity with the angular velocity sensor, piezoelectric generating element, and method of generating electric power with the piezoelectric generating element
#90Sensor assembly
#91Inertial sensor with dual cavity package and method of fabrication
#92ANGULAR VELOCITY SENSOR
#93Electronic component and method for manufacturing the same
#94Angular velocity sensor and method of manufacturing the same
#95INERTIAL SENSOR AND INERTIAL DETECTING DEVICE
#96DEVICE FOR ASSEMBLING AN ELECTRONIC COMPONENT
#97Angular velocity sensor element
#98Support member of vibrator
#99Angular velocity sensor and angular velocity sensing device
#100Angular velocity sensor and manufacturing method thereof
#101Vibrating gyroscope
#102Angular velocity sensor
#103Vibrator and production method therefor
#104Angular rate sensor
#105Angular velocity sensor
#106Angular velocity sensor
#107Silicon inertial sensors formed using MEMS
#108Angular velocity sensor and method for manufacturing the same
#109Support member of vibrator
#110Silicon inertial sensors formed using MEMS
#111Piezoelectric element, inkjet head, angular velocity sensor, methods for manufacturing them and inkjet recording device
#112Angular velocity sensor and method of fabrication thereof
#113Angular velocity senor
#114Vibration type gyroscope and method for manufacturing vibration type gyroscope
#115Structures for supporting vibrators and devices for measuring physical quantities
#116Angular velocity sensor
#117Piezoelectric element, fabrication method for the same, and inkjet head, inkjet recording apparatus and angular velocity sensor including the same
#118Angular velocity sensor
#119Method for manufacturing resonant device