G01D5/266 - CPC Classification Index

#1

20260104274

2026-04-16

METHOD AND DEVICE FOR DETERMINING AT LEAST ONE CORRECTIVE VALUE FOR AN ACTUAL PHASE VALUE TO BE CORRECTED AND ALSO FOR DETERMINING A RESULTING PHASE VALUE

#2

20240373171

2024-11-07

OPTICAL MICROPHONE SUBSTRATE

#3

20240258075

2024-08-01

SUBSTRATE SUPPORT WITH REAL TIME FORCE AND FILM STRESS CONTROL

#4

20240255319

2024-08-01

METHOD FOR DETERMINING A POSITION OF A MIRROR

#5

20240255318

2024-08-01

NON-CONTACT ENCODER FOR BOARD MEASUREMENT

#6

20240239511

2024-07-18

FIBER OPTIC ACTUATOR OVERLOAD TRIP SENSOR

#7

20230400818

2023-12-14

Rotation sensor for a crown of an electronic watch

#8

20230314185

2023-10-05

Optical sensor module including an interferometric sensor and extended depth of focus optics

#9

20230253188

2023-08-10

Substrate support with real time force and film stress control

#10

20230200016

2023-06-22

NON-CONTACT DISPLACEMENT MEASUREMENT FOR CRYOGENIC STABILIZATION

#11

20230133154

2023-05-04

METHODS AND SYSTEMS FOR TRACKING A PIPELINE INSPECTION GAUGE

#12

20230087691

2023-03-23

Through-Display Interferometric Proximity and Velocity Sensing

#13

20230047060

2023-02-16

Sensing method and sensor system

#14

20220408198

2022-12-22

Optical microphone substrate

#15

20220397429

2022-12-15

METHODS AND APPARATUSES FOR MEASURING MAGNETIC FLUX DENSITY AND OTHER PARAMETERS BY MEANS OF A PLURALITY OF NV CENTERS, AND APPLICATIONS THEREOF

#16

20220357185

2022-11-10

Optical sensor and physical quantity measurement device

#17

20220341760

2022-10-27

SYSTEM AND METHOD FOR ARBITRARY OPTICAL WAVEFORM GENERATION

#18

20220228890

2022-07-21

Heterodyne two-dimensional grating measuring device and measuring method thereof

#19

20210156718

2021-05-27

Method and system for contactless detection of rotational movement

#20

20210156673

2021-05-27

Optical fibre sensor for measuring deformation, said sensor operating in a harsh environment

#21

20210066038

2021-03-04

Substrate support with real time force and film stress control

#22

20210003425

2021-01-07

Optical encoder and drive control device comprising a light receiving element to receive a first interference fringe formed by a first periodic pattern and a second diffracted light from a second periodic pattern toward the first periodic pattern

#23

20200386580

2020-12-10

SCALE ELEMENT FOR AN OPTICAL MEASURING DEVICE

#24

20200225066

2020-07-16

HIGH RESOLUTION CURRENT AND MAGNETIC FIELD SENSOR

#25

20200158494

2020-05-21

Displacement detection device

#26

20200132561

2020-04-30

Sapphire sensor for measuring pressure and temperature with improved stress and temperature variation compensation

#27

20200132444

2020-04-30

Methods for confocal optical protractor with structured light illumination to determine angles

#28

20200132443

2020-04-30

Confocal optical protractor

#29

20200116696

2020-04-16

Single-pixel optical technologies for instantly quantifying multicellular response profiles

#30

20200103255

2020-04-02

Rotary encoder

#31

20190371642

2019-12-05

Detection device, imprint apparatus, planarization device, detection method, and article manufacturing method

#32

20190257645

2019-08-22

Interferometric position sensor

#33

20190204205

2019-07-04

Micro or nanomechanical particle detection device

#34

20190155065

2019-05-23

System for transduction of displacement to optical phase shift

#35

20190137890

2019-05-09

Position measurement system, calibration method, lithographic apparatus and device manufacturing method

#36

20190121243

2019-04-25

MOVABLE BODY DRIVE METHOD, MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION METHOD, PATTERN FORMING APPARATUS, EXPOSURE METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

#37

20190094074

2019-03-28

Confocal displacement measurement device and a confocal thickness measurement device

#38

20190049866

2019-02-14

Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing method

#39

20180356204

2018-12-13

Calibration method and system for a fast steering mirror

#40

20180328713

2018-11-15

Optical interferometry

#41

20180313671

2018-11-01

Scale device and two-axis displacement detection device

#42

20180188077

2018-07-05

Interferometric optical fibre sensor system and method of interrogation

#43

20180143000

2018-05-24

Optical measurement device having a plurality of rotary shafts and displacement detectors for detecting axial displacement of each rotary shaft and using the detected axial displacement for three-dimensional image correction

#44

20180128653

2018-05-10

Transparent-block encoder head with isotropic wedged elements

#45

20180120156

2018-05-03

Position detection method and optical module

#46

20180106645

2018-04-19

Metrology system and stage control device using the same

#47

20180100798

2018-04-12

High sensitivity real-time bacterial monitor

#48

20180067111

2018-03-08

Methods of determining cellular phenotypes

#49

20180066966

2018-03-08

DISPLACEMENT MEASURING DEVICE AND METHOD OF MEASURING DISPLACEMENT

#50

20180066932

2018-03-08

Closed-loop interferometric sensor using loop gain for determining interference contrast

#51

20180061627

2018-03-01

Encoder head with birefringent elements for forming imperfect retroreflection and exposure system utilizing the same

#52

20180058982

2018-03-01

Multifiber interrogation with reflectometry techniques

#53

20180058949

2018-03-01

Sapphire sensor apparatus including an optical fiber for measuring pressure and temperature

#54

20170363448

2017-12-21

Systems and methods for measuring angular position of a laser beam emitter

#55

20170356767

2017-12-14

Sensor system comprising multiplexed fiber-coupled fabry-perot sensors

#56

20170336723

2017-11-23

MOVABLE BODY DRIVE METHOD, MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION METHOD, PATTERN FORMING APPARATUS, EXPOSURE METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

#57

20170328699

2017-11-16

Dual measurement displacement sensing technique

#58

20170322498

2017-11-09

Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method

#59

20170292860

2017-10-12

Optical system with a frustrated isotropic block

#60

20170219852

2017-08-03

Quantum interference device, atomic oscillator, electronic apparatus, and moving object comprising FM-modulated adjustment light

#61

20170219333

2017-08-03

Fabry-Perot(F-P) sensor with sliding block having inclined reflective surface

#62

20170211951

2017-07-27

Scale and position-measuring device having such a scale

#63

20170183959

2017-06-29

Distributed sensing systems and methods with I/Q data balancing based on ellipse fitting

#64

20170160103

2017-06-08

Optical measurement system, measurement method for errors of rotating platform, and two dimensional sine wave annulus grating

#65

20170122808

2017-05-04

Confocal measurement device

#66

20170102227

2017-04-13

X-Y table with a position-measuring device

#67

20170089737

2017-03-30

Optical encoder having an optical portion comprising dual lenses and an aperture portion positioned in relation to a moiré grating

#68

20170082422

2017-03-23

Apparatus to reduce pressure and thermal sensitivity of high precision optical displacement sensors

#69

20170076915

2017-03-16

Substrate support with real time force and film stress control

#70

20170030830

2017-02-02

Submersible N-wavelength interrogation system and method for multiple wavelength interferometers

#71

20170030745

2017-02-02

Displacement detecting device

#72

20170030744

2017-02-02

Displacement detecting device by light retroreflectance having first and second retroreflecting units with a common light receiving unit

#73

20170003603

2017-01-05

Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method

#74

20160356823

2016-12-08

Interferometric sensor

#75

20160349086

2016-12-01

Interferometric rotary encoder

#76

20160327414

2016-11-10

Systems and methods for optical measurements using multiple beam interferometric sensors

#77

20160265990

2016-09-15

Optical fiber coupled photonic crystal slab strain sensor, system and method of fabrication and use

#78

20160265947

2016-09-15

Angle measuring method and angle measuring system

#79

20160246000

2016-08-25

Optomechanical device with mechanical elements and optical filters for actuating and/or detecting the movement of the elements

#80

20160238413

2016-08-18

Rotation angle measurement device and rotation angle measurement method

#81

20160216101

2016-07-28

Optical unit and displacement measuring device

#82

20160202041

2016-07-14

Optical position-measuring device

#83

20160116305

2016-04-28

Displacement measurement device and displacement measurement method

#84

20160102999

2016-04-14

Interferometric encoder systems having at least partially overlapping diffracted beams

#85

20160061822

2016-03-03

Method and apparatus for bacterial monitoring

#86

20160047677

2016-02-18

Optical sensor arrangement and method for measuring an observable

#87

20160018210

2016-01-21

Fiber optic system for sensing the position of a hydraulic accumulator piston

#88

20160011016

2016-01-14

Interferometric encoders using spectral analysis

#89

20160003605

2016-01-07

Displacement detection apparatus

#90

20150354944

2015-12-10

Optical position measuring device

#91

20150338205

2015-11-26

Heterodyne grating interferometer displacement measurement system

#92

20150323558

2015-11-12

Fiber optic sensor and method for detecting shock wave pressure and mass velocity in solid media

#93

20150292914

2015-10-15

Angle measuring method and angle measuring system

#94

20150292913

2015-10-15

Double pass interferometric encoder system

#95

20150268031

2015-09-24

Dual-frequency grating interferometer displacement measurement system

#96

20150204748

2015-07-23

Multiplexed fiber-coupled fabry-perot sensors and method therefor

#97

20150204743

2015-07-23

OPTICAL SENSOR AND METHOD FOR MEASURING THE PRESSURE OF A FLUID

#98

20150139451

2015-05-21

Optical sensor

#99

20150108335

2015-04-23

Fiber optic sensor for position sensing

#100

20150107357

2015-04-23

Optomechanical device for actuating and/or detecting movement of a mechanical element, in particular for gravimetric detection

#101

20150043005

2015-02-12

Interferometric heterodyne optical encoder system

#102

20150036147

2015-02-05

Distributed microwave Fabry-Perot interferometer device and method

#103

20150036144

2015-02-05

Rotation angle measurement device and rotation angle measurement method

#104

20150002833

2015-01-01

Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method

#105

20150002831

2015-01-01

Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method

#106

20140318273

2014-10-30

Sapphire sensor for measuring pressure and temperature

#107

20140300903

2014-10-09

Angle measuring method and angle measuring system

#108

20140293286

2014-10-02

N-wavelength interrogation system and method for multiple wavelength interferometers

#109

20140218746

2014-08-07

Optical position-measuring device

#110

20140146326

2014-05-29

Optical position-measuring device

#111

20140111789

2014-04-24

Optical fiber coupled photonic crystal slab strain sensor system

#112

20140049782

2014-02-20

Interferometric encoder systems

#113

20140022557

2014-01-23

Multi-beam optical displacement sensor

#114

20130265583

2013-10-10

FIBER OPTIC POSITION SENSING SYSTEM

#115

20130206760

2013-08-15

Optical probe containing oxygen, temperature, and pressure sensors and monitoring and control systems containing the same

#116

20130194584

2013-08-01

Position-measuring device and system having a plurality of position-measuring devices

#117

20130169209

2013-07-04

Encoder, servomotor, and motor unit

#118

20130114087

2013-05-09

LOW COHERENCE INTERFEROMETRY USING ENCODER SYSTEMS

#119

20130114062

2013-05-09

Compact encoder head for interferometric encoder system

#120

20130114061

2013-05-09

Double pass interferometric encoder system

#121

20130083314

2013-04-04

Combined measurement of neutron fluence with temperature and/or pressure

#122

20130070229

2013-03-21

MOVABLE BODY DRIVE METHOD, MOVABLE BODY DRIVE SYSTEM, PATTERN FORMATION METHOD, PATTERN FORMING APPARATUS, EXPOSURE METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

#123

20130033693

2013-02-07

Exposure method and device manufacturing method measuring position of substrate stage using at least three of four encoder heads

#124

20120290242

2012-11-15

COUNTING DEVICE, PHYSICAL QUANTITY SENSOR, COUNTING METHOD AND PHYSICAL QUANTITY MEASURING METHOD

#125

20120262721

2012-10-18

Arbitrary optical waveform generation utilizing optical phase-locked loops

#126

20120194824

2012-08-02

Interferometric heterodyne optical encoder system

#127

20120170048

2012-07-05

Interferometric encoder systems

#128

20120154812

2012-06-21

CMOS MOEMS sensor device

#129

20120133949

2012-05-31

Apparatus comprising a plurality of interferometers and method of configuring such apparatus

#130

20120050748

2012-03-01

Displacement detecting device

#131

20110299093

2011-12-08

Interferometer

#132

20110264398

2011-10-27

Fibre Optic Sensor System

#133

20110255096

2011-10-20

Interferometric encoder systems

#134

20110249270

2011-10-13

HETERODYNE INTERFEROMETRY DISPLACEMENT MEASUREMENT APPARATUS

#135

20110228260

2011-09-22

System and method for measuring an optical fiber

#136

20110188047

2011-08-04

Enhanced sensitivity interferometric sensors

#137

20110157599

2011-06-30

Uses of electromagnetic interference patterns

#138

20110102756

2011-05-05

Exposure apparatus and device manufacturing method measuring position of substrate stage using at least three of four encoder heads

#139

20110068731

2011-03-24

Linear encoder, linear motor system, and method of manufacturing linear encoder

#140

20110032959

2011-02-10

Counting device, physical quantity sensor, counting method and physical quantity measuring method

#141

20110026006

2011-02-03

Exposure apparatus, exposure method, and device manufacturing method measuring position of substrate stage by switching between encoder and interferometer

#142

20100332171

2010-12-30

Counting device, physical quantity sensor, counting method, and physical quantity measuring method

#143

20100321666

2010-12-23

Movable body system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method

#144

20100296068

2010-11-25

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

#145

20100277743

2010-11-04

PHOTOREFRACTIVE INTERFEROMETER

#146

20100185409

2010-07-22

SIGNAL PROCESSING APPARATUS FOR COMPUTING POSITION OR ANGLE OF TARGET OBJECT

#147

20100097617

2010-04-22

Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels

#148

20100085992

2010-04-08

Arbitrary optical waveform generation utilizing optical phase-locked loops

#149

20090273767

2009-11-05

Movable body apparatus, exposure apparatus and pattern formation apparatus, and device manufacturing method

#150

20090244681

2009-10-01

Human-readable, bi-state environmental sensors based on micro-mechanical membranes

#151

20090135388

2009-05-28

Movable-body apparatus, exposure apparatus, exposure method, and device manufacturing method

#152

20090076768

2009-03-19

Absolute position measurement apparatus

#153

20090066964

2009-03-12

Displacement sensor based on photonic crystal waveguides

#154

20080297809

2008-12-04

Optical position measuring arrangement

#155

20080291457

2008-11-27

Optical displacement sensor

#156

20080165345

2008-07-10

Distance measuring interferometer and encoder metrology systems for use in lithography tools

#157

20080094594

2008-04-24

Movable body system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method

#158

20080062433

2008-03-13

Measuring apparatus sensitive to rotational but not translational or vibrational movement

#159

20070292071

2007-12-20

Isolated sensor housing

#160

20070288121

2007-12-13

Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method

#161

20070279640

2007-12-06

Displacement sensor

#162

20070223000

2007-09-27

Optical sensor

#163

20070146722

2007-06-28

Littrow interferometer

#164

20070070327

2007-03-29

Moiré interferometric strain sensor

#165

20070041019

2007-02-22

Rugged fabry-perot pressure sensor

#166

20070024857

2007-02-01

Fiber optic interferometric sensor array

#167

20060241889

2006-10-26

Multi-channel array processor

#168

20060193356

2006-08-31

Die level optical transduction systems

#169

20060192976

2006-08-31

Displacement-measuring optical device with orifice

#170

20060192974

2006-08-31

Interferometric MOEMS sensor

#171

20060181712

2006-08-17

Highly-sensitive displacement-measuring optical device

#172

20060103851

2006-05-18

Displacement sensor based on photonic crystal waveguides

#173

20060061768

2006-03-23

Low-coherence interferometry optical sensor using a single wedge polarization readout interferometer

#174

20050264825

2005-12-01

Sensor with cantilever and optical resonator

#175

20050195403

2005-09-08

Optical fiber sensors for harsh environments

#176

20050180678

2005-08-18

Optical waveguide displacement sensor

#177

20050029436

2005-02-10

Micro-position sensor using faraday effect

#178

18891376

2025-01-07

Grating displacement measurement device and method using double-layer floating reading head, medium, and apparatus

#179

14081325

2016-02-09

Optical fiber vibration sensor