OPTICAL SENSING ASSEMBLY AND ENCODER

OPTICAL SENSING ASSEMBLY AND ENCODER

HIGH SPEED SCANNING SYSTEM WITH ACCELERATION TRACKING

SCALE SUPPORT FOR AN ENCODER SCALE AND LINEAR ENCODER COMPRISING SUCH SCALE SUPPORT

REFLECTION-TYPE OPTICAL ENCODER SCALE INCLUDING A HIGH REFLECTION REGION AND A LOW REFLECTION REGION HAVING A LIGHT REFLECTION PORTION INCLUDING A CHROMIUM OXIDE FILM AND A CHROMIUM NITRIDE FILM, AND REFLECTION-TYPE OPTICAL ENCODER INCLUDING SAME

OPTICAL ENCODER SCALE, MULTIFACED OPTICAL ENCODER SCALE AND OPTICAL ENCODER

ABSOLUTE POSITION DETECTION DEVICE AND ABSOLUTE POSITION DETECTION METHOD

REFLECTION-TYPE OPTICAL ENCODER SCALE AND REFLECTION-TYPE OPTICAL ENCODER

SURFACE SHAPE MEASURING DEVICE AND SURFACE SHAPE MEASUREMENT METHOD

POSITION MEASUREMENT DEVICE

MEASUREMENT DEVICE, LITHOGRAPHY SYSTEM AND EXPOSURE APPARATUS, AND CONTROL METHOD, OVERLAY MEASUREMENT METHOD AND DEVICE MANUFACTURING METHOD

METHOD FOR APPLYING A MEASUREMENT SCALE TO A SURFACE OF A GUIDE CARRIAGE OF A LINEAR PROFILE RAIL GUIDE, MEASUREMENT SCALE FOR A LINEAR ENCODER, AND LINEAR ENCODER

OPTICAL ENCODER

High speed scanning system with acceleration tracking

Position detecting member

Reflection-type optical encoder scale including a high reflection region and a low reflection region having a low reflection portion including a metallic chromium film, a chromium oxide film, and a chromium nitride film, and reflection-type optical encoder including same

FACIAL SKIN DISORDER IDENTIFICATION SYSTEM

Encoder apparatus and readhead

DESKTOP HORIZONTAL JOINT ROBOT

Encoder apparatus with readhead having circuit board and a folded sheet-metal structure to support a light emitting element

Measurement device, lithography system and exposure apparatus, and control method, overlay measurement method and device manufacturing method

Position sensor for a mechanical device and operating method for operating said position sensor

HIGH SPEED SCANNING SYSTEM WITH ACCELERATION TRACKING

Linear encoder with thermal stabilization functionality

Position-measuring device having four scanning units and two measuring graduations

Scale and method of manufacturing the same

Grating measuring module and micro-displacement measurement device

Optical position measuring device

MEASUREMENT DEVICE

Optical displacement sensor for infusion devices

Absolute linear encoder

Position-measuring device

HIGH SPEED SCANNING SYSTEM WITH ACCELERATION TRACKING

OPTICAL ENCODER

Optical encoder system and method

ENCODER STRIP MOUNTING SYSTEM

Exposure apparatus and exposure method, and flat panel display manufacturing method

Optical encoder using two different wavelengths to determine an absolute and incremental output for calculating a position

Optical encoder and calculation method for calculating relative displacement between an encoder scale and an encoder head facing the scale

OPTICAL POSITION SENSING SYSTEM

Pen type drug injection device with absolute angular dose encoder mechanism

Measurement device, lithography system and exposure apparatus, and control method, overlay measurement method and device manufacturing method

Optical module and optical encoder comprising a dummy light receiving device formed between a light receiving device and a through hole in a sensor substrate

Plug gauge and associated system and method for taking multiple simultaneous diametric measurements

POSITION DETECTION METHOD, CONTROL METHOD, MANUFACTURING METHOD, POSITION DETECTION APPARATUS, ROBOT APPARATUS, OPTICAL DEVICE, AND NON-TRANSITORY RECORDING MEDIUM

Life detection device for encoder

Encoder system for position determination with inclined scale

Digital displacement sensor and displacement measuring method thereof

DETECTOR CALIBRATION

Exposure apparatus, manufacturing method of flat-panel display, device manufacturing method, and exposure method

Measured sensor distance correction

Three-dimensional coordinate measurement apparatus

Position detection apparatus that detects a position of an object by detecting light from a scale, and lithography apparatus, force sensor, and apparatus having force sensor including the position detection apparatus

Length measuring instrument, code, and code conversion method

Optical position-measuring device comprising two tracks each containing incremental graduations with integrated reference marks having aperiodic and periodic portions

Optical displacement sensor for infusion devices

Shadow-cast encoder apparatus with scale and readhead producing a fringe pattern on the detector with a specific harmonic distortion

Linear and rotary multitrack absolute position encoder and methods using the same

Encoder system for position determination with inclined scale

Scale attachment device and linear encoder

ADAPTIVE REFERENCE MARK DETECTION PROCESS

Position detection encoder and manufacturing method of position detection encoder

Tape measure

Semiconductor device and optical encoder comprising a light source driver to drive a light source based on signals from an incident light received first element and an incident light shielded second element

Measurement apparatus for outputting signals from an encoder that are time-division multiplexed

Position measuring device

Optical encoder system and method

Encoder apparatus, robot apparatus, and method for measuring gap

Optical encoder for detecting crown movement

ACTUATING DEVICE FOR A PARKING LOCK

Length measuring instrument, code, and code conversion method

DISPLACEMENT MEASUREMENT APPARATUS

Optical encoder and measurement device including the same

Systems and methods for speed estimation of contactless encoder systems

Linear encoder for a linear position measurement device having a stationary part and a moving part

Photoelectric encoder

Error compensation for coordinate measuring machines using a reference module

Sensor unit for position measurement

Encoder scale, method for manufacturing encoder scale, encoder, robot, and printer

Optical encoder

Displacement encoder

Method and system for compensating for accuracy errors of a hexapod

Exposure apparatus and exposure method, and flat panel display manufacturing method

System for measuring the position of a mechanical member

High speed scanning system with acceleration tracking

Optical displacement sensor for infusion devices

Motion encoder

Apparatus and method for reliably determining the position of an object

Displacement encoder

Electronic position encoder and method for reducing short range errors

Position-measuring device and method for operating a position-measuring device

Three-dimensional coordinate measurement apparatus

Encoder and signal processing circuit

Apparatus and method for providing a graphic representation or graphic representation sequence for detection by a detector

Measured sensor distance correction

Linear encoder force transducer

OPTICAL LINEAR ENCODER

Photoelectric encoder

Measurement device, lithography system and exposure apparatus, and control method, overlay measurement method and device manufacturing method

Length-measuring device

Method for detecting a reciprocal position between a cylinder and a piston of a piston-cylinder unit and a relative piston-cylinder unit

Three-dimensional coordinate measurement apparatus

Positioning measurement device and the method thereof

Linear gage

Length-measuring device

Photoelectric encoder having a two-level code pattern using three or more bit-combination patterns

Position detection apparatus, machine tool apparatus, and exposure apparatus

Adjusting emulated encoder frequencies

Encoder

Encoder

Encoder including an origin position detection function

Position-sensing system for vehicle seat

Telecentric photoelectric encoder including aperture in face of optical element

Position detection apparatus, lens apparatus, and image pickup apparatus

Encoder having light-receiving unit that includes light-receiving element array

Macro-micro composite grating ruler measuring system and measuring method using same comprising a macro-scale reading module, a micro-scale reading module and a measuring reference line

Optical encoder

Time grating linear displacement sensor based on alternating light field

System for determining positions with a sensor using a 2D-code pattern for determination of a discrepancy from an ideal situation

Apparatus having an encoder with an origin detection pattern

Reference mark detector arrangement

Position-measuring device

Position detection apparatus, lens apparatus, image pickup system, machine tool apparatus, exposure apparatus, position detection method, and non-transitory computer-readable storage medium which are capable of detecting reference position with high accuracy

Encoder having a detection head with a reference detection receiving grating and a phase compensation receiving grating

Cylinder-piston unit and method of detecting continuously the reciprocal position between cylinder and piston of such unit

Optical encoder comprising an origin point detection scale having an origin point detection pattern

Optical encoder

Optical position measuring device for generating wavelength-dependent scanning signals

Linear encoder

Position detector, and lens apparatus and image pickup apparatus including the position detector

Pen type drug injection device with absolute angular dose encoder mechanism

Device with displaceable device part, in particular coordinate measuring device or machine tool

Absolute encoder that provides increased accuracy against defect in scale thereof

Displacement detecting device

Metrological scale

Linear encoder having calibration functionality

Encoder and sensor system having plural sensors and encoder elements for determining relative positions

Linear encoder

Cart movement detection system for a dynamics track

Optical encoder

Angular and axial position sensor arrangement

Encoder, motor with encoder, and servo system

ENCODER, MOTOR WITH ENCODER, AND SERVO SYSTEM

Encoder, motor with encoder, and servo system

Selector lever arrangement for operating a transmission in a motor vehicle

Absolute position measurement method, absolute position measurement apparatus and scale

Position detecting apparatus, and lens apparatus, image reading apparatus, and image forming apparatus including the same

Photoelectric encoder having an interference pattern signal processing unit detects the pseudo-random data of the absolute pattern of an absolute scale

Measurement tape for an elevator device

Contact displacement meter

Two-dimensional encoder system and method

Scale for photoelectric encoder

Position detection encoder

Position detection apparatus having a determining unit to determine the reliability of calculated position of a movable member

Linear encoder and method of adjusting a gap between a sensor unit and a scale of the linear encoder

Passive feeder cartridge driven by pickup head

Exposure apparatus and exposure method thereof

Separate linear encoder

Displacement detecting device and scale

Device and method for calculating absolute amount of displacement, and method for same

Position measuring system

Optical displacement sensor for infusion devices

Encoder, lens apparatus, and camera capable of detecting position of object

Continuous piston flow meter

Machine tools which compensate for thermal deformation

Encoder and apparatus using the same

Displacement measurement device, displacement measurement method, and displacement measurement program

Position-measuring device and system having such a position-measuring device

Photoelectric encoder

System having a plurality of scanning units of a position measuring device

Photoelectric encoder including light-receiving element and light-blocking layer that forms light-blocking portion and light-transmitting portion on light-receiving element

Optical encoder and apparatus including the same

Optical potentiometer having an optical element with optical property continuously varying along a moving direction and operating device

Photosensor for position detecting device, position detecting device using same and position detecting method

OPTICAL ENCODER INCLUDING PASSIVE READHEAD WITH REMOTE CONTACTLESS EXCITATION AND SIGNAL SENSING

Optical encoder having a scale comprising a light guiding portion with reflection surfaces and a light guiding function

Linear position measuring system and method for determining the absolute position of a carriage along a slide rail

Position measuring device

Measuring device for a telescopic handling arm

Encoder

Displacement sensor using multiple position sensitive photodetectors

Encoder having plural phase acquirers and a positional information acquirer for precisely obtaining a position of a scale

Encoder having a scale with two areas in which an increasing direction of the amplitude of the energy distribution is opposite between the two areas for precisely obtaining a position of the scale

Optical displacement measurement device with optimization of the protective film

Optical encoder with a scale that has fine and coarse pitch patterns

Optical encoder having a high resolution detection mode to detect a fine pitch pattern and a low resolution detection mode to detect a coarse pitch pattern

SERVO MOTOR MANUFACTURING METHOD, SERVO MOTOR MANUFACTURING APPARATUS, SERVO MOTOR, AND ENCODER

Remote displacement sensor, including an optical strain gauge, an assembly and system therewith

Displacement measuring apparatus

Two dimensional encoder system and method

One-dimension position encoder

Position detection device

Scanning microscope

Encoder that detects positional information of a moving body generating interference fringes that move in opposite directions

Photoelectric encoder

Device for interferential distance measurement

Displacement detection apparatus and method of correcting error of scale used for displacement detection apparatus

Image forming apparatus and method of measuring linear speed

Encoder that optically detects positional information of a moving body from different optical paths lengths

Optical encoder device comprising a moveable slit plate and a stationary slit plate

Metrological scale

Position sensing of a piston in a hydraulic cylinder using a photo image sensor

Encoder capable of compensating for tilt, hard disk drive using the same, and servo track writing system for the hard disk drive

High resolution single track optical encoder

Folded Optical Encoder and Applications for Same

OPTICAL POSITION DETECTING APPARATUS AND OPTICAL APPARATUS

Encoder signal processor, encoder signal processing method, and transport apparatus

Optical encoder

Encoder in which the relative displacement between the encoder scale and encoder head is detected

MOBILE POSITIONING STRUCTURE FOR AN AXIAL ROD MOTOR

Position device in gantry type of construction

Pivot Joint Assembly

Encoder home position sensing method and system

Reflection type encoder, scale thereof and method for producing scale

Stage device, pattern formation apparatus, exposure apparatus, stage drive method, exposure method, and device manufacturing method

Position measuring system and position measuring method, Movable body apparatus, movable body drive method, exposure apparatus and exposure method, pattern forming apparatus, and device manufacturing method

Metrology apparatus

Absolute position length measurement type encoder

Contact displacement meter

Optical displacement sensor for infusion devices

Method and Device for Position Sensing of an Optical Component in an Imaging System

IMAGE SCANNING APPARATUS, SHADING CORRECTION METHOD, AND SHADING CORRECTION PROGRAM

Single track optical encoder

Exposure apparatus, exposure method, and device manufacturing method having encoders to measure displacement between optical member and measurement mount and between measurement mount and movable body

Extendable Leg Assembly for Position Measurement Apparatus

Movable body system, pattern formation apparatus, exposure apparatus and measurement device, and device manufacturing method

Detecting An Encoder Material Reading Error

Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels

Linear Motion Position Sensor and Method of Use

Method and apparatus for determining the position of a vehicle, computer program and computer program product

Optical encoder and electronic equipment

Scanning unit for an optical position-measuring device

Absolute position encoder having a second incremental track integrated with the absolute track

Position detecting device capable of improving detection accuracy

SENSING DEVICE HAVING CAPACITIVE FORCE SENSOR

SENSING DEVICE HAVING CAPACITIVE FORCE SENSOR WITH SATURATED OUTPUT AT MINIMUM CAPACITANCE

Triple grating optical encoder and modified triple grating optical encoder for displacement detection

CAPACITIVE FORCE SENSOR HAVING SATURATED OUTPUT AT MINIMUM CAPACITANCE

Capacitive force sensor

Position detecting device for detecting the absolute value of a position of a movable member which has a sensor mounted thereon

Image-forming device

Optical encoder and optical lens module

Relative position detection device and detector for rotary body and image forming apparatus including the relative position detection device

Scale and readhead apparatus

Reversing linear drive comprising means for detecting an armature position

Wireless encoder

Reflection-based optical encoders having no code medium

Optical encoder

Photoelectric encoder having multiple light-receiving elements

Securing device for transporting and mounting a measurement instrument

Method for attaching a scale to a carrier, a scale, and carrier having a scale

Photoelectric encoder capable of effectively removing harmonic components

Mark detector using multiple light beams for use in a displacement detector and an image forming apparatus

Longitudinal adjuster, including a position recognizer, for a vehicle seat

Device and method for mounting a position measuring device onto a machine tool, and position measuring system

Arrangement for fastening a support of a scale and method for fastening the support, as well as a linear measuring device

Slide control device

Method and probe for determining displacement

Encoder device

Encoder device for detecting movement

Optical encoder having reference position detection

Scanning unit for a position measuring device

Position measuring system with a scanning unit having a reference pulse signal detection unit

Protected length measuring system

Optical encoder

Displacement detector

Displacement detection apparatus

Cylinder with fiber optical position sensing device

Method and device for detection of oscillations by a position measuring system

Optical encoder

Mounting tool for linear encoders

Optical encoder having a light source scale and photodetector and an optical lens module using the optical encoder

Encoder design and use

Optical encoder for detecting rotational and axial movement