164895 ⎘
Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infra-red, visible, or ultra-violet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells; Forming the light into pulses by diffraction gratings
FIBER OPTIC SENSOR AND MEASUREMENT METHOD, APPARATUS AND STORAGE MEDIUM
#2PHOTOELECTRIC DETECTION DEVICE AND OPTICAL ENCODER
#3OPTICAL POSITION-MEASURING DEVICE
#4SELF-CORRECTING ASSEMBLABLE OPTICAL FIBER SENSING SYSTEM FOR DISPLACEMENT FIELD AND CORRECTION METHOD THEREOF
#5OPTICAL ENCODER
#6Performance Monitoring System For Disc Cutter Of Tunnel Boring Machine
#7Optical Displacement Sensor
#8Measurement device and measurement method, exposure apparatus and exposure method, and device manufacturing method
#9Heterodyne two-dimensional grating measuring device and measuring method thereof
#10Displacement measuring apparatus, displacement measuring method and photolithography device
#11Scale and method of manufacturing the same
#12Optical encoder and control apparatus for receiving light that forms moire fringes from a grating pattern
#13Optical position measuring device
#14Cantilever linear motion reference device employing two-layer air suspension
#15Optical displacement sensing system
#16Smooth surface diffraction grating lens and method for manufacturing the same
#17Two-dimensional position encoder
#18Optical position-measurement device with varying focal length along a transverse direction
#19Optical rotary encoder
#20Position encoder
#21OBJECT DETECTION DEVICE AND PHOTODETECTOR
#22Detection device
#23GRATING DISC AND FEEDBACK SYSTEM
#24Optical encoder system and method
#25Optical position-measuring device
#26MEASUREMENT DEVICE AND MEASUREMENT METHOD, EXPOSURE APPARATUS AND EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
#27Exposure apparatus, flat panel display manufacturing method, and device manufacturing method
#28Method and Apparatus For Configurable Photodetector Array Patterning For Optical Encoders
#29Displacement detection device
#30Optical displacement sensing system
#31Optical angle sensor
#32Measurement device and measurement method, exposure apparatus and exposure method, and device manufacturing method
#33Contamination and defect resistant rotary optical encoder configuration including a rotary scale with yawed scale grating bars and structured illumination generating arrangement with a beam deflector configuration
#34Indexed optical encoder
#35SCALE AND MANUFACTURING METHOD OF THE SAME
#36Optical encoder system and method
#37Two-dimensional position encoder
#38Scale and manufacturing method of the same
#39Displacement sensor device and system
#40Optical rotation angle measuring system
#41Optical encoder and measurement device including the same
#42Measurement method and encoder device, and exposure method and device
#43Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method
#44Scanning reticle including a grating formed in a substrate for an optical position measuring device
#45Displacement encoder
#46Method and apparatus for configurable photodetector array patterning for optical encoders
#47Measurement method and encoder device, and exposure method and device
#48Encoder apparatus that includes a scale and a readhead that are movable relative to each other configured to reduce the adverse effect of undesirable frequencies in the scale signal to reduce the encoder sub-divisional error
#49Optical element
#50Position-measuring device
#51Encoder device, method for measuring moving amount, optical apparatus, exposure apparatus, exposure method and method for producing device
#52Optical position-measuring device
#53Measurement device and measurement method, exposure apparatus and exposure method, and device manufacturing method
#54Transparent-block encoder head with isotropic wedged elements
#55Optical encoding device including an encoding disc having diffracting patterns
#56DISPLACEMENT MEASURING DEVICE AND METHOD OF MEASURING DISPLACEMENT
#57Encoder head with birefringent elements for forming imperfect retroreflection and exposure system utilizing the same
#58Displacement detecting device
#59Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method
#60Displacement detection apparatus
#61Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method
#62Encoder, position measurement system and lithographic apparatus involving an enclosing device
#63Position detector, position detection method, imprint apparatus, and product manufacturing method
#64Optical system with a frustrated isotropic block
#65Position detection apparatus, machine tool apparatus, and exposure apparatus
#66Scale and position-measuring device having such a scale
#67Optical position-measuring device having grating fields with different step heights
#68Encoder including an origin position detection function
#69Optical layer system
#70Displacement detecting device
#71Displacement detecting device by light retroreflectance having first and second retroreflecting units with a common light receiving unit
#72Displacement sensor device and system
#73Optical encoder
#74Light source array used in an illumination portion of an optical encoder
#75Measurement encoder
#76Optical position-measuring device
#77Reference mark detector arrangement
#78Displacement detection apparatus
#79Optical unit and displacement measuring device
#80Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method
#81Illumination portion for an optical encoder
#82Optical encoder
#83Displacement measurement device and displacement measurement method
#84Interferometric encoder systems having at least partially overlapping diffracted beams
#85Method of assisted mounting and error compensation for absolute grating ruler
#86Heterodyne grating interferometer displacement measurement system
#87Position measurement system, grating for a position measurement system and method
#88Optical element
#89Double pass interferometric encoder system
#90Displacement detecting device
#91Optical encoder and apparatus provided therewith
#92Dual-frequency grating interferometer displacement measurement system
#93Stage system and lithographic apparatus comprising such stage system
#94Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method
#95Measurement method and encoder device, and exposure method and device
#96Position-measuring device
#97Device for position determination
#98Encoder head designs
#99Measuring graduation and photoelectric position measuring device having the same
#100Optical position-measuring device
#101Optical position measuring device
#102Detection apparatus, lithography apparatus and method of manufacturing article
#103Two-dimensional encoder system and method
#104Position detection apparatus, imprint apparatus, and position detection method
#105Reference signal generation apparatus and reference signal generation system
#106Reference signal generation apparatus and reference signal generation system
#107Optical position-measuring device
#108Displacement detecting device and scale
#109Optical position-measuring device
#110Position-measuring device
#111Position detector and light deflection apparatus
#112Servomotor production method, servomotor production device, servomotor, and encoder
#113Displacement detection apparatus
#114Displacement measurement apparatus and displacement measurement method
#115Interferometric encoder systems
#116Position-measuring device
#117Non-harmonic cyclic error compensation in interferometric encoder systems
#118Multiple wavelength configuration for an optical encoder readhead including dual optical path region with an optical path length difference
#119Displacement measurement device, displacement measurement method, and displacement measurement program
#120System for detecting motion, lithographic apparatus and device manufacturing method
#121Position-measuring device and system having a plurality of position-measuring devices
#122Encoder, servomotor, and motor unit
#123Encoder device, method for measuring moving amount, optical apparatus, exposure apparatus, exposure method and method for producing device
#124Measurement system of a light source in space
#125Compact encoder head for interferometric encoder system
#126Double pass interferometric encoder system
#127Displacement detecting device, displacement detecting method, and computer-readable medium
#128Detector, imprint apparatus, and article manufacturing method
#129Rotary position measuring instrument
#130Measurement system and method utilizing high contrast encoder head for measuring relative movement between objects
#131Index error estimating apparatus, index error calibrating apparatus, and index error estimating method
#132Method for working out the angular position of a rotating element and device for carrying out such a method
#133OPTICAL ENCODER INCLUDING PASSIVE READHEAD WITH REMOTE CONTACTLESS EXCITATION AND SIGNAL SENSING
#134Optical encoder having a scale comprising a light guiding portion with reflection surfaces and a light guiding function
#135Position detection apparatus, imprint apparatus, and position detection method
#136Optical encoder including displacement sensing normal to the encoder scale grating surface
#137Position measuring device
#138ENCODER
#139Optical position-measuring device
#140Displacement detecting device with a polarization change to a twice-diffracted beam
#141Absolute position encoder
#142Optical displacement measurement device with optimization of the protective film
#143Interferometric measurement of displacement in axial direction of a grating
#144Optical encoder with misalignment detection and adjustment method associated therewith
#145Remote displacement sensor, including an optical strain gauge, an assembly and system therewith
#146Interferometric encoder systems
#147Optical encoder readhead configuration with phosphor layer
#148Interferometric path and/or rotation measuring device
#149Optical position-measuring device
#150Optical position measuring instrument
#151Cyclic error compensation in interferometric encoder systems
#152Optical position-measuring device having two crossed scales
#153Optical angle-measuring device with combined radial-circular grating
#154Imaging apparatus
#155Displacement detecting device
#156Two dimensional encoder system and method
#157Position detection device
#158Displacement detecting device
#159Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method
#160Encoder, servo unit and encoder manufacturing method
#161Optical position measuring instrument
#162Encoder that detects positional information of a moving body generating interference fringes that move in opposite directions
#163Interferometric encoder systems
#164HETERODYNE INTERFEROMETRY DISPLACEMENT MEASUREMENT APPARATUS
#165Device for interferential distance measurement
#166Photoelectric encoder
#167OPTICAL ENCODER AND DISPLACEMENT MEASUREMENT APPARATUS HAVING THE SAME
#168Encoder that optically detects positional information of a moving body from different optical paths lengths
#169Optical position-measuring device
#170Uses of electromagnetic interference patterns
#171Position-measuring device
#172Displacement measurement device, exposure apparatus, and working device
#173Signal processing apparatus used for optical signal output device and optical displacement detection system
#174Lithographic apparatus and device manufacturing method
#175Optical position measuring device
#176Photoelectric encoder with optical grating
#177Rotary encoder, rotary motor, rotary motor system, disk, and method of manufacturing rotary encoder
#178Optical encoder for obtaining displacement information of object
#179Angle sensor, system and method employing guided-mode resonance
#180Displacement measurement system and method thereof
#181DISPLACEMENT DEVICE WITH PRECISION MEASUREMENT
#182Cylindrical grating rotation sensor
#183Optical encoder for detecting the relative displacement between an encoder scale and an encoder head
#184Optical encoder and method for measuring displacement information using multiple optical tracks of diffractive optical regions having different periodicities
#185Origin detection apparatus, displacement measurement apparatus and optical apparatus
#186Scale, displacement detection apparatus provided with the same, and imaging apparatus provided with the same
#187Encoder that optically detects positional information of a movable body by changing a path length through periodic oscillation of an optical element
#188Optical encoder
#189Displacement measurement apparatus
#190Optical encoder comprising a main and reference light receiving portions with a three-phase signal generation for detecting displacement and direction of displacement of an incremental grating track
#191Displacement measurement system and method of use
#192Displacement measurement system having a prism, for displacement measurement between two or more gratings
#193Stage device, pattern formation apparatus, exposure apparatus, stage drive method, exposure method, and device manufacturing method
#194SCALE AND READHEAD
#195Compact Littrow encoder
#196ENCODER
#197Position measuring system and position measuring method, Movable body apparatus, movable body drive method, exposure apparatus and exposure method, pattern forming apparatus, and device manufacturing method
#198Non-contact displacement detecting device using optical astigmatism
#199Optical displacement measuring device
#200Optical encoder having a stray-light reduction element for reducing strat-light
#201Optical position measuring arrangement
#202Rotary encoder apparatus
#203Intensity-based optical encoder using digital diffractive optic regions
#204DETECTION SYSTEM FOR DETECTING TRANSLATIONS OF A BODY
#205Movable-body apparatus, exposure apparatus, exposure method, and device manufacturing method
#206Optical sensor
#207Position measurement system and lithographic apparatus
#208LOCK-IN DEMODULATION TECHNIQUE FOR OPTICAL INTERROGATION OF A GRATING SENSOR
#209Displacement-measuring optical scale and optical encoder using same
#210Fixed-point detector and displacement-measuring apparatus
#211System for detecting motion of a body
#212Surface reflection encoder scale and surface reflection encoder using the same
#213Displacement measurement sensor head and system having measurement sub-beams comprising zeroth order and first order diffraction components
#214Optical position measuring arrangement
#215Optical position-measuring device
#216Position-measuring device with movable deflection device and grating and with stationary grating, light source, and detector
#217Position-measuring device for measuring a position of an object relative to a tool having a tool centerpoint
#218Positional information detecting device
#219Triple grating optical encoder and modified triple grating optical encoder for displacement detection
#220Displacement measurement system
#221Rotary encoders
#222Encoder
#223Reflection Type Optical Detector
#224Position-measuring device
#225One-dimensional phase contrast microscopy with a traveling lens generated by a step function change
#226High Resolution position coder
#227Position-measuring device
#228Position measuring arrangement
#229Interferometric optical position encoder employing spatial filtering of diffraction orders for improved accuracy
#230Optical encoder applying substantially parallel light beams and three periodic optical elements
#231Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method
#232Rotary optical encoder employing multiple subencoders with common reticle substrate
#233Optical encoder including aperture with diffusion element and collimator lens
#234Fiber-optic miniature encoder for fine pitch scales
#235Scale reading apparatus
#236Optical position measuring arrangement
#237Encoder that optically detects positional information of a scale
#238Displacement measurement systems lithographic apparatus and device manufacturing method
#239Photoelectric encoder
#240Displacement detection apparatus, polarization beam splitter, and diffraction grating
#241Optical encoder
#242Optical encoder having slanted optical detector elements for harmonic suppression
#243Information carrier
#244Littrow interferometer
#245Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device
#246Methods and apparatus for reducing error in interferometric imaging measurements
#247Optical encoder for measuring displacement
#248Position-measuring device
#249Photoelectric encoder
#250Optical encoder and apparatus using optical encoder
#251Sensor device and stage device
#252Optical position measuring instrument
#253OPTICAL ENCODER HAVING SLANTED OPTICAL DETECTOR ELEMENTS FOR HARMONIC SUPPRESSION
#254Optical configuration for imaging-type optical encoders
#255Position-measuring device
#256Optical element, optical pickup device, and optical information recording and/or reproducing apparatus
#257Triple grating optical encoder with light transmitting area in optical path
#258Displacement detection apparatus, displacement measuring apparatus and fixed point detection apparatus
#259Displacement sensor employing discrete light pulse detection
#260Grating interference type optical encoder
#261Optical encoder for improved detection of the absolute position of an origin point
#262Optical encoders for position measurements
#263Displacement detection apparatus, displacement gauging apparatus and fixed point detection apparatus
#264Surface reflection type phase grating
#265Displacement detector
#266Displacement-measuring optical scale and optical encoder using same
#267Photoelectric encoder using an incoherent semiconductor light source
#268Position measuring system
#269Position-measuring device
#270Sensor using roof mirror/roof prism array scale, and apparatus equipped with the sensor
#271Encoder scale error compensation employing comparison among multiple detectors
#272Digital measuring head
#273Scale for reflective photoelectric encoder and reflective photoelectric encoder
#274Photoelectric encoder and method of manufacturing scales
#275Optical position encoder device using incoherent light source
#276Passive positioning sensors
#277Optical position measuring device
#278Optical displacement sensor and optical encoder
#279Optical displacement sensor and optical encoder
#280Apparatus for detecting displacement
#281Optical encoders for position measurements
#282Optical position measuring system
#283Interferometric miniature grating encoder readhead using fiber optic receiver channels
#284Position-measuring device
#285Optical displacement sensor and external force detecting device
#286Methods and apparatus for reducing error in interferometric imaging measurements
#287Optical encoder
#288Photoelectric encoder
#289Systems and methods for evaluating coupled components