165086 ⎘
Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects; Structural arrangements; Mounting of elements, e.g. in relation to fluid flow Micromachined devices
PORTABLE SPIROMETER
#2THERMAL FLOW SENSOR FOR DETERMINING A FLOW RATE OF A FLUID
#3SENSOR ARRANGEMENT
#4SENSOR ASSEMBLY
#5SENSOR
#6FLUID FLOW SENSING APPARATUS AND RELATED METHOD
#7DEVICE FOR CONTROLLING OR MEASURING A FLUID
#8OMNIDIRECTIONAL FLOW SENSOR
#9APPARATUS AND METHOD OF MEASURING AIR CURRENTS ON SURFACE OF SUBSTRATE
#10Physical Quantity Detection Device
#11PACKAGED FLOW SENSOR
#12Thermal flow meter
#13PORTABLE SPIROMETER
#14Thermopile sensor
#15Sweat rate measurement devices
#16Micromachined thermal time-of-flight fluidic concentration metering device
#17Sensor
#18Flow sensing device
#19Flow sensor
#20Flow rate measurement device
#21Microneedle probe for measuring sap flow of plant, and sap flow measuring device having same
#22Flow sensing device
#23SMART DEVICE FOR FUEL CYLINDER
#24Mass flow control based on micro-electromechanical devices
#25Micro-electromechanical device for use in a flow control apparatus
#26Gas meter with thermal time-of-flight sensing
#27Flow sensing device
#28Gas meter with gas thermal property measurement and auto-compensation
#29THERMAL MASS FLUID FLOW SENSOR
#30FLOW SENSOR WITH SELF HEATING SENSOR ELEMENTS
#31Physical quantity measurement device and method for manufacturing physical quantity measurement device
#32Physical quantity measurement device
#33Physical quantity measurement device
#34Flow rate measurement device and embedded gas meter
#35Flow sensor
#36Sensor assembly
#37Multi-purpose MEMS thermopile sensors
#38Sweat rate measurement devices
#39Thin film thermal mass flow sensor in fluid applications
#40Multi-purpose MEMS thermopile sensors
#41Method for forming micromachined liquid flow sensor
#42Thermal flow meter including a cover mounted on a housing and where a bypass passage is formed by the cover and a bypass passage trench
#43Thermoresistive gas sensor
#44CMOS thermal fluid flow sensing device employing a flow sensor and a pressure sensor on a single membrane
#45Sensor element and thermal flow sensor for determining a physical variable of a measurement medium
#46Thermally insulated microsystem
#47A THERMAL FLUID FLOW SENSOR
#48Thermoresistive gas sensor
#49MASS AIR FLOW SENSOR WITH ABSOLUTE PRESSURE COMPENSATION
#50Airflow sensor with gas composition correction
#51Embedded sensor module and sensing device
#52Thermal airflow sensor
#53Thermal flow meter including a cover mounted on a housing and where a bypass passage is formed by the cover and a bypass passage trench
#54Flow rate sensor having temperature detectors and heat element provided on different insulator layers of diaphragm part
#55Flow measuring device
#56Mass flow sensor module and method of manufacture
#57Measuring device
#58Microneedle probe for measuring sap flow of plant, and sap flow measuring device having same
#59Air mass flow meter
#60Method for determining a flow rate and/or a flow velocity of a medium
#61Digital regulated gas dispensing apparatus with a MEMS mass flow meter
#62Smart Electronic Vaporizer
#63MEMBRANE-BASED THERMAL FLOW SENSOR DEVICE
#64Composite MEMS flow sensor on silicon-on-insulator device and method of making the same
#65Generating power from pressurized fuel gas for use on a gas meter
#66Thermal airflow sensor
#67Thermal airflow measuring device
#68Electronic device with integrated temperature sensor and manufacturing method thereof
#69Thermal-Type Flow Rate Sensor
#70Flow sensor heater circuit calibration
#71Sensor arrangement for determining at least one parameter of a fluid medium flowing through a channel structure
#72Resin molding and sensor device
#73Flow measuring device having plurality of bending portions
#74Integrated circuit (IC) chip with a self-contained fluid sensor and method of making the chip
#75GAS FLOW SENSOR HOUSING AND ASSEMBLY PROVIDING REDUCED TURBULENCE
#76Flow measuring device measuring air flow through a bypass passage throttled by a throttle portion
#77Microfluidic flow sensor
#78Thermal flow meter
#79Thermal flow meter with a case having an external terminal for outputting an electric signal
#80Thermal flow meter including a cover mounted on a housing and where a bypass passage is formed by the cover and bypass passage trench
#81Vortex flow meter with micromachined sensing elements
#82Sensor device
#83Thermal flow meter
#84Thermal fluid flow sensor
#85Sensor for determining at least one parameter of a fluid medium flowing through a measurement channel
#86Flow sensing module
#87Air flow rate adjusting apparatus
#88Physical-quantity detection device
#89FLOW SENSOR WITH SELF HEATING SENSOR ELEMENTS
#90Flow sensor
#91Thermal flow meter with thin resin portion sealing temperature detection element
#92REMOVABLE HIGH FLOW IMPEDANCE MODULE IN FLOW SENSOR BYPASS CIRCUIT
#93COMPOSITE MEMS FLOW SENSOR ON SILICON-ON-INSULATOR DEVICE AND METHOD OF MAKING THE SAME
#94MEMS flow sensor
#95Sensor element, sensor module, measuring assembly and exhaust-gas re-circulation system comprising a sensor element of this type, and production method
#96Flow sensor
#97Air flow rate measurement device
#98Apparatus and method for determining flow of a medium
#99Flow rate meter
#100Gaseous fuel monitoring for wellsite pumps
#101Measuring device and method for determining a corrected mass flow and uses of the measuring device
#102Thermal-type flow-rate sensor
#103MEMS thermal flow sensor with compensation for fluid composition
#104Gas sensor device
#105Air mass flow meter
#106Sensor with metal substrate and dielectric membrane for determining a process variable of a medium
#107Thermal mass flowmeter
#108Determination of fluid composition in a mass flow controller
#109Flow sensor package
#110Physical quantity measuring device
#111Adhesive sheet, method for manufacturing semiconductor device using same, method for manufacturing thermal airflow sensor using same, and thermal airflow sensor
#112Vacuum-cavity-insulated flow sensors
#113Differential flow-meter for measuring the weight loss in haemodialysis treatments
#114Air flow measuring device
#115Flow sensor and manufacturing method for the same
#116Physical quantity sensor
#117Thermal airflow sensor
#118Thermal air flow sensor
#119Air mass sensor
#120Air mass meter with a sensor element
#121Air mass flowmeter
#122Flow sensor with a housing that accommodates an auxiliary channel having an opening into which a fluid to be measured is taken
#123Thermal flow meter with temperature detection element positioned on protrusion of circuit package
#124Thermal flow meter
#125Thermal flow meter with diaphragm forming a reduced pressure sealed space
#126Thermal flow meter including fixation wall and concave recess portion for storing end of supporting body
#127Thermal flow meter including a protrusion protruding from a circuit package body and a temperature detection element buried in the protrusion
#128Thermal airflow sensor having a diaphragm with a cavity opening on the back side and a support member including a communicating hole
#129Thermal flow meter with a protrusion having an orifice surface and recovery surface provided on a wall surface of a bypass passage
#130Thermal flow meter
#131Thermal flow meter capable of measuring flow rates in forward flow and reverse flow directions
#132Thermal flow meter with a circuit package having an air flow measurement circuit for measuring an air flow
#133Thermal flow meter
#134Thermal flow meter with bypass passage including an outer circumference path and an inner circumference path
#135Thermal flow meter with thin resin portion sealing temperature detection element
#136Flow sensor
#137Thermal flow meter including a cover mounted on a housing and where a bypass passage is formed by the cover and a bypass passage trench
#138Thermal flow meter with drainage passage at inlet of bypass passage
#139Thermal flow meter with lead having a bent portion
#140Flow sensor and method for manufacturing the same
#141Airflow measuring device
#142Gaseous flow sensor and related method thereof
#143Sensor device for determining at least one parameter of a fluid medium flowing through a duct
#144Temperature compensation module for a fluid flow transducer
#145Air flow measuring device
#146Thermal airflow measuring device
#147Sensor system
#148Method for operating an air mass sensor
#149Electronic device with integrated temperature sensor and manufacturing method thereof
#150Sensor for detecting the mass flow rate and the temperature of a fluid flow
#151Air flow rate adjusting apparatus
#152Flow rate measuring device with first temperature sensor in a main passage and second temperature sensor in a sub-passage
#153Airflow measuring apparatus including a ventilation hole between a connector part and a circuit chamber
#154Flow sensors with modular microfluidic channels and methods of manufacture
#155Micromachined mass flow sensor with condensation prevention and method of making the same
#156Method of manufacturing the thermal fluid flow sensor
#157Thermal air flow meter
#158Membrane-based sensor device with non-dielectric etch-stop layer around substrate recess
#159Flow sensor and manufacturing method of the same and flow sensor module and manufacturing method of the same
#160Flowmeter
#161Miniaturized sensor comprising a heating element, and associated production method
#162Measurement arrangement having electrically heated resistors arranged in gas paths
#163MEMS utility meters with integrated mass flow sensors
#164Flow sensor and manufacturing method of the same and flow sensor module and manufacturing method of the same
#165Flow rate measuring device
#166Vacuum cavity-insulated flow sensors
#167Measuring substrate, substrate treatment apparatus and substrate treatment apparatus operation method
#168Micro flow sensor
#169Flow sensor assembly with integral bypass channel
#170Gas meter
#171Flow measurement structure and flow measurement device
#172Flow rate detection device
#173Thermal flowmeter
#174Hot-wire sensor of submillimeter size and associated method of production
#175Air flow measuring device
#176SENSOR ELEMENT WITH ENGINEERED SILICIDE
#177Air mass flow meter
#178MEMS airflow sensor die incorporating additional circuitry on the die
#179Airflow measuring device
#180Air mass meter
#181Air flow measuring device having preventive measures of preventing temperature sensor from damage during insertion
#182AIR FLOW MEASURING DEVICE
#183THERMAL-BASED FLOW SENSING APPARATUS AND METHOD FOR HIGH-PERFORMANCE LIQUID CHROMATOGRAPHY
#184Flow sensors and flow sensing methods with extended linear range
#185FLOWRATE SENSOR AND FLOWRATE DETECTION DEVICE
#186Sensor system for determining at least one flow property of a fluid medium flowing in a main flow direction
#187Heat conduction-type sensor for calibrating effects of temperature and type of fluid, and thermal flow sensor and thermal barometric sensor using this sensor
#188Thermal-based flow sensing apparatuses and methods for high-performance liquid chromatography
#189Flow meter and use thereof for determining a flow of a medium, as well as a method therefor
#190Modular sensor assembly including removable sensing module
#191Thermal type flow sensor having bridge circuit and adjustment circuit
#192Thermal fluid flow sensor and method of manufacturing the same
#193IN VIVO FLOW SENSOR
#194Flow sensors having nanoscale coating for corrosion resistance
#195Thermal flow sensor
#196Flow sensor with enhanced flow range capability
#197Flow sensor assembly with integral bypass channel
#198Sensor with improved thermal stability
#199Flow sensing device and packaging thereof
#200Sensor bridge with thermally isolating apertures
#201Flow rate detection device having anti-undercurrent material
#202Thermal air flow sensor
#203High accuracy battery-operated MEMS mass flow meter
#204Integrated micromachining air flow path clog sensor
#205Micro-package for Micromachining Liquid Flow Sensor Chip
#206Flow rate measuring apparatus having stress reducing means
#207Air flow rate measuring device
#208Integrated micro-machined air flow velocity meter for projectile arms
#209Integrated micromachined wind and gas velocity profiler
#210THERMAL DIFFUSIVITY MEASURING SYSTEM, CONCENTRATION OF CALORIC COMPONENT MEASURING SYSTEM, AND FLOW RATE MEASURING SYSTEM
#211ROBUST SENSOR WITH TOP CAP
#212Flow sensors having nanoscale coating for corrosion resistance
#213Method and apparatus for anti-fouling an anemometer
#214COMPOSITE GAS FLUID FLOW MEASURING METHOD AND ITS DEVICE
#215Thermal type flow sensor having a humidity detection portion and an air flow detecting portion
#216Heating Resistance Type Air Flow Rate Measuring Device
#217Flow sensor including a base member with a resilient region forming a flow channel and a cover member covering the flow channel
#218Hot-film air-mass meter having a flow separating element
#219Robust micromachined thermal mass flow sensor with double side passivated polyimide membrane
#220Thermal flow meter
#221Flow measuring device
#222Flow sensor device having a gap formed between a sensor device and an engaging portion and a pooling portion formed in the gap
#223Three dimensional air flow sensors for data center cooling
#224Shear stress sensors
#225A THERMAL PUMP
#226Thermal flow meter measuring flow rate based on temperature difference measurement and driving energy of the heater
#227Thermal humidity sensor
#228Sensor in a moulded package and a method for manufacturing the same
#229Hot film air mass meter and method for its manufacture
#230Thermal type flow sensor
#231Thermal mass flow meter including heating element and temperature sensors formed on separate chips and secured to the outer periphery of the pipe
#232Flow sensing device including a tapered flow channel
#233Thermal anemometer flow sensor apparatus with a seal with conductive interconnect
#234Thermal fluid flow sensor having stacked insulating films above and below heater and temperature-measuring resistive elements
#235SENSOR, SENSOR TEMPERATURE CONTROL METHOD AND ABNORMALITY RECOVERY METHOD
#236Thermal type fluid flow sensor with metal film resistor
#237Calorimetric flow meter having high heat conductivity strips
#238FLOW SENSOR
#239Flow Sensor and Method of Fabrication
#240Air flow meter
#241Flow meter and flow volume controlling device
#242Artificial lateral line
#243Semiconductor sensor having heater on insulation film and manufacturing method of the same
#244Hot-film air mass meter having frequency-modulated signal detection
#245Flowmeter
#246Film Resistor in Exhaust-gas Pipe
#247Thermal type flowmeter
#248Sensor device
#249Circuit arrangement to adjust and calibrate a MEMS-sensor device for flow measurement of gases or liquids
#250Flow sensor with metal film resistor
#251Chemical impedance detectors for fluid analyzers
#252Integrated micromachined thermal mass flow sensor and methods of making the same
#253Micromachined thermal mass flow sensor with self-cleaning capability and methods of making the same
#254MEMS structure for flow sensor
#255Robust MEMS flow die with integrated protective flow channel
#256Venturi flow sensor
#257Air flow measuring instrument having dust particle diverting structure
#258Fluid flow rate sensor and method of operation
#259THERMAL FLOW MEASUREMENT SYSTEM AND METHOD
#260Flow sensor unit including an insulating member interposed between the sensor chip and the attachment plate
#261Flow sensor and manufacturing method therefor
#262Self diagnostic measurement method to detect microbridge null drift and performance
#263Configuration and methods for manufacturing time-of-flight MEMS mass flow sensor
#264Shell flow sensor
#265Micromachined gas and liquid concentration sensor and method of making the same
#266Reduced resistance thermal flow measurement device
#267Thermal flowmeter
#268Flow sensor chip
#269Flow sensor element and its self-cleaning
#270Thermal type flow rate measuring apparatus
#271Flow detector device with self check
#272Integrated surface-machined micro flow controller method and apparatus
#273Air flow measuring device provided with a vent in air passage
#274Semiconductor device having impurity-doped resistor element
#275Thermal type fluid flow sensor
#276Apparatus For Determining the Amount of Milk Breast-Fed to a Baby by Convective Heat Transfer
#277Semiconductor device for detecting flow rate of fluid
#278Microelectronic flow sensor packaging method and system
#279Thermal type flow rate measurement apparatus
#280Microfabricated temperature sensor
#281Hot-wire nano-anemometer
#282Gas-energy observatory with Wobbe-index
#283Concept for detecting a change of a physical quantity by means of a conductor structure
#284Artificial lateral line
#285Thermal type gas flow meter
#286Thermal gas flow and control device for internal-combustion engine using the same
#287LOW POWER SILICON THERMAL SENSORS AND MICROFLUIDIC DEVICES BASED ON THE USE OF POROUS SEALED AIR CAVITY TECHNOLOGY OR MICROCHANNEL TECHNOLOGY
#288Microfabricated pressure and shear stress sensors
#289Method of fabricating an artificial haircell
#290Thermal type flow sensor with a constricted measuring passage
#291Thermal type flow rate measuring apparatus having decrease in coupling capacitance between wiring portions of detection element
#292THERMAL FLOW SENSOR HAVING STREAMLINED PACKAGING
#293Method of making a plurality of flow sensors
#294Flow sensor and throttle structure
#295Flow detector element of thermosensible flow sensor
#296Flow sensor transducer with dual spiral wheatstone bridge elements
#297Environmental sensor
#298Method and device for testing the measuring value of at least one level sensor arranged in a fuel tank
#299Flip-chip flow sensor
#300Flow sensor with thermocouples