166144 ⎘
Pyrometry error detection sensor for RTP temperature control system
#2Passive millimeter wave radiometer system for calibration of infrared cameras
#3Apparatus and method for online and real-time detection of temperature of epitaxial wafer
#4Device for measuring heat radiation of object to be measured, method for measuring heat radiation of object to be measured, and cell for measuring heat radiation
#5Maximum blade surface temperature estimation for advanced stationary gas turbines in near-infrared (with reflection)