166267 ⎘
Radiation pyrometry, e.g. infrared or optical thermometry using absorption; using extinction effect Interferences, i.e. fringe variation with temperature
ETALON THERMOMETRY FOR PLASMA ENVIRONMENTS
#2Etalon thermometry for plasma environments
#3Method and system comprising entrance optics, interferometer, and transformation layer for detection of electromagnetic radiation
#4Heat-flux measuring method, substrate processing system, and heat-flux measuring member
#5TEMPERATURE MEASURING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND TEMPERATURE MEASURING METHOD
#6Temperature measuring apparatus and temperature measuring method
#7Temperature control system including sub-chiller
#8Extreme temperature robust optical sensor designs and fault-tolerant signal processing
#9Sensor and method utilizing multiple optical interferometers
#10Tunable finesse infrared cavity thermal detectors
#11Thermo-optic system employing self reference
#12Birefringent optical temperature sensor and method
#13Method for measuring physical quantity of measurement object in substrate processing apparatus and storage medium storing program for implementing the method
#14Imaging detector array with optical readout
#15Method and device for contactless temperature monitoring and temperature adjustment
#16In-fiber whitelight interferometry using long-period fiber grating