166306 ⎘
Measuring optical phase difference ; Determining degree of coherence; Measuring optical wavelength by interferometric methods Types
Sub-classes:DISPERSION MEASUREMENT DEVICE AND METHOD BASED ON FRANSON SECOND-ORDER QUANTUM INTERFERENCE TECHNOLOGY
#2Apparatus for and method of sensing alignment marks
#3Method for evaluating the quality of the measurement of a wavefront and systems implementing such a method
#4Phase correction for optical interferometric imaging