166162 ⎘
Radiation pyrometry, e.g. infrared or optical thermometry; Constructional details; Shape of the cavity itself or of elements contained in or suspended over the cavity Spacers, e.g. for avoidance of stiction
WINDOW CAVITY WAFERS
#2OPTICAL FILTER ARRAY
#3Optical filter array
#4High speed graphene oxide bolometers and methods for manufacturing the same
#5Optical filter array
#6Method for manufacturing a detection device with two substrates and such a detection device
#7Opto-electronic modules and methods of manufacturing the same and appliances and devices comprising the same
#8Fabry-Perot interference filter and light-detecting device
#9Radiation detector and method for manufacturing a radiation detector
#10Substrate having a hole, method for manufacturing the substrate, infrared sensor, and method for manufacturing the infrared sensor
#11Electromagnetic radiation micro device, wafer element and method for manufacturing such a micro device
#12Infrared sensor
#13CMOS bolometer
#14Fabrication of window cavity cap structures in wafer level packaging
#15Nano-tip spacers for precise gap control and thermal isolation in MEMS structures
#16Opto-electronic modules and methods of manufacturing the same and appliances and devices comprising the same
#17Thermal detector, thermal detection device, and electronic instrument
#18Infrared sensing element and infrared imaging device
#19Electromagnetic radiation detector with micro-encapsulation, and device for detecting electromagnetic radiation using such detectors
#20Bolometer-type THz-wave detector
#21Bolometer-type THz-wave detector
#22Radiation sensor with cap and optical elements
#23Infrared ray detection device, method of fabricating the same and infrared ray camera
#24Infrared detection element
#25Thermal electromagnetic radiation detector with alveolate structure
#26Ear thermometer