Patents-Review.com
ClassID:

166382 ⎘

G01K5/486 - CPC Classification

Classification description:

Measuring temperature based on the expansion or contraction of a material the material being a solid using microstructures, e.g. made of silicon

Recent Application in this class:
#1
20240312333
2024-09-19

SENSING SYSTEM

 #2
20230167735
2023-06-01

Time-temperature nanosensors for subsurface applications

 #3
20220026283
2022-01-27

TEMPERATURE INDICATOR

 #4
20190346314
2019-11-14

MEMS structure and method for detecting a change in a parameter

 #5
20190172657
2019-06-06

Sensing devices, sensors, and methods for monitoring environmental conditions

 #6
20190170591
2019-06-06

Semiconductor workpiece temperature measurement system

 #7
20180003567
2018-01-04

Semiconductor workpiece temperature measurement system

 #8
20140167908
2014-06-19

Integrated mechanical device for electrical switching

 #9
20130010829
2013-01-10

TEMPERATURE MEASURING PROBE, TEMPERATURE MEASURING APPARATUS, AND TEMPERATURE MEASURING METHOD

 #10
20110309844
2011-12-22

System for measurement with pearls

 #11
20110080933
2011-04-07

Device for detecting temperature variations in a chip

 #12
20090219969
2009-09-03

SUBSTRATE SURFACE TEMPERATURE MEASUREMENT METHOD, SUBSTRATE PROCESSING APPARATUS USING THE SAME, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD

 #13
20090180516
2009-07-16

INTEGRATED TEMPERATURE SENSOR

 #14
20090016406
2009-01-15

Method for monitoring and calibrating temperature in semiconductor processing chambers

 #15
20080236747
2008-10-02

GAS ANALYZING APPARATUS AND SUBSTRATE PROCESSING SYSTEM

 #16
20070045756
2007-03-01

Nanoelectronic sensor with integral suspended micro-heater

 #17
20050223827
2005-10-13

Microelectromechanical system and method for determining temperature and moisture profiles within pharmaceutical packaging