166546 ⎘
Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors using semiconductive material, e.g. silicon
BATTERY SYSTEMS HAVING PRESSURE SENSING BATTERY MANAGEMENT SYSTEM AND BATTERY CELLS FOR PREVENTING BATTERY FIRES, AND APPLICATIONS THEREOF
#2LOAD SENSOR
#3SENSOR AND SENSOR SYSTEM"
#4Pressure sensor, manufacturing method thereof, and display device having the same
#5Pressure sensing device and pressure sensing apparatus
#6PRESSURE-SENSITIVE STRUCTURE AND ELECTRONIC DEVICE
#7STRAIN SENSING FILM, PRESSURE SENSOR AND STRAIN SENSING SYSTEM
#8Gap-increasing capacitive pressure sensor for increased range
#9Lever based differential capacitive strain gauge with acceleration rejection
#10SOFT PRESSURE SENSING MATERIALS, DEVICES AND SYSTEMS
#11MICROSCALE AND NANOSCALE STRUCTURED ELECTROMECHANICAL TRANSDUCERS EMPLOYING COMPLIANT DIELECTRIC SPACERS
#12Sensor apparatus for normal and shear force differentiation
#13Hybrid sensing system
#14Pressure sensor
#15Electric toothbrush adopting force sensing array
#16PRESSURE SENSING LAYERS AND DEVICES COMPRISING SAME
#17Pressure sensor
#18Micromechanical component for a capacitive pressure sensor device
#19Lid with embedded water detection and heater
#20FORCE SENSOR AND MANUFACTURE METHOD THEREOF
#21DETERMINATION SYSTEM, DETERMINATION METHOD, AND DETERMINATION PROGRAM
#22Force sensor and manufacture method thereof
#23Tunable device including tunable member responsible to electric field applied thereto, transducer including the tunable device, and method of changing one of stiffness and damping coefficient of tuning the tunable device
#24Solid-state shear stress sensors with high selectivity
#25Semiconductor device and method for forming a semiconductor device
#26Pressure sensor, manufacturing method thereof, and display device having the same
#27Elastomer-based capacitive control and operating element
#28Pressure sensor
#29Passive wireless pressure sensor for harsh environments
#30Stretchable electroluminescent devices
#31Connection Panel for Electronic Components
#32Transparent pressure sensor and manufacturing method thereof
#33Position indicator
#34Vibration and dynamic acceleration sensing using capacitors
#35Flexible transparent sensor with ionically-conductive material
#36Capacitive sensor array for dental occlusion monitoring
#37Capacitive force sensor and method for preparing the same
#38Capacitive force sensor and grasping device
#39Solid-state shear stress sensors with high selectivity
#40Pressure sensing device having Dirac material and method of operating the same
#41Method for manufacturing a microphone structure and a pressure sensor structure in the layer structure of a MEMS element
#42Position indicator of electromagnetic induction system and electronic ink cartridge
#43Pressure sensing apparatuses and methods
#44Vibration and dynamic acceleration sensing using capacitors
#45Interface apparatus and methods
#46Integrated electronic device for monitoring pressure within a solid structure
#47Interface of a microfabricated scanning force sensor for combined force and position sensing
#48Pressure sensor having multiple pressure cells and sensitivity estimation methodology
#49Sensor apparatus and method for producing a sensor apparatus
#50Pressure transducer with capacitively coupled source electrode
#51Capacitive micro-electro-mechanical force sensor and corresponding force sensing method
#52Electromechanical detection device, particularly for gravimetric detection, and method for manufacturing the device
#53Pressure sensor having multiple pressure cells and sensitivity estimation methodology
#54Micromechanical component for a capacitive sensor device, and manufacturing method for a micromechanical component for a capacitive sensor device
#55Vibration and dynamic acceleration sensing using capacitors
#56Sensors and method of operating sensor
#57Capacitive pressure sensor and a method of fabricating the same
#58Capacitive pressure sensing semiconductor device
#59Six-axis force-torque sensor
#60Force detector and robot
#61Sub-millinewton capacitive MEMS force sensor for mechanical testing on a microscope
#62Dynamic quantity sensor and dynamic quantity sensor system
#63Method of compensating for effects of mechanical stresses in a microcircuit
#64Microelectromechanical load sensor and methods of manufacturing the same
#65Capacitive pressure sensor and method of manufacturing the same
#66Capacitive pressure sensing semiconductor device
#67Transistor structure, method for manufacturing a transistor structure, force-measuring system
#68Sensor device having electrode draw-out portions through side of substrate
#69Interface apparatus and methods
#70Pressure sensing apparatuses and methods
#71MICRO FORCE SENSOR PACKAGE FOR SUB-MILLINEWTON ELECTROMECHANICAL MEASUREMENTS
#72Contact force sensor with an elastomer material secured to a deformable membrane
#73Sub-threshold elastic deflection FET sensor for sensing pressure/force, a method and system thereof
#74Micro-electromechanical capacitive strain sensor
#75MEMS capacitive bending and axial strain sensor
#76Micro-electromechanical capacitive strain sensor
#77Sealed capacitive sensor
#78Process condition measuring device and method for measuring shear force on a surface of a substrate that undergoes a polishing or planarization process
#79Strain sensor
#80Micro-electromechanical capacitive strain sensor
#81Capacitive pressure sensor with a cantilever member
#82MEMS capacitive bending and axial strain sensor
#83Apparatus for detecting a physical quantity acting as an external force and method for testing and manufacturing this apparatus
#84NON-CONTACT RF STRAIN SENSOR
#85Microelectromechanical system pressure sensor and method for making and using
#86MICROELECTROMECHANICAL SYSTEM PRESSURE SENSOR AND METHOD FOR MAKING AND USING
#87Organic semiconductor sensor device
#88High-temperature pressure sensor
#89Microelectromechanical system pressure sensor and method for making and using
#90Microelectromechanical system pressure sensor and method for making and using
#91Sealed capacitive sensor
#92Micro-electromechanical sensor
#93Microelectromechanical system pressure sensor and method for making and using
#94Apparatus for detecting a physical quantity acting as an external force and method for testing and manufacturing the apparatus
#95Microelectromechanical system pressure sensor and method for making and using
#96Organic semiconductor sensor device
#97Microelectromechanical strain gauge with frequency detector
#98Surface force sensor that senses force applied to a surface from an object attached to the surface
#99Vehicle surface force sensor
#100Flexible capacitive pressure sensor