166889 ⎘
Vacuum gauges by measuring variation of frictional resistance of gases using resonance effects of a vibrating body; Vacuum gauges of the Klumb type
Wide range highly sensitive pressure sensor based on heated micromachined arch beam
#2Vacuum apparatus and method of monitoring particles
#3Lithography apparatus with segmented mirror
#4Pressure sensor
#5MEMS vacuum level monitor in sealed package
#6MEMS pressure sensor
#7Methods and apparatus for detection of air ingress into cryogen vessels
#8Pressure gauge
#9MEMS vacuum sensor based on the friction principle
#10Resonator measurement device and method employing the device
#11Micro-electro-mechanical pressure sensor
#12Pressure sensor