166791 ⎘
Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements ; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means; Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means using variations in capacitance
Method for producing a pressure sensor device and pressure sensor device
#2Capacitive force sensor and grasping device
#3Capacitance-based pressure sensor including pressure vessel(s)
#4Microelectromechanical and/or nanoelectromechanical differential pressure measurement sensor
#5PRESSURE MEASUREMENT USING A MEMS DEVICE
#6Pressure measurement using a MEMS device