ClassID:

167742

G01N2021/1719 - CPC Classification

Classification description:

Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light; Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance Carrier modulation in semiconductors

Recent Application in this class:
#1
20220043049
2022-02-10

Method for testing lifetime of surface state carrier of semiconductor

#2
20200057104
2020-02-20

FIELD-BIASED NONLINEAR OPTICAL METROLOGY USING CORONA DISCHARGE SOURCE

#3
20160248375
2016-08-25

Photoelectric conversion element evaluation apparatus

#4
20150355125
2015-12-10

Method and device for characterising a fluid medium using a semi-conductive substrate

#5
20150316470
2015-11-05

Method and device for characterising a fluid medium using a photoelectric transducer

#6
20150276864
2015-10-01

Dual-phase interferometry for charge modulation mapping in ICS

#7
20140240710
2014-08-28

Pump probe measuring device

#8
20130335744
2013-12-19

Method for determining the doping profile of a partially activated doped semiconductor region

#9
20130003050
2013-01-03

System and method for nondestructively measuring concentration and thickness of doped semiconductor layers

#10
20100315625
2010-12-16

Methods for depth profiling in semiconductors using modulated optical reflectance technology

#11
20100188658
2010-07-29

High resolution wafer inspection system

#12
20100002236
2010-01-07

METHOD FOR DETERMINING THE DOPING PROFILE OF A PARTIALLY ACTIVATED DOPED SEMICONDUCTOR REGION

#13
20090160431
2009-06-25

Measuring method, arrangement and software product

#14
20080231845
2008-09-25

High resolution wafer inspection system

#15
20080158541
2008-07-03

Inline stress evaluation in microstructure devices

#16
20080151247
2008-06-26

Methods for depth profiling in semiconductors using modulated optical reflectance technology

#17
20070188762
2007-08-16

Modulated scatterometry

#18
20070188761
2007-08-16

Combined modulated optical reflectance and electrical system for ultra-shallow junctions applications

#19
20060170926
2006-08-03

Using a polaron interaction zone as an interface to integrate a plasmon layer and a semiconductor detector

#20
20060050280
2006-03-09

Utilizing an integrated plasmon detector to measure a metal deposit roughness on a semiconductor surface

#21
20050168759
2005-08-04

Modulated scatterometry