167846 ⎘
Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light; Systems in which incident light is modified in accordance with the properties of the material investigated; Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands; Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infra-red light for analysing solids; Preparation of samples therefor applied to semiconductors, e.g. Silicon
INSPECTION DEVICE AND MICROPROBE USED THEREIN
#2MEASURING APPARATUS, MEASURING METHOD, AND MEASURING PROGRAM
#3SUBSTRATE EVALUATION METHOD AND SUBSTRATE PROCESSING APPARATUS
#4DEFECT INSPECTION SYSTEM AND DEFECT INSPECTION METHOD
#5MEASUREMENT METHOD AND SUBSTRATE PROCESSING APPARATUS
#6HEAT TREATMENT APPARATUS AND ACCURATE TEMPERATURE MEASUREMENT METHOD FOR SEMICONDUCTOR WORKPIECE
#7METHOD FOR MEASURING ETCHING AMOUNT, AND MEASUREMENT SYSTEM THEREFOR
#8SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
#9OPTICAL SENSING MODULE, SYSTEM AND METHOD FOR OPERATING OPTICAL SENSING SYSTEM
#10Ultrafast laser imaging with box lock-in
#11Phase-Resolved Optical Metrology for Substrates
#12Structure of thermal stress release of photo-excited thermal infrared emitter
#13Systems and methods of characterizing semiconductor materials
#14Measurement of properties of patterned photoresist
#15OPTICAL APPARATUS AND SOLID IMMERSION LENS
#16System and method for determining post bonding overlay
#17In-situ metrology and process control
#18Method for measuring extremely low oxygen concentration in silicon wafer
#19Hybrid probe, physical property analysis apparatus including the same, and method of measuring semiconductor device using the apparatus
#20Film forming method and film forming apparatus
#21Method for producing nitride semiconductor laminate, silicon semiconductor product, method for inspecting film quality and method for inspecting semiconductor growth device
#22Calibration method and terminal equipment of terahertz frequency band on-wafer S parameter
#23Apparatus and method for biomolecular analysis
#24System and method to calibrate a plurality of wafer inspection system (WIS) modules
#25In-situ metrology and process control
#26Semiconductor metrology based on hyperspectral imaging
#27OPTICAL FILTER INCLUDING A HIGH REFRACTIVE INDEX MATERIAL
#28Method for manufacturing resistivity standard sample and method for measuring resistivity of epitaxial wafer
#29Passivation of nonlinear optical crystals
#30Detecting the cleanness of wafer after post-CMP cleaning
#31Reflective detection method and reflectance detection apparatus
#32Inspection and metrology using broadband infrared radiation
#33Method and assembly for determining the carbon content in silicon
#34Infrared spectroscopic reflectometer for measurement of high aspect ratio structures
#35Silicon article inspection systems and methods
#36Internal crack detecting method and internal crack detecting apparatus
#37OPTICAL FILTER INCLUDING A HIGH REFRACTIVE INDEX MATERIAL
#38System for measuring levels of radiation reflecting from semiconductor material for use in measuring the dopant content thereof
#39Determining oxidation of photoconductor members based on obtained spectrum from optical spectroscopy
#40Systems and methods for extended infrared spectroscopic ellipsometry
#41Detecting the cleanness of wafer after post-CMP cleaning
#42Passivation of nonlinear optical crystals
#43Quality evaluation method for silicon wafer, and silicon wafer and method of producing silicon wafer using the method
#44Passivation of nonlinear optical crystals
#45Spectrometer insert for measuring temperature-dependent optical properties
#46Thickness determination and layer characterization using terahertz scanning reflectometry
#47Method for detecting an etching residue
#48Measurement device for texture size, manufacturing system for solar cell, and manufacturing method for solar cell
#49Method of analyzing nitride semiconductor layer and method of manufacturing nitride semiconductor substrate using the analysis method
#50Passivation of nonlinear optical crystals
#51Apparatus and method for measuring semiconductor carrier lifetime
#52METHOD FOR THE DETERMINATION OF IMPURITIES IN SILICON
#53METHOD AND APPARATUS FOR THIN FILM QUALITY CONTROL
#54Carrier concentration measuring device and carrier concentration measuring method
#55METHOD AND APPARATUS FOR THIN FILM QUALITY CONTROL
#56METHOD AND APPARATUS FOR THIN FILM QUALITY CONTROL
#57Method and device for inspecting a disk-shaped object
#58Method and apparatus for measuring spectroscopic absorbance
#59Ion implant monitoring through measurement of modulated optical response
#60Ion implant monitoring through measurement of modulated optical response
#61Multi-environment polarized infrared reflectometer for semiconductor metrology