168147 ⎘
Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light; Systems specially adapted for particular applications; Investigating moving sheets; Optical head specially adapted with an illuminator over the whole width
Sub-classes:INFORMATION PROCESSING SYSTEM, NON-TRANSITORY COMPUTER READABLE MEDIUM STORING PROGRAM, AND INFORMATION PROCESSING METHOD
#2Inspection apparatus and inspection method for inspection of the surface appearance of a flat item that represents a test specimen
#3Apparatus for characterizing a surface structure