168164 ⎘
Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light; Systems specially adapted for particular applications; Investigating the presence of flaws or contamination; Specially adapted optical and illumination features; Dark field detection Separate detection of dark field and bright field
MULTI-FIELD LAYER INSPECTION METHOD FOR SURFACE OF CYLINDRICAL OBJECT
#2INSPECTION DEVICE, INSPECTION METHOD, AND METHOD OF MANUFACTURING PISTON
#3SEMICONDUCTOR INSPECTION TOOL SYSTEM AND METHOD FOR WAFER EDGE INSPECTION
#4INSPECTION APPARATUS AND INSPECTION METHOD
#5INSPECTION DEVICE AND INSPECTION METHOD
#6OPTICAL SENSING SYSTEM AND OPTICAL SENSING METHOD
#7OPTICAL SYSTEMS AND METHODS OF PROVIDING A COUPLING MIRROR TO AN OPTICAL SYSTEM
#8Apparatus and Method for Automatic Monitoring of Lids of Beverage and Food Cans
#9OPTICAL INSPECTION METHOD AND STORAGE MEDIUM, AND OPTICAL INSPECTION APPARATUS THAT USES THE SAME
#10MODULAR OPTICAL INSPECTION STATION
#11Semiconductor inspection tool system and method for wafer edge inspection
#12Defect inspection apparatus and defect inspection method
#13Modular optical inspection station
#14Method for detecting lens cleanliness using spectral differential flat field correction
#15Die bonding apparatus and manufacturing method for semiconductor device
#16Integrated measurement system
#17Method and apparatus for automated in-line inspection of optically transparent materials
#18Method for checking a printing cylinder and a corresponding arrangement
#19Method and device for recognising and analysing surface defects in three-dimensional objects having a reflective surface, in particular motor vehicle bodies
#20Information processing apparatus, determination method, imprint apparatus, lithography system, article manufacturing method, and non-transitory computer-readable storage medium
#21Methods of defect inspection
#22Semiconductor wafer evaluation method and semiconductor wafer manufacturing method
#23Modular optical inspection station
#24Simultaneous multi-directional laser wafer inspection
#25System, method and non-transitory computer readable medium for tuning sensitivities of, and determining a process window for, a modulated wafer
#26Scanning differential interference contrast in an imaging system design
#27Adaptive diffuse illumination systems and methods
#28Method and device for locating the origin of a defect affecting a stack of thin layers deposited on a substrate
#29Automatic optical inspection device and method
#30Apparatus and a method for inspecting a light transmissible optical component
#31Systems and methods for defect material classification
#32Adaptive diffuse illumination systems and methods
#33OPTICAL INSPECTION SYSTEM AND IMAGE PROCESSING METHOD THEREOF
#34Surface inspection system and surface inspection method
#35Defect inspection device, pattern chip, and defect inspection method
#36Methods of defect inspection
#37System and method for inspecting a wafer
#38Defect detection device and defect detection method
#39Optical inspection system
#40Systems and methods for defect material classification
#41System, method and non-transitory computer readable medium for tuning sensitivies of, and determining a process window for, a modulated wafer
#42Modular optical inspection station
#43Apparatus for checking the coverslipping quality of samples for microscopic examination
#44Simultaneous multi-directional laser wafer inspection
#45SYSTEM AND METHOD FOR SURFACE INSPECTION
#46Apparatus and methods for combined brightfield, darkfield, and photothermal inspection
#47Online inspection for composite structures
#48Inspection apparatus and inspection method for inspection of the surface appearance of a flat item that represents a test specimen
#49Multi-optic vision device utilizing area-scanning for detecting defects
#50Optical method and system for defects detection in three-dimensional structures
#51Defect observation method and device and defect detection device
#52System for inspecting a backside of a wafer
#53Method of evaluating epitaxial wafer
#54Optical metrology system for spectral imaging of a sample
#55System and method for apodization in a semiconductor device inspection system
#56System and method for simultaneous dark field and phase contrast inspection
#57System and method for dark field inspection
#58Method, apparatus and system for generating multiple spatially separated inspection regions on a substrate
#59Apparatus and methods for combined brightfield, darkfield, and photothermal inspection
#60Optical method and system for detecting defects in three-dimensional structures
#61System and method for dark field inspection
#62Dark field computed tomography imaging
#63Multiple mode inspection system and method for evaluating a substrate by a multiple mode inspection system
#64Detecting defects on wafers based on 2D scatter plots of values determined for output generated using different optics modes
#65Surface inspection apparatus and method thereof
#66Machine and method for printing material webs
#67Apparatus and method of inspecting a defect of an object
#68Method for optical inspection, detection and analysis of double sided wafer macro defects
#69System and method for apodization in a semiconductor device inspection system
#70PART INSPECTION SYSTEM
#71Enhanced defect scanning
#72Solid-State Laser And Inspection System Using 193nm Laser
#73Methods and systems for determining a critical dimension and overlay of a specimen
#74Extraction of systematic defects
#75Method and apparatus for optical inspection, detection and analysis of double sided wafer macro defects
#76Surface defect inspection apparatus and surface defect inspection method
#77Defect inspection device and defect inspection method
#78Inspection instrument
#79Optical inspection system and method
#80Surface inspection apparatus and method thereof
#81Method and system for detecting defects of transparent substrate
#82System and method for capturing illumination reflected in multiple directions
#83FLUORESCENCE-DETECTING DISK INSPECTION SYSTEM
#84Charged particle beam processing system with visual and infrared imaging
#85Foreign matter inspection method and foreign matter inspection apparatus
#86DEVICE AND METHOD FOR CONTROLLING AN ANGULAR COVERAGE OF A LIGHT BEAM
#87Mapping variations of a surface
#88Efficient telecentric optical system (ETOS)
#89Method for optically detecting moving objects
#90Optical inspection system and method
#91Optical inspection system and method
#92Apparatus for imaging the inner surface of a cavity within a workpiece
#93Apparatus for the optical inspection of wafers
#94Methods and systems for determining a critical dimension and overlay of a specimen
#95Optical inspection system and method
#96Inspection system employing illumination that is selectable over a continuous range angles
#97Foreign matter inspection method and foreign matter inspection apparatus
#98System and method for inspecting a wafer
#99System and method for inspecting a wafer
#100System and method for inspecting a wafer
#101SURFACE INSPECTION DEVICE AND AN ARRANGEMENT FOR INSPECTING A SURFACE
#102Method and system for defect detection using transmissive bright field illumination and transmissive dark field illumination
#103Optical inspection of a specimen using multi-channel responses from the specimen
#104Dynamic illumination in optical inspection systems
#105Systems and methods for determining two or more characteristics of a wafer
#106Interferometric defect detection
#107METHOD AND SYSTEM FOR PHOTOVOLTAIC CELL PRODUCTION YIELD ENHANCEMENT
#108DEVICE AND METHOD FOR THE INSPECTION OF DEFECTS ON THE EDGE REGION OF A WAFER
#109WAFER INSPECTION USING SHORT-PULSED CONTINUOUS BROADBAND ILLUMINATION
#110Inspection tools supporting multiple operating states for multiple detector arrangements
#111HIGH RESOLUTION EDGE INSPECTION
#112Method and apparatus for detecting defects on a disk surface
#113Glazing inspection
#114Optical inspection apparatus for substrate defect detection
#115Surface inspection apparatus and method thereof
#116Multi mode inspection method and apparatus
#117Edge inspection apparatus
#118Systems and method for simultaneously inspecting a specimen with two distinct channels
#119Optical inspection tool featuring multiple speed modes
#120High throughput across-wafer-variation mapping
#121AUTOMATED PROTEIN CRYSTALLIZATION IMAGING
#122Optical inspection of a specimen using multi-channel responses from the specimen
#123Defect inspecting apparatus and defect-inspecting method
#124High throughput brightfield/darkfield water inspection system using advanced optical techniques
#125Method and Apparatus for Detecting Surface Characteristics on a Mask Blank
#126Edge inspection
#127High speed laser scanning inspection system
#128Single and multi-spectral illumination system and method
#129Method and apparatus for inspecting a surface
#130Image splitting in optical inspection systems
#131High throughput darkfield/brightfield wafer inspection system using advanced optical techniques
#132Optical inspection of a specimen using multi-channel responses from the specimen
#133Multi mode inspection method and apparatus
#134Methods and systems for detecting defects on a specimen using a combination of bright field channel data and dark field channel data
#135Wafer inspection using short-pulsed continuous broadband illumination
#136Apparatus and method for characterizing defects in a transparent substrate
#137Method and apparatus for auto-adjusting illumination
#138Foreign matter inspection method and foreign matter inspection apparatus
#139Off-axis illumination assembly and method
#140Method and system for inspecting surfaces
#141Fiber optical illumination system
#142High resolution optical microscope with cardioid condenser for brightfield and darkfield illumination
#143Surface inspection apparatus and method thereof
#144Excimer laser inspection system
#145Apparatus and method for optical inspection
#146System and method for inspection of films
#147High throughput darkfield/brightfield wafer inspection system using advanced optical techniques
#148Optical inspection of a specimen using multi-channel responses from the specimen
#149Lighting and imaging system including a flat light source with LED illumination
#150Method and apparatus for reviewing defects
#151System for detection of wafer defects
#152Apparatus for determining optimum position of focus of an imaging system
#153Optical inspection tool having lens unit with multiple beam paths for detecting surface defects of a substrate and methods of using same
#154Programmable image computer
#155Apparatus and method for inspecting a wafer
#156Defect inspection method and defect inspection system using the method
#157System for detection of wafer defects
#158System for detection of wafer defects
#159System for detection of wafer defects
#160Optical inspection of a specimen using multi-channel responses from the specimen
#161Method and apparatus for detecting defects
#162High speed laser scanning inspection system
#163Method for filtering nuisance defects
#164Methods and systems for determining a presence of macro and micro defects on a specimen
#165Multi beam scanning with bright/dark field imaging
#166System and method for performing bright field and dark field optical inspection
#167Systems and methods for a wafer inspection system using multiple angles and multiple wavelength illumination
#168Multi mode inspection method and apparatus
#169Method and system for inspecting a wafer
#170Device and method for inspecting an object
#171Method and apparatus for detecting surface characteristics on a mask blank
#172Sample inspection system
#173Surface inspection apparatus and method thereof
#174Sample inspection system
#175Method for optically inspecting a wafer by sequentially illuminating with bright and dark field light beams wherein the images from the bright and dark field illuminated regions are spatially offset
#176Optical inspection of a specimen using multi-channel responses from the specimen
#177Sample inspection system
#178Apparatus for wafer inspection
#179Automated protein crystallization imaging
#180System for detection of wafer defects
#181Defect review system with 2D scanning and a ring detector
#182High throughput brightfield/darkfield wafer inspection system using advanced optical techniques
#183Method and its apparatus for inspecting defects
#184Edge inspection
#185Multi beam scanning with bright/dark field imaging
#186Systems and method for identifying foreign objects and debris (FOD) and defects during fabrication of a composite structure
#187Method and apparatus for adjusting illumination angle
#188Semiconductor inspection tool system and method for wafer edge inspection
#189Method of detecting lens cleanliness using out-of-focus differential flat field correction
#190System and method for multiple mode inspection of a sample
#191Apparatus and a method for inspecting a light transmissive optical component
#192Overlay measurement method
#193Systems and methods for inspection of a specimen