168171 ⎘
Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light; Systems specially adapted for particular applications; Investigating the presence of flaws or contamination; Specially adapted optical and illumination features Polarisation of light
OPTICAL INSPECTION DEVICE
#2OPTICAL HOLE INSPECTION APPARATUS AND METHODS
#3OPTICAL ABERRATION COMPENSATION USING A DEFORMABLE MIRROR
#4Ellipsometric Imaging For Optical Defect Inspection
#5Single-Material Waveplates for Pupil Polarization Filtering
#6SYSTEM FOR WINDSHIELD RESIDUE DETECTION AND QUANTIFICATION
#7INSPECTION DEVICE WITH METASURFACE POLARIZATION BEAM SPLITTER
#8Crystallographic Defect Inspection
#9OPTICAL INSPECTION APPARATUS, OPTICAL INSPECTION METHOD, AND OPTICAL INSPECTION SYSTEM INCLUDING OPTICAL INSPECTION APPARATUS
#10SAMPLE INSPECTION WITH MULTIPLE MEASUREMENT MODES
#11INSPECTION DEVICE AND INSPECTION METHOD
#12DEVICE FOR MEASURING SEMICONDUCTORS
#13METHOD AND DEVICE OF INSPECTING SURFACE OF INTERCONNECT STRUCTURE
#14OPTICAL INSPECTION SYSTEM OF ELIMINATING IMAGE NOISE
#15FinFET Device and Method of Forming and Monitoring Quality of the Same
#16POLARIZING MICROSCOPE, CRYSTAL DEFECT EVALUATION DEVICE, AND CRYSTAL DEFECT EVALUATION METHOD
#17INSPECTION ASSISTANCE SYSTEM, INSPECTION ASSISTANCE METHOD, AND PROGRAM
#18Surface Inspection Sensor
#19Visual Inspection Systems for Containers of Liquid Pharmaceutical Products
#20INSPECTION DEVICE AND INSPECTION METHOD
#21SPECTRAL ANGULAR METROLOGY
#22IMAGING SYSTEM AND IMAGING INSPECTION APPARATUS INCLUDING THE SAME
#23SYSTEM AND METHOD FOR USE OF POLARIZED LIGHT TO IMAGE TRANSPARENT MATERIALS APPLIED TO OBJECTS
#24APPARATUS FOR ACQUIRING THREE-DIMENSIONAL INFORMATION OF OBJECTS AND SURFACES FOR AN ARTIFICIAL VISION SYSTEM FOR AUTOMATIC OPTICAL INSPECTION OF THE VISUAL QUALITY OF AN UNDERLYING OBJECT, IN PARTICULAR ELECTRONIC ASSEMBLIES, CIRCUIT BOARDS AND THE LIKE
#25SUBSTRATE PROCESSING APPARATUS AND MONITORING METHOD
#26SURFACE INSPECTION APPARATUS
#27Method and optical system for imaging optical defect
#28METHOD AND SYSTEM OF SAMPLE EDGE DETECTION AND SAMPLE POSITIONING FOR IMAGE INSPECTION APPARATUS
#29OPTICAL COMPUTING METHODS AND SYSTEMS FOR INSPECTING A GLASS CONTAINER IN TRANSMITTED LIGHT
#30OPTICAL PHASE MEASUREMENT METHOD AND SYSTEM
#31Multi-Parameter Inspection Apparatus for Monitoring of Manufacturing Parts
#32Dark-field confocal microscopic measurement apparatus and method based on vortex dichroism
#33OPTICAL INSPECTION DEVICE FOR OPTICAL PERFORMANCE TEST OF DISPLAY DEVICE AND OPTICAL INSPECTION METHOD USING THE SAME
#34FLUORESCENCE MODE FOR WORKPIECE INSPECTION
#35METHOD FOR INSPECTING FOR SURFACE DEFECTS ON A CAST PART MADE OF SINGLE-CRYSTAL METAL AND SYSTEM FOR IMPLEMENTING SAME
#36OPTICAL DEVICE
#37DEFECT INSPECTION DEVICE
#38OPTICAL MEASUREMENT APPARATUS
#39MULTI-HEAD OPTICAL INSPECTION SYSTEMS AND TECHNIQUES FOR SEMICONDUCTOR MANUFACTURING
#40A METHOD FOR QUALITY ASSESSMENT OF A FOOD PACKAGE AND A PACKAGING SYSTEM
#41DEFECT INSPECTION DEVICE, DEFECT INSPECTION METHOD, AND ADJUSTMENT SUBSTRATE
#42APPARATUS FOR INSPECTING SURFACE OF OBJECT
#43MEASURING APPARATUS AND METHOD FOR ROUGHNESS AND/OR DEFECT MEASUREMENT ON A SURFACE
#44DEFECT INSPECTION DEVICE, DEFECT INSPECTION METHOD, AND ADJUSTMENT SUBSTRATE
#45DEVICE FOR INSPECTING THE SURFACE OF A TRANSPARENT OBJECT, AND CORRESPONDING METHOD
#46Method and system for detecting a defect on a semi-reflective film by illuminating different light sources along the same optical axis
#47MARKING INSPECTION DEVICE AND MARKING DEVICE FOR TRANSPARENT EDIBLE OBJECTS
#48Inspection condition presentation apparatus, surface inspection apparatus, inspection condition presentation method and program
#49OPTICAL INSPECTION USING CONTROLLED ILLUMINATION AND COLLECTION POLARIZATION
#50Foreign Substance Detection Device and Detection Method
#51COMMUNICATION BETWEEN AN OPTICAL MEASURING DEVICE AND TWO MEASURING CELLS ACCOMMODATED THEREIN
#52Time domain multiplexed defect scanner
#53INSPECTION APPARATUS, INJECTION MOLDING SYSTEM, AND INSPECTION METHOD
#54Multi-parameter inspection apparatus for monitoring of manufacturing parts using a polarization image detector
#55METHODS AND SYSTEMS FOR DETERMINING THE GROWTH STAGE OF A PLANT
#56Methods and systems for targeted monitoring of semiconductor measurement quality
#573D image acquisition system for optical inspection and method for optical inspection of objects, in particular electronic assemblies, electronic boards and the like
#58Method of evaluating semiconductor wafer
#59Reflective waveplates for pupil polarization filtering
#60Single-Material Waveplates for Pupil Polarization Filtering
#61WAFER INSPECTION APPARATUS USING THREE-DIMENSIONAL IMAGE AND METHOD OF INSPECTING WAFER USING THE SAME
#62ELLIPSOMETER AND APPARATUS FOR INSPECTING SEMICONDUCTOR DEVICE INCLUDING THE ELLIPSOMETER
#63FinFET device and method of forming and monitoring quality of the same
#64Inspection apparatus, injection molding system, and inspection method
#65Defect inspection apparatus and defect inspection method
#66Container visual inspection assembly and method
#67METHOD FOR EVALUATING ORIENTATION OF NANOWIRE IN TRANSPARENT MATERIAL, METHOD FOR MANAGING STEPS IN WHICH SAID METHOD IS USED, AND METHOD FOR PRODUCING RESIN CURED ARTICLE
#68Method and system for optical analysis of a component of an aerosol generating article
#69Part control device and method
#70Apparatus and method for inspecting cans
#71OPTICAL DETECTION OF FOREIGN METAL OBJECTS ON SUBJECTS BEFORE UNDERGOING MAGNETIC RESONANCE IMAGING
#72METHOD AND SYSTEM FOR IN-LINE OPTICAL SCATTEROMETRY
#73Defect inspection device and defect inspection method
#74Carder, web guiding element, spinning mill preparation installation and method for identifying undesired particles
#75METHOD AND DEVICE FOR OPTICALLY INSPECTING CONTAINERS
#76Angle independent optical surface inspector
#77Optical imaging apparatus, optical inspection apparatus, and optical inspection method
#78IMAGE PROCESSING APPARATUS, INFORMATION GENERATION APPARATUS, AND METHOD THEREOF
#79Test structure design for metrology measurements in patterned samples
#80Optical inspection device for optical performance test of display device and optical inspection method using the same
#81Super resolution for magneto-optical microscopy
#82OPTICAL PHASE MEASUREMENT METHOD AND SYSTEM
#83Multi-parameter inspection apparatus for monitoring of additive manufacturing parts
#84Increasing signal-to-noise ratio in optical imaging of defects on unpatterned wafers
#85Liquid Crystal-Based Detection of Air Contaminants Using Metal Surfaces
#86MEASUREMENT APPARATUS AND METHOD
#87System, method and apparatus for polarization control
#88Optical inspection
#89Sample surface polarization modification in interferometric defect inspection
#90Wafer inspection apparatus
#91Method and system for determining alignment and orientation of a target
#92OPTICAL DETECTION METHOD AND SYSTEM FOR DETECTING A SPATIAL FEATURE ON A SURFACE OF A SUBSTRATE
#93Evaluation method of silicon wafer
#94Method and apparatus for analysing a component
#95FinFET device and method of forming and monitoring quality of the same
#96Defect inspection apparatus and defect inspection method
#97Surface defect measuring apparatus and method by microscopic scattering polarization imaging
#98Semiconductor defect inspection apparatus
#99Simultaneous multi-directional laser wafer inspection
#100Glass product stress evaluation system and method
#101System, method and non-transitory computer readable medium for tuning sensitivities of, and determining a process window for, a modulated wafer
#102Defect inspection apparatus and defect inspection method
#103Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measured
#104Detector
#105Mask inspection apparatus, switching method, and mask inspection method
#106Polarization measurements of metrology targets and corresponding target designs
#107SYSTEMS AND METHODS FOR AUTOMATED EVALUATION OF GLASS-BASED SUBSTRATES FOR BIREFRINGENCE DEFECTS
#108Radial polarizer for particle detection
#109Scanning differential interference contrast in an imaging system design
#110System and method for inspecting aircraft windows
#111Interferometer with pixelated phase shift mask
#112Method of detecting a defect on a substrate, apparatus for performing the same and method of manufacturing semiconductor device using the same
#113Test structure design for metrology measurements in patterned samples
#114Method and System for Detecting Abnormalities in Coated Substrates
#115Semiconductor wafer evaluation method and semiconductor wafer
#116Sample inspection using topography
#117Method and apparatus for measuring a parameter of interest using image plane detection techniques
#118Functional surfaces for liquid crystal-based detection of chlorine gas
#119Device for testing optical properties and method for testing optical properties
#120Optical device for obtaining 3D spatial information
#121Sub-resolution defect detection
#122Optical phase measurement method and system
#123Optical test system and method, and method of manufacturing semiconductor device by using the optical test system and method
#124Metrology method and device
#125Method and apparatus for detecting a crack in a transparent article
#126Examination device
#127Imaging apparatus for obtaining image of polarizing film, inspection apparatus, and inspection method
#128Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measured
#129Methods and apparatus for polarized wafer inspection
#130FinFET device and method of forming and monitoring quality of the same
#131IMAGE CAPTURING DEVICE AND INSPECTION APPARATUS AND INSPECTION METHOD
#132Three-dimensional inspection
#133System, method and apparatus for polarization control
#134Method of testing an object and apparatus for performing the same
#135Computerized method for configuring an inspection system, computer program product and an inspection system
#136Optical system of a microlithographic projection exposure system or of a wafer inspection system
#137Inspection and metrology using broadband infrared radiation
#138METHOD AND DEVICE FOR CHARACTERIZING A WAFER PATTERNED BY AT LEAST ONE LITHOGRAPHY STEP
#139Method comprising evaluating substrate by polarized parallel light
#140Inspection apparatus and inspection method using the same
#141System, method and non-transitory computer readable medium for tuning sensitivies of, and determining a process window for, a modulated wafer
#142OPTICAL INSPECTION APPARATUS AND METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE APPARATUS
#143Image forming device
#144Polarized image acquisition apparatus, pattern inspection apparatus, polarized image acquisition method, and pattern inspection method
#145Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method
#146Inspection device
#147Simultaneous multi-directional laser wafer inspection
#148DEFECT INSPECTION SYSTEM, METHOD OF INSPECTING DEFECTS, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE METHOD
#149Inspection systems for additive manufacturing systems
#150Defect inspecting method and defect inspecting apparatus
#151Method and device for focusing in an inspection system
#152Inspection device and inspection system
#153Pattern inspection apparatus for detecting a pattern defect
#154Examination device
#155Defect detection method and defect detection device and defect observation device provided with same
#156Methods and apparatus for polarized wafer inspection
#157System and method for detecting defects on a specular surface with a vision system
#158Method and apparatus for detecting holes in substrates in absorbent article converting lines
#159Inspection systems and techniques with enhanced detection
#160Polarization inspection device
#161TEST STRUCTURE DESIGN FOR METROLOGY MEASUREMENTS IN PATTERNED SAMPLES
#162Defect inspection device and defect inspection method
#163Optical method and system for defects detection in three-dimensional structures
#164Inspection method and inspection apparatus
#165FinFET device and method of forming and monitoring quality of the same
#166Defect inspection method and its device
#167Photon emitter array including photon emitters with different orientations
#168Defect reviewing method and device
#169Apparatus and methods using interference in light reflected from articles
#170Optical phase measurement method and system
#171Front quartersphere scattered light analysis
#172Systems and methods for automatically inspecting wire segments
#173Inspection apparatus and inspection method
#174Upper surface foreign material detecting device of ultra-thin transparent substrate
#175Optical inspection system
#176Methods for monitoring semiconductor fabrication processes using polarized light
#177System and method for semiconductor wafer inspection and metrology
#178Inspection device of display device and inspection method of display device
#179Remote connection system for an aircraft
#180Polarization measurements of metrology targets and corresponding target designs
#181Surface inspecting method
#182Inspection systems and techniques with enhanced detection
#183Measurement systems having linked field and pupil signal detection
#184Defect inspecting method and defect inspecting apparatus
#185Non-linear optical ellipsometry for surface monitoring and characterization
#186Circular polarization filter and application therefor
#187Method and system for improving optical measurements on small targets
#188Defect detection method and defect detection device and defect observation device provided with same
#189Optical module for surface inspection and surface inspection apparatus including the same
#190Detecting defects on a wafer using defect-specific and multi-channel information
#191Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method
#192Compressive sensing with illumination patterning
#193Method for reviewing a defect and apparatus
#194DEFECT DETECTION USING SURFACE ENHANCED ELECTRIC FIELD
#195Method, apparatus and system for generating multiple spatially separated inspection regions on a substrate
#196System and method for detecting pin-holes in fiberglass and composite parts
#197Inspection apparatus using polarized lights
#198Evaluation method and device, processing method, and exposure system
#199Features maps of articles with polarized light
#200Defect inspection method and defect inspection device
#201Optical method and system for measuring isolated features of a structure
#202Method and apparatus for observing subsurfaces of a target material
#203Inspection apparatus and inspection method
#204Liquid crystal modulator for detecting a defective substrate and inspection apparatus having the same
#205System and method for decoration inspection on transparent media
#206METHOD AND SYSTEM FOR REAL TIME INSPECTION OF A SILICON WAFER
#207Defect inspection apparatus and defect inspection method
#208Image capturing device and inspection apparatus and inspection method
#209Front quartersphere scattered light analysis
#210Front quartersphere scattered light analysis
#211Method and arrangement for measuring blowing structures of a prestressed disc
#212System, method and apparatus for polarization control
#213Photon emitter array
#214Inspection apparatus
#215Apparatus and method of inspecting a defect of an object
#216Inspection device and inspection method
#217Scattered light measurement system
#218System with multiple scattered light collectors
#219Composite polarizer with adjustable polarization angles
#220Variable polarization wafer inspection
#221Optical device, particularly a polarimeter, for detecting inhomogeneities in a sample
#222Method and apparatus for observing subsurfaces of a target material
#223Defect detection method and defect detection device and defect observation device provided with same
#224Method and system for inspecting beveled objects
#225Defect inspecting method and defect inspecting apparatus
#226Inspecting a workpiece using scattered light
#227Mapping variations of a surface
#228Method for inspecting defects and defect inspecting apparatus
#229POLYESTER FILM FOR RELEASE FILM FOR POLARIZING PLATE, AND LAMINATE HAVING IMPROVED POLARIZATION CHARACTERISTICS
#230Back quartersphere scattered light analysis
#231System and method for controlling a beam source in a workpiece surface inspection system
#232Illumination apparatus and appearance inspection apparatus including the same
#233Inspecting a workpiece using polarization of scattered light
#234Front quartersphere scattered light analysis
#235Method and apparatus for inspecting defects
#236Method and Apparatus for Inspecting Defects
#237Inspection tools supporting multiple operating states for multiple detector arrangements
#238Inspection apparatus and inspection method
#239High throughput across-wafer-variation mapping
#240System and method for controlling light scattered from a workpiece surface in a surface inspection system
#241Apparatus and method for inspecting film defect
#242System and method for controlling a beam source in a workpiece surface inspection system
#243Method and apparatus for auto-adjusting illumination
#244System and method for inspecting a workpiece surface by analyzing scattered light in a front quartersphere region above the workpiece
#245System and method for inspection of a workpiece surface using multiple scattered light collectors
#246System and method for inspecting a workpiece surface using surface structure spatial frequencies
#247System and method for inspecting a workpiece surface using combinations of light collectors
#248System and method for inspecting a workpiece surface by analyzing scattered light in a back quartersphere region above the workpiece
#249System and method for inspecting a workpiece surface using polarization of scattered light
#250System and method for controlling light scattered from a workpiece surface in a surface inspection system
#251System and method for signal processing for a workpiece surface inspection system
#252Sample inspection system
#253Sample inspection system
#254Sample inspection system
#255Apparatus on a spinning preparation for detecting foreign objects of plastic material
#256Method and apparatus for adjusting illumination angle
#257Crystallographic defect inspection
#258Time domain multiplexed defect scanner
#259System and method for multiple mode inspection of a sample
#260Ellipsometer and method of inspecting pattern asymmetry using the same