ClassID:

168171

G01N2021/8848 - CPC Classification

Classification description:

Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light; Systems specially adapted for particular applications; Investigating the presence of flaws or contamination; Specially adapted optical and illumination features Polarisation of light

Recent Application in this class:
#1
20260140063
2026-05-21

OPTICAL INSPECTION DEVICE

#2
20260133134
2026-05-14

OPTICAL HOLE INSPECTION APPARATUS AND METHODS

#3
20260110640
2026-04-23

OPTICAL ABERRATION COMPENSATION USING A DEFORMABLE MIRROR

#4
20260110626
2026-04-23

Ellipsometric Imaging For Optical Defect Inspection

#5
20260033282
2026-01-29

Single-Material Waveplates for Pupil Polarization Filtering

#6
20260002881
2026-01-01

SYSTEM FOR WINDSHIELD RESIDUE DETECTION AND QUANTIFICATION

#7
20250362591
2025-11-27

INSPECTION DEVICE WITH METASURFACE POLARIZATION BEAM SPLITTER

#8
20250305967
2025-10-02

Crystallographic Defect Inspection

#9
20250290860
2025-09-18

OPTICAL INSPECTION APPARATUS, OPTICAL INSPECTION METHOD, AND OPTICAL INSPECTION SYSTEM INCLUDING OPTICAL INSPECTION APPARATUS

#10
20250264414
2025-08-21

SAMPLE INSPECTION WITH MULTIPLE MEASUREMENT MODES

#11
20250244252
2025-07-31

INSPECTION DEVICE AND INSPECTION METHOD

#12
20250224328
2025-07-10

DEVICE FOR MEASURING SEMICONDUCTORS

#13
20250216340
2025-07-03

METHOD AND DEVICE OF INSPECTING SURFACE OF INTERCONNECT STRUCTURE

#14
20250189458
2025-06-12

OPTICAL INSPECTION SYSTEM OF ELIMINATING IMAGE NOISE

#15
20250169101
2025-05-22

FinFET Device and Method of Forming and Monitoring Quality of the Same

#16
20250164407
2025-05-22

POLARIZING MICROSCOPE, CRYSTAL DEFECT EVALUATION DEVICE, AND CRYSTAL DEFECT EVALUATION METHOD

#17
20250146950
2025-05-08

INSPECTION ASSISTANCE SYSTEM, INSPECTION ASSISTANCE METHOD, AND PROGRAM

#18
20250130178
2025-04-24

Surface Inspection Sensor

#19
20250130176
2025-04-24

Visual Inspection Systems for Containers of Liquid Pharmaceutical Products

#20
20250076209
2025-03-06

INSPECTION DEVICE AND INSPECTION METHOD

#21
20250076208
2025-03-06

SPECTRAL ANGULAR METROLOGY

#22
20250076204
2025-03-06

IMAGING SYSTEM AND IMAGING INSPECTION APPARATUS INCLUDING THE SAME

#23
20250067660
2025-02-27

SYSTEM AND METHOD FOR USE OF POLARIZED LIGHT TO IMAGE TRANSPARENT MATERIALS APPLIED TO OBJECTS

#24
20250060316
2025-02-20

APPARATUS FOR ACQUIRING THREE-DIMENSIONAL INFORMATION OF OBJECTS AND SURFACES FOR AN ARTIFICIAL VISION SYSTEM FOR AUTOMATIC OPTICAL INSPECTION OF THE VISUAL QUALITY OF AN UNDERLYING OBJECT, IN PARTICULAR ELECTRONIC ASSEMBLIES, CIRCUIT BOARDS AND THE LIKE

#25
20250024155
2025-01-16

SUBSTRATE PROCESSING APPARATUS AND MONITORING METHOD

#26
20250012732
2025-01-09

SURFACE INSPECTION APPARATUS

#27
20240426761
2024-12-26

Method and optical system for imaging optical defect

#28
20240402093
2024-12-05

METHOD AND SYSTEM OF SAMPLE EDGE DETECTION AND SAMPLE POSITIONING FOR IMAGE INSPECTION APPARATUS

#29
20240385123
2024-11-21

OPTICAL COMPUTING METHODS AND SYSTEMS FOR INSPECTING A GLASS CONTAINER IN TRANSMITTED LIGHT

#30
20240361253
2024-10-31

OPTICAL PHASE MEASUREMENT METHOD AND SYSTEM

#31
20240342804
2024-10-17

Multi-Parameter Inspection Apparatus for Monitoring of Manufacturing Parts

#32
20240329377
2024-10-03

Dark-field confocal microscopic measurement apparatus and method based on vortex dichroism

#33
20240319110
2024-09-26

OPTICAL INSPECTION DEVICE FOR OPTICAL PERFORMANCE TEST OF DISPLAY DEVICE AND OPTICAL INSPECTION METHOD USING THE SAME

#34
20240319096
2024-09-26

FLUORESCENCE MODE FOR WORKPIECE INSPECTION

#35
20240310294
2024-09-19

METHOD FOR INSPECTING FOR SURFACE DEFECTS ON A CAST PART MADE OF SINGLE-CRYSTAL METAL AND SYSTEM FOR IMPLEMENTING SAME

#36
20240302267
2024-09-12

OPTICAL DEVICE

#37
20240280483
2024-08-22

DEFECT INSPECTION DEVICE

#38
20240280435
2024-08-22

OPTICAL MEASUREMENT APPARATUS

#39
20240248046
2024-07-25

MULTI-HEAD OPTICAL INSPECTION SYSTEMS AND TECHNIQUES FOR SEMICONDUCTOR MANUFACTURING

#40
20240233116
2024-07-11

A METHOD FOR QUALITY ASSESSMENT OF A FOOD PACKAGE AND A PACKAGING SYSTEM

#41
20240230551
2024-07-11

DEFECT INSPECTION DEVICE, DEFECT INSPECTION METHOD, AND ADJUSTMENT SUBSTRATE

#42
20240183796
2024-06-06

APPARATUS FOR INSPECTING SURFACE OF OBJECT

#43
20240183655
2024-06-06

MEASURING APPARATUS AND METHOD FOR ROUGHNESS AND/OR DEFECT MEASUREMENT ON A SURFACE

#44
20240133824
2024-04-25

DEFECT INSPECTION DEVICE, DEFECT INSPECTION METHOD, AND ADJUSTMENT SUBSTRATE

#45
20240102940
2024-03-28

DEVICE FOR INSPECTING THE SURFACE OF A TRANSPARENT OBJECT, AND CORRESPONDING METHOD

#46
20240077425
2024-03-07

Method and system for detecting a defect on a semi-reflective film by illuminating different light sources along the same optical axis

#47
20240053277
2024-02-15

MARKING INSPECTION DEVICE AND MARKING DEVICE FOR TRANSPARENT EDIBLE OBJECTS

#48
20240027359
2024-01-25

Inspection condition presentation apparatus, surface inspection apparatus, inspection condition presentation method and program

#49
20230417683
2023-12-28

OPTICAL INSPECTION USING CONTROLLED ILLUMINATION AND COLLECTION POLARIZATION

#50
20230358688
2023-11-09

Foreign Substance Detection Device and Detection Method

#51
20230341333
2023-10-26

COMMUNICATION BETWEEN AN OPTICAL MEASURING DEVICE AND TWO MEASURING CELLS ACCOMMODATED THEREIN

#52
20230341332
2023-10-26

Time domain multiplexed defect scanner

#53
20230311390
2023-10-05

INSPECTION APPARATUS, INJECTION MOLDING SYSTEM, AND INSPECTION METHOD

#54
20230258578
2023-08-17

Multi-parameter inspection apparatus for monitoring of manufacturing parts using a polarization image detector

#55
20230243756
2023-08-03

METHODS AND SYSTEMS FOR DETERMINING THE GROWTH STAGE OF A PLANT

#56
20230228692
2023-07-20

Methods and systems for targeted monitoring of semiconductor measurement quality

#57
20230204519
2023-06-29

3D image acquisition system for optical inspection and method for optical inspection of objects, in particular electronic assemblies, electronic boards and the like

#58
20230194438
2023-06-22

Method of evaluating semiconductor wafer

#59
20230187242
2023-06-15

Reflective waveplates for pupil polarization filtering

#60
20230187241
2023-06-15

Single-Material Waveplates for Pupil Polarization Filtering

#61
20230184691
2023-06-15

WAFER INSPECTION APPARATUS USING THREE-DIMENSIONAL IMAGE AND METHOD OF INSPECTING WAFER USING THE SAME

#62
20230152213
2023-05-18

ELLIPSOMETER AND APPARATUS FOR INSPECTING SEMICONDUCTOR DEVICE INCLUDING THE ELLIPSOMETER

#63
20230114917
2023-04-13

FinFET device and method of forming and monitoring quality of the same

#64
20230070161
2023-03-09

Inspection apparatus, injection molding system, and inspection method

#65
20230060883
2023-03-02

Defect inspection apparatus and defect inspection method

#66
20230027008
2023-01-26

Container visual inspection assembly and method

#67
20230025211
2023-01-26

METHOD FOR EVALUATING ORIENTATION OF NANOWIRE IN TRANSPARENT MATERIAL, METHOD FOR MANAGING STEPS IN WHICH SAID METHOD IS USED, AND METHOD FOR PRODUCING RESIN CURED ARTICLE

#68
20230011982
2023-01-12

Method and system for optical analysis of a component of an aerosol generating article

#69
20220339835
2022-10-27

Part control device and method

#70
20220334066
2022-10-20

Apparatus and method for inspecting cans

#71
20220322943
2022-10-13

OPTICAL DETECTION OF FOREIGN METAL OBJECTS ON SUBJECTS BEFORE UNDERGOING MAGNETIC RESONANCE IMAGING

#72
20220317057
2022-10-06

METHOD AND SYSTEM FOR IN-LINE OPTICAL SCATTEROMETRY

#73
20220291140
2022-09-15

Defect inspection device and defect inspection method

#74
20220251737
2022-08-11

Carder, web guiding element, spinning mill preparation installation and method for identifying undesired particles

#75
20220236193
2022-07-28

METHOD AND DEVICE FOR OPTICALLY INSPECTING CONTAINERS

#76
20220187218
2022-06-16

Angle independent optical surface inspector

#77
20220146435
2022-05-12

Optical imaging apparatus, optical inspection apparatus, and optical inspection method

#78
20220146434
2022-05-12

IMAGE PROCESSING APPARATUS, INFORMATION GENERATION APPARATUS, AND METHOD THEREOF

#79
20220099596
2022-03-31

Test structure design for metrology measurements in patterned samples

#80
20220057337
2022-02-24

Optical inspection device for optical performance test of display device and optical inspection method using the same

#81
20210405086
2021-12-30

Super resolution for magneto-optical microscopy

#82
20210364451
2021-11-25

OPTICAL PHASE MEASUREMENT METHOD AND SYSTEM

#83
20210356408
2021-11-18

Multi-parameter inspection apparatus for monitoring of additive manufacturing parts

#84
20210333719
2021-10-28

Increasing signal-to-noise ratio in optical imaging of defects on unpatterned wafers

#85
20210318231
2021-10-14

Liquid Crystal-Based Detection of Air Contaminants Using Metal Surfaces

#86
20210270750
2021-09-02

MEASUREMENT APPARATUS AND METHOD

#87
20210173122
2021-06-10

System, method and apparatus for polarization control

#88
20210116368
2021-04-22

Optical inspection

#89
20210088453
2021-03-25

Sample surface polarization modification in interferometric defect inspection

#90
20210082725
2021-03-18

Wafer inspection apparatus

#91
20210080405
2021-03-18

Method and system for determining alignment and orientation of a target

#92
20210072151
2021-03-11

OPTICAL DETECTION METHOD AND SYSTEM FOR DETECTING A SPATIAL FEATURE ON A SURFACE OF A SUBSTRATE

#93
20210055232
2021-02-25

Evaluation method of silicon wafer

#94
20210048384
2021-02-18

Method and apparatus for analysing a component

#95
20210036148
2021-02-04

FinFET device and method of forming and monitoring quality of the same

#96
20210025829
2021-01-28

Defect inspection apparatus and defect inspection method

#97
20210010927
2021-01-14

Surface defect measuring apparatus and method by microscopic scattering polarization imaging

#98
20200408700
2020-12-31

Semiconductor defect inspection apparatus

#99
20200333262
2020-10-22

Simultaneous multi-directional laser wafer inspection

#100
20200292301
2020-09-17

Glass product stress evaluation system and method

#101
20200258792
2020-08-13

System, method and non-transitory computer readable medium for tuning sensitivities of, and determining a process window for, a modulated wafer

#102
20200256804
2020-08-13

Defect inspection apparatus and defect inspection method

#103
20200249584
2020-08-06

Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measured

#104
20200232921
2020-07-23

Detector

#105
20200182803
2020-06-11

Mask inspection apparatus, switching method, and mask inspection method

#106
20200158492
2020-05-21

Polarization measurements of metrology targets and corresponding target designs

#107
20200150057
2020-05-14

SYSTEMS AND METHODS FOR AUTOMATED EVALUATION OF GLASS-BASED SUBSTRATES FOR BIREFRINGENCE DEFECTS

#108
20200150054
2020-05-14

Radial polarizer for particle detection

#109
20200132608
2020-04-30

Scanning differential interference contrast in an imaging system design

#110
20200115068
2020-04-16

System and method for inspecting aircraft windows

#111
20200103355
2020-04-02

Interferometer with pixelated phase shift mask

#112
20200088649
2020-03-19

Method of detecting a defect on a substrate, apparatus for performing the same and method of manufacturing semiconductor device using the same

#113
20200057005
2020-02-20

Test structure design for metrology measurements in patterned samples

#114
20190360940
2019-11-28

Method and System for Detecting Abnormalities in Coated Substrates

#115
20190331609
2019-10-31

Semiconductor wafer evaluation method and semiconductor wafer

#116
20190304851
2019-10-03

Sample inspection using topography

#117
20190250094
2019-08-15

Method and apparatus for measuring a parameter of interest using image plane detection techniques

#118
20190212254
2019-07-11

Functional surfaces for liquid crystal-based detection of chlorine gas

#119
20190196081
2019-06-27

Device for testing optical properties and method for testing optical properties

#120
20190195691
2019-06-27

Optical device for obtaining 3D spatial information

#121
20190170655
2019-06-06

Sub-resolution defect detection

#122
20190154594
2019-05-23

Optical phase measurement method and system

#123
20190113463
2019-04-18

Optical test system and method, and method of manufacturing semiconductor device by using the optical test system and method

#124
20190094702
2019-03-28

Metrology method and device

#125
20190049390
2019-02-14

Method and apparatus for detecting a crack in a transparent article

#126
20190033228
2019-01-31

Examination device

#127
20190033226
2019-01-31

Imaging apparatus for obtaining image of polarizing film, inspection apparatus, and inspection method

#128
20180364591
2018-12-20

Adjustment of a metrology apparatus or a measurement thereby based on a characteristic of a target measured

#129
20180364177
2018-12-20

Methods and apparatus for polarized wafer inspection

#130
20180350972
2018-12-06

FinFET device and method of forming and monitoring quality of the same

#131
20180335394
2018-11-22

IMAGE CAPTURING DEVICE AND INSPECTION APPARATUS AND INSPECTION METHOD

#132
20180302605
2018-10-18

Three-dimensional inspection

#133
20180292574
2018-10-11

System, method and apparatus for polarization control

#134
20180284032
2018-10-04

Method of testing an object and apparatus for performing the same

#135
20180284031
2018-10-04

Computerized method for configuring an inspection system, computer program product and an inspection system

#136
20180253013
2018-09-06

Optical system of a microlithographic projection exposure system or of a wafer inspection system

#137
20180224711
2018-08-09

Inspection and metrology using broadband infrared radiation

#138
20180217509
2018-08-02

METHOD AND DEVICE FOR CHARACTERIZING A WAFER PATTERNED BY AT LEAST ONE LITHOGRAPHY STEP

#139
20180195952
2018-07-12

Method comprising evaluating substrate by polarized parallel light

#140
20180188189
2018-07-05

Inspection apparatus and inspection method using the same

#141
20180144996
2018-05-24

System, method and non-transitory computer readable medium for tuning sensitivies of, and determining a process window for, a modulated wafer

#142
20180144995
2018-05-24

OPTICAL INSPECTION APPARATUS AND METHOD AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE APPARATUS

#143
20180128736
2018-05-10

Image forming device

#144
20180114306
2018-04-26

Polarized image acquisition apparatus, pattern inspection apparatus, polarized image acquisition method, and pattern inspection method

#145
20180088347
2018-03-29

Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method

#146
20180088055
2018-03-29

Inspection device

#147
20180073993
2018-03-15

Simultaneous multi-directional laser wafer inspection

#148
20180073979
2018-03-15

DEFECT INSPECTION SYSTEM, METHOD OF INSPECTING DEFECTS, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE METHOD

#149
20180071999
2018-03-15

Inspection systems for additive manufacturing systems

#150
20180067060
2018-03-08

Defect inspecting method and defect inspecting apparatus

#151
20180067057
2018-03-08

Method and device for focusing in an inspection system

#152
20180031490
2018-02-01

Inspection device and inspection system

#153
20180024075
2018-01-25

Pattern inspection apparatus for detecting a pattern defect

#154
20180017502
2018-01-18

Examination device

#155
20170363547
2017-12-21

Defect detection method and defect detection device and defect observation device provided with same

#156
20170276613
2017-09-28

Methods and apparatus for polarized wafer inspection

#157
20170236266
2017-08-17

System and method for detecting defects on a specular surface with a vision system

#158
20170227462
2017-08-10

Method and apparatus for detecting holes in substrates in absorbent article converting lines

#159
20170176346
2017-06-22

Inspection systems and techniques with enhanced detection

#160
20170176323
2017-06-22

Polarization inspection device

#161
20170146465
2017-05-25

TEST STRUCTURE DESIGN FOR METROLOGY MEASUREMENTS IN PATTERNED SAMPLES

#162
20170146463
2017-05-25

Defect inspection device and defect inspection method

#163
20170138868
2017-05-18

Optical method and system for defects detection in three-dimensional structures

#164
20170132772
2017-05-11

Inspection method and inspection apparatus

#165
20170110567
2017-04-20

FinFET device and method of forming and monitoring quality of the same

#166
20170102338
2017-04-13

Defect inspection method and its device

#167
20170082553
2017-03-23

Photon emitter array including photon emitters with different orientations

#168
20170082425
2017-03-23

Defect reviewing method and device

#169
20170025149
2017-01-26

Apparatus and methods using interference in light reflected from articles

#170
20170016835
2017-01-19

Optical phase measurement method and system

#171
20170010222
2017-01-12

Front quartersphere scattered light analysis

#172
20160377555
2016-12-29

Systems and methods for automatically inspecting wire segments

#173
20160370300
2016-12-22

Inspection apparatus and inspection method

#174
20160327494
2016-11-10

Upper surface foreign material detecting device of ultra-thin transparent substrate

#175
20160290933
2016-10-06

Optical inspection system

#176
20160204043
2016-07-14

Methods for monitoring semiconductor fabrication processes using polarized light

#177
20160202177
2016-07-14

System and method for semiconductor wafer inspection and metrology

#178
20160187262
2016-06-30

Inspection device of display device and inspection method of display device

#179
20160178531
2016-06-23

Remote connection system for an aircraft

#180
20160178351
2016-06-23

Polarization measurements of metrology targets and corresponding target designs

#181
20160153915
2016-06-02

Surface inspecting method

#182
20160153914
2016-06-02

Inspection systems and techniques with enhanced detection

#183
20160123894
2016-05-05

Measurement systems having linked field and pupil signal detection

#184
20160116421
2016-04-28

Defect inspecting method and defect inspecting apparatus

#185
20160116396
2016-04-28

Non-linear optical ellipsometry for surface monitoring and characterization

#186
20160103015
2016-04-14

Circular polarization filter and application therefor

#187
20160084773
2016-03-24

Method and system for improving optical measurements on small targets

#188
20160069816
2016-03-10

Defect detection method and defect detection device and defect observation device provided with same

#189
20160047752
2016-02-18

Optical module for surface inspection and surface inspection apparatus including the same

#190
20160027165
2016-01-28

Detecting defects on a wafer using defect-specific and multi-channel information

#191
20160025992
2016-01-28

Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method

#192
20160025646
2016-01-28

Compressive sensing with illumination patterning

#193
20160018340
2016-01-21

Method for reviewing a defect and apparatus

#194
20150377795
2015-12-31

DEFECT DETECTION USING SURFACE ENHANCED ELECTRIC FIELD

#195
20150377794
2015-12-31

Method, apparatus and system for generating multiple spatially separated inspection regions on a substrate

#196
20150369749
2015-12-24

System and method for detecting pin-holes in fiberglass and composite parts

#197
20150346083
2015-12-03

Inspection apparatus using polarized lights

#198
20150338745
2015-11-26

Evaluation method and device, processing method, and exposure system

#199
20150285743
2015-10-08

Features maps of articles with polarized light

#200
20150276623
2015-10-01

Defect inspection method and defect inspection device

#201
20150212012
2015-07-30

Optical method and system for measuring isolated features of a structure

#202
20150176806
2015-06-25

Method and apparatus for observing subsurfaces of a target material

#203
20150144769
2015-05-28

Inspection apparatus and inspection method

#204
20150085200
2015-03-26

Liquid crystal modulator for detecting a defective substrate and inspection apparatus having the same

#205
20150077742
2015-03-19

System and method for decoration inspection on transparent media

#206
20150069247
2015-03-12

METHOD AND SYSTEM FOR REAL TIME INSPECTION OF A SILICON WAFER

#207
20150062581
2015-03-05

Defect inspection apparatus and defect inspection method

#208
20150054941
2015-02-26

Image capturing device and inspection apparatus and inspection method

#209
20150042993
2015-02-12

Front quartersphere scattered light analysis

#210
20150042987
2015-02-12

Front quartersphere scattered light analysis

#211
20150036120
2015-02-05

Method and arrangement for measuring blowing structures of a prestressed disc

#212
20140361152
2014-12-11

System, method and apparatus for polarization control

#213
20140354994
2014-12-04

Photon emitter array

#214
20140204202
2014-07-24

Inspection apparatus

#215
20140185044
2014-07-03

Apparatus and method of inspecting a defect of an object

#216
20140168417
2014-06-19

Inspection device and inspection method

#217
20130342833
2013-12-26

Scattered light measurement system

#218
20130335733
2013-12-19

System with multiple scattered light collectors

#219
20130293888
2013-11-07

Composite polarizer with adjustable polarization angles

#220
20130265577
2013-10-10

Variable polarization wafer inspection

#221
20130258336
2013-10-03

Optical device, particularly a polarimeter, for detecting inhomogeneities in a sample

#222
20130148326
2013-06-13

Method and apparatus for observing subsurfaces of a target material

#223
20120274931
2012-11-01

Defect detection method and defect detection device and defect observation device provided with same

#224
20120038921
2012-02-16

Method and system for inspecting beveled objects

#225
20120019835
2012-01-26

Defect inspecting method and defect inspecting apparatus

#226
20120013898
2012-01-19

Inspecting a workpiece using scattered light

#227
20110158502
2011-06-30

Mapping variations of a surface

#228
20110069313
2011-03-24

Method for inspecting defects and defect inspecting apparatus

#229
20110019275
2011-01-27

POLYESTER FILM FOR RELEASE FILM FOR POLARIZING PLATE, AND LAMINATE HAVING IMPROVED POLARIZATION CHARACTERISTICS

#230
20100265518
2010-10-21

Back quartersphere scattered light analysis

#231
20100149527
2010-06-17

System and method for controlling a beam source in a workpiece surface inspection system

#232
20100111515
2010-05-06

Illumination apparatus and appearance inspection apparatus including the same

#233
20100110420
2010-05-06

Inspecting a workpiece using polarization of scattered light

#234
20100110419
2010-05-06

Front quartersphere scattered light analysis

#235
20100014083
2010-01-21

Method and apparatus for inspecting defects

#236
20100014075
2010-01-21

Method and Apparatus for Inspecting Defects

#237
20090201494
2009-08-13

Inspection tools supporting multiple operating states for multiple detector arrangements

#238
20090161943
2009-06-25

Inspection apparatus and inspection method

#239
20090021749
2009-01-22

High throughput across-wafer-variation mapping

#240
20080304057
2008-12-11

System and method for controlling light scattered from a workpiece surface in a surface inspection system

#241
20070285665
2007-12-13

Apparatus and method for inspecting film defect

#242
20070252977
2007-11-01

System and method for controlling a beam source in a workpiece surface inspection system

#243
20070206183
2007-09-06

Method and apparatus for auto-adjusting illumination

#244
20070024998
2007-02-01

System and method for inspecting a workpiece surface by analyzing scattered light in a front quartersphere region above the workpiece

#245
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