168258 ⎘
Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light; Systems specially adapted for particular applications; Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined; Inspecting patterns on the surface of objects and suppressing pattern images
Method and apparatus for inspecting defects
#2Defect inspection device and defect inspection method
#3Method and apparatus for inspecting defects
#4Apparatus and method for inspecting defect on object surface
#5Surface defect inspection apparatus and surface defect inspection method
#6All-reflective optical systems for broadband wafer inspection
#7Foreign matter inspection apparatus and method