PLASMA MONITORING SYSTEM, PLASMA MONITORING METHOD, AND MONITORING DEVICE

HIGH SPECTRAL AND TEMPORAL RESOLUTION GLOW DISCHARGE SPECTROMETRY DEVICE AND METHOD

SPATIAL OPTICAL EMISSION SPECTROSCOPY FOR ETCH UNIFORMITY

MIXED SALINITY IMPACT ON INTERPRETATION AND REMEDIAL DETECTION TECHNIQUE

DEVICE FOR MEASURING ELEMENT CONCENTRATIONS IN PLANT LEAVES AND METHOD OF IMPLEMENTING THE SAME

Spatial optical emission spectroscopy for etch uniformity

Portable water quality instrument

Device and method for detecting concentration of specimen

Probe for detecting near field and near-field detection system including the same

Portable water quality instrument

Multi-dimensional spectroscopy of macromolecules

Glow plasma gas measurement signal processing

Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment

METHOD OF DETERMINING CLEANING CONDITIONS AND PLASMA PROCESSING DEVICE

GLOW PLASMA STABILIZATION

SYSTEMS AND METHODS FOR RAPID ELEMENTAL ANALYSIS OF AIRBORNE PARTICLES USING ATMOSPHERIC GLOW DISCHARGE OPTICAL EMISSION SPECTROSCOPY

Plasma sensing device, plasma monitoring system and method of controlling plasma processes

Plasma monitoring apparatus and plasma processing system

Optical emission spectroscopy system, method of calibrating the same, and method of fabricating semiconductor device

Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment

OES device, plasma processing apparatus including the same and method of fabricating semiconductor device

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND PLASMA PROCESSING ANALYSIS METHOD

Optical detection of tracer gases in a gas discharge cell having unexposed electrodes

ICP emission spectrophotometer

Method and tool for producing sample containing object, method for performing glow discharge optical emission spectrometry, and glow discharge optical emission spectrometer

Computed tomography using intersecting views of plasma using optical emission spectroscopy during plasma processing

Method for determining a mixing ratio of N organic, miscible components in a mixture of said components and use of an inorganic marker

Method for measuring gas dissociation degrees

Methods and systems for chamber matching and monitoring

Methods and systems for chamber matching and monitoring

Plasma spectroscopic analysis method and inhibitor of plasma emission derived from non-target

Systems and methods for detecting oxygen in-situ in a substrate area of a substrate processing system

Method and system for determining downhole optical fiber orientation and/or location

Analysis system for online-transferred analysis sample

Laser apparatus enabling calculation of effective driving time and remaining lifetime taking account of drive conditions including temperature

Optical emission spectroscope with a pivotably mounted inductively coupled plasma source

Spatially resolved optical emission spectroscopy (OES) in plasma processing

Sample-analyzing system

Methods for manufacturing semiconductor device and for detecting end point of dry etching

Thermal stress resistant micro-plasma emission detector unit

In-situ spatially resolved plasma monitoring by using optical emission spectroscopy

Wideband antenna structure with optics reflector as ground plane and associated methods

Inspection method of vitreous silica crucible

Induction device

Glow discharge spectroscopy method and system for measuring in situ the etch depth of a sample

Methods of spectroscopic analysis of diamonds and apparatuses thereof

Method and system for determining downhole optical fiber orientation and/or location

Downhole fluid properties analysis device and tools comprising such a device

Plasma processing apparatus, plasma processing method and plasma processing analysis method

Plasma spectrochemical analysis method and plasma spectrochemical analyzer

Method of accurate thickness measurement of boron carbide coating on copper foil

Stabilized ICP emission spectrometer and method of using

ICP emission spectrometer

Plasma spectrometry method

Object detection systems

System for light source location detection

Optimization of nucleation and crystallization for lyophilization using gap freezing

Optimization of nucleation and crystallization for lyophilization using gap freezing

Devices and systems including a boost device

Systems and methods for computer models of animal feed

Spatially resolved optical emission spectroscopy (OES) in plasma processing

Induction device

Gas concentration estimation device

System for provision of analysis results, analysis terminal, and method for provision of analysis results

Plasma processing apparatus and analyzing apparatus

Plasma generation provision, internal combustion engine and analysis provision

Micro-plasma emission detector unit and method

High-frequency power supply for plasma and ICP optical emission spectrometer using the same

Analysis apparatus and analysis method

Analysis apparatus and analysis method

Plasma emission transfer and modification device

Microplasma for downhole compositional analysis

Device and method for controlling a dehydration operation during a freeze-drying treatment

Method and device for plasma-treating workpieces

Induction device

Method and apparatus for detecting plasma unconfinement

MICROWAVE PLASMA ATOMIC FLUORESCENCE MERCURY ANALYSIS SYSTEM

Optimization of nucleation and crystallization for lyophilization using gap freezing

Methods and apparatus for normalizing optical emission spectra

CONFIGURATIONS OF USING A POINT LIGHT SOURCE IN THE CONTEXT OF SAMPLE SEPARATION

Etching apparatus, analysis apparatus, etching treatment method, and etching treatment program

Method for detecting optical signals, microfluidic mixing chip having light emitting compound and system thereof

Discharge lamp for GDS with an axial magnetic field

METHOD FOR MEASURING DOPANT CONCENTRATION DURING PLASMA ION IMPLANTATION

Method and apparatus for identifying the chemical composition of a gas

ANALYTICAL METHOD AND ANALYTICAL SYSTEM

Photonic measurement instrument using fiber optics

APPARATUS FOR DETECTING ARCS

Systems and methods for determining recycled thermoplastic content

Devices and systems including a boost device

Sample introduction solutions and methods

ENDPOINT DETECTION FOR A REACTOR CHAMBER USING A REMOTE PLASMA CHAMBER

Method for measuring dopant concentration during plasma ion implantation

Nano-particle trap using a microplasma

FLUID ANALYZER SYSTEMS

Method of depositing a silicon-containing material by utilizing a multi-step fill-in process in a deposition machine

Method and apparatus for detecting plasma unconfinement

Methods and apparatus for normalizing optical emission spectra

Particle density measuring probe and particle density measuring equipment

SUBSTRATE FOR OBSERVATION AND OBSERVATION SYSTEM

Method for measuring dopant concentration during plasma ion implantation

REAL TIME LEAK DETECTION SYSTEM OF PROCESS CHAMBER

Analysis method and analysis apparatus

Method and apparatus for identifying the chemical composition of a gas

Induction device

Plasma processing apparatus

TARGET MOLECULE EVALUATION METHOD AND APPARATUS

Plasma spectroscopy system with a gas supply

In-stream spectroscopic elemental analysis of particles being conducted within a gaseous stream

Method of forming a deposited material by utilizing a multi-step deposition/etch/deposition (D/E/D) process

Plasma processing apparatus and plasma processing method

Full spectrum adaptive filtering (FSAF) for low open area endpoint detection

Methods and apparatus for evaluating insulating glass units

Devices and systems including a boost device

Multivariate monitoring method for plasma process machine

Self-calibrating optical emission spectroscopy for plasma monitoring

Plasma processing system and apparatus and a sample processing method

Method and apparatus for measuring electron density of plasma and plasma processing apparatus

Fluid analyser systems

Method And Apparatus For Seasoning Semiconductor Apparatus Of Sensing Plasma Equipment

Method and apparatus for measuring electron density of plasma and plasma processing apparatus

Plasma generating equipment

METHODS AND APPARATUS FOR EVALUATING INSULATING GLASS UNITS

Method and apparatus for measuring electron density of plasma and plasma processing apparatus

Gas monitor device

Optical emission device with boost device

Methods and apparatus for evaluating insulating glass units

Spectroscopy-based real-time control for microwave-assisted chemistry

Method and device utilizing plasma source for real-time gas sampling

Device and method for controlling dehydration during freeze-drying

In-situ micro-spectro-sensor for detecting gas leakage from vacuum chamber during plasma-based process

Method and apparatus for etch endpoint detection

Plasma processing system and method

Induction device for generating a plasma

Plasma processing apparatus and plasma processing method

Plasma treatment apparatus and light detection method of a plasma treatment

Method and system for monitoring plasma using optical emission spectrometry

Method of reworking structures incorporating low-k dielectric materials

Plasma leak monitoring method, plasma processing apparatus and plasma processing method

Method for in situ monitoring of chamber peeling

System and method for generating a discharge in gases

Method and system of discriminating substrate type

Detecting minority gaseous species by light-emission spectroscopy

Detecting gaseous species by light-emission spectrometry with spectrum processing

End point detection for sputtering and resputtering

Methods of determining an etching end point based on compensation for etching disturbances

System and method for generating a discharge in high pressure gases

Method and system for monitoring plasma using optical emission spectroscopy

Microwave plasma source

Optical control interface between controller and process chamber

Miniature gas cell with folded optics

Method and device utilizing plasma source for real-time gas sampling

Methods and apparatus for evaluating insulating glass units

Method and apparatus for measuring electron density of plasma and plasma processing apparatus

Plasma monitoring apparatus, and plasma processing apparatus including the same

Optical microresonator device with thermal isolation

Optically dithered atomic gyro-compass

Spectrographic applications of trichel pulses