168257 ⎘
Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light; Systems specially adapted for particular applications; Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined; Inspecting patterns on the surface of objects using a spatial filtering method
METHOD FOR MEASURING SURFACE PARAMETER OF COPPER FOIL, AND METHOD FOR SORTING COPPER FOIL
#2Dark field microscope
#3High throughput defect detection
#4SYSTEM AND METHOD FOR DETERMINING CONTACT HEIGHT OF A PACKAGED CHIP
#5A METHOD FOR FILTERING AN IMAGE AND ASSOCIATED METROLOGY APPARATUS
#6Dark field microscope
#7SYSTEM AND METHOD FOR PASSIVELY MONITORING A SAMPLE
#8Finding Semiconductor Defects Using Convolutional Context Attributes
#9EUV vessel inspection method and related system
#10Apparatus and method for analyzing particles
#11EUV vessel inspection method and related system
#12MEASUREMENT APPARATUS, MEASUREMENT METHOD, AND MEASUREMENT METHOD
#13Defect classification method, method of sorting photomask blanks, and method of manufacturing mask blank
#14High throughput, high resolution optical metrology for reflective and transmissive nanophotonic devices
#15Objective lens
#16EUV vessel inspection method and related system
#17Multilayer film metrology using an effective media approximation
#18Metrology apparatus, lithographic system, and method of measuring a structure
#19Urine analyzer and urinalysis method
#20Lighting device for inspection and inspection system
#21Phase contrast monitoring for extreme ultra-violet (EUV) masks defect inspection
#22Defect detection device and defect observation device
#23SYSTEM AND METHOD FOR SURFACE INSPECTION
#24Defect detection method and defect detection device and defect observation device provided with same
#25DEFECT OBSERVATION METHOD AND DEFECT OBSERVATION DEVICE
#26Determining a configuration for an optical element positioned in a collection aperture during wafer inspection
#27Inspection apparatus, semiconductor device manufacturing system including the same, and method of manufacturing a semiconductor device using the same
#28Optical inspection apparatus, a method of inspecting a substrate, and a method of treating a substrate
#29Inspection apparatus and method, lithographic apparatus, lithographic processing cell and device manufacturing method
#30Spatial-light-modulator-based signatures of intrinsic and extrinsic scattering surface markers for secure authentication
#31Defect detection method and defect detection device and defect observation device provided with same
#32System and method for apodization in a semiconductor device inspection system
#33Method and apparatus for inspecting defects
#34Compressive sensing with illumination patterning
#35Determining a configuration for an optical element positioned in a collection aperture during wafer inspection
#36Inspection system
#37Defect detection method and defect detection device and defect observation device provided with same
#38Wafer and reticle inspection systems and methods for selecting illumination pupil configurations
#39Simultaneous multi-spot inspection and imaging
#40Defect inspecting apparatus and defect inspecting method
#41Apparatus and method of inspecting a defect of an object
#42Methods and apparatus for inspection of articles, EUV lithography reticles, lithography apparatus and method of manufacturing devices
#43Defect detection method
#44System and method for apodization in a semiconductor device inspection system
#45Inspection apparatus
#46Substrate inspection
#47Defect inspection method and defect inspection apparatus
#48Inspection apparatus
#49Defect inspection device and defect inspection method
#50Defect inspecting device and defect inspecting method
#51Holographic Mask Inspection System with Spatial Filter
#52Defect detection method and defect detection device and defect observation device provided with same
#53Method and apparatus for inspecting defects
#54Laser radar projection with object feature detection and ranging
#55Contamination inspection method and contamination inspection device
#56Inspection apparatus and inspection method
#57Inspection method and inspection apparatus
#58Method of defect inspection and device of defect inspection
#59Inspection apparatus and method
#60Apparatus for inspecting defects
#61Defect inspection method and device thereof
#62Apparatus and method for inspecting defects
#63Illumination system for optical inspection
#64Inspection system using back side illuminated linear sensor
#65Apparatus and method for inspecting defects
#66Inspection method and apparatus
#67Fourier transform deflectometry system and method
#68APPARATUS AND METHOD FOR INSPECTING DEFECTS
#69Inspecting apparatus and inspecting method
#70Apparatus for inspecting defects
#71Defect inspection apparatus and defect inspection method
#72Illumination system for optical inspection
#73Method of detecting defects on an object
#74System and Method Producing Data For Correcting Autofocus Error in An Imaging Optical System
#75Inspection method and inspection apparatus
#76Method for inspecting defect and apparatus for inspecting defect
#77Dynamic illumination in optical inspection systems
#78Method and apparatus for inspecting defects
#79Inspection apparatus and inspection method
#80WAFER INSPECTION USING SHORT-PULSED CONTINUOUS BROADBAND ILLUMINATION
#81Inspection apparatus
#82Inspection tools supporting multiple operating states for multiple detector arrangements
#83Defect inspection method and defect inspection system
#84Simultaneous multi-spot inspection and imaging
#85Apparatus and method for inspecting defects
#86Apparatus and method for inspecting defect on object surface
#87Edge flaw detection device
#88Edge flaw detection device
#89Method and system for evaluating an object that has a repetitive pattern
#90Defect inspection system and method of the same
#91Laser radar projection with object feature detection and ranging
#92Method of imaging radiation from an object on a detection device and an inspection device for inspecting an object
#93Optical system for detecting anomalies and/or features of surfaces
#94Systems and methods for blocking specular reflection and suppressing modulation from periodic features on a specimen
#95Apparatus And Method For Inspecting Defects
#96Apparatus for inspecting defects
#97METHOD AND APPARATUS FOR DETECTING DEFECTS
#98Defect inspection apparatus and defect inspection method
#99DETACHABLY COUPLED IMAGE INTENSIFIER AND IMAGE SENSOR
#100Semiconductor Surface Inspection Apparatus and Method of Illumination
#101High throughput darkfield/brightfield wafer inspection system using advanced optical techniques
#102Method for recognizing patterns from assay results
#103Wafer inspection using short-pulsed continuous broadband illumination
#104Printed fourier filtering in optical inspection tools
#105Method for inspecting defect and apparatus for inspecting defect
#106Apparatus and method for inspecting defects
#107Simultaneous multi-spot inspection and imaging
#108Apparatus and method for testing defects
#109Apparatus and method for testing defects
#110High throughput darkfield/brightfield wafer inspection system using advanced optical techniques
#111Scanning microscopy
#112Multi-channel optical metrology
#113System and method for conducting adaptive fourier filtering to detect defects in dense logic areas of an inspection surface
#114Inspection method and inspection apparatus
#115Method and apparatus for detecting defects on a wafer
#116Use of optical fourier transform for dimensional control in microelectronics
#117Method and apparatus for reviewing defects
#118System for detection of wafer defects
#119Apparatus for determining optimum position of focus of an imaging system
#120Illumination system for optical inspection
#121Method and apparatus for inspecting pattern defects
#122Serrated Fourier filters and inspection systems
#123Systems and methods for inspecting an edge of a specimen
#124System for Detecting Anomalies and/or Features of a Surface
#125System for detection of wafer defects
#126System for detection of wafer defects
#127System for detection of wafer defects
#128Method and apparatus for high-throughput inspection of large flat patterned media using dynamically programmable optical spatial filtering
#129Laser projection with object feature detection
#130Method for generating high-contrast images of semiconductor sites via one-photon optical beam-induced current imaging and confocal reflectance microscopy
#131Variable illuminator and speckle buster apparatus
#132System for detecting anomalies and/or features of a surface
#133Apparatus and method for testing defects
#134Apparatus and method for testing defects
#135Programmable spatial filter for wafer inspection
#136Inspection system with oblique viewing angle
#137Appearance inspection apparatus and projection method for projecting image of sample under inspection
#138Dark field inspection system
#139Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process
#140Method and system for detecting defects
#141System for detection of wafer defects
#142High throughput brightfield/darkfield wafer inspection system using advanced optical techniques
#143Optical system for detecting anomalies and/or features of surfaces
#144Method and its apparatus for inspecting defects