171109 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by non-contact electron transfer, i.e. electron tunneling
Vibrating device, vibrating device module, electronic apparatus, and vehicle
#2High aspect-ratio low noise multi-axis accelerometers
#3MEMS tunneling micro seismic sensor
#4MEMS tunneling accelerometer
#5Method and apparatus for sensing applied forces
#6Device for Positioning a Moveable Object of Submicron Scale
#7Sub-threshold forced plate FET sensor for sensing inertial displacements, a method and system thereof
#8Quantum tunnelling sensor device and method
#9Measurement of micromovements
#10Nanoscale Force Transducer
#11Measurement of micromovements
#12Nanoparticle Vibration and Acceleration Sensors
#13Nanoscale Sensor
#14Polymer Nanosensor Device
#15Quantum tunnelling transducer device
#16Micro structure, cantilever, scanning probe microscope and a method of measuring deformation quantity for the fine structure
#17Tunneling effect element and physical quantity to electrical quantity transducer
#18Diamond triode devices with a diamond microtip emitter
#19Differential in-plane tunneling current sensor