171110 ⎘
Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by thermal pick-up
Electronic device for measuring a physical parameter
#2ACCELERATION SENSOR
#3Acceleration sensor
#4SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
#5Functional device
#6Micro-accelerometer